Pfeiffer Vacuum CMR371 User manual

OPERATING INSTRUCTIONS

Translation of the Original

CMR 371∣372∣373∣374∣375

Capacitive gauge

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support

you in your individual application with maximum performance and without malfunctions. The

name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and

complete range of top-quality products and first-class service. From this extensive, practical

experience we have gained a large volume of information that can contribute to efficient

deployment and to your personal safety.

In the knowledge that our product must avoid consuming work output, we trust that our

product can offer you a solution that supports you in the effective and trouble-free

implementation of your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/44

Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Variants 7

1.2 Target group 8

1.3 Conventions 8

1.3.1 Instructions in the text 8

1.3.2 Pictographs 8

1.3.3 Stickers on product 8

1.3.4 Abbreviations 9

1.4 Trademark proof 9

2 Safety 10

2.1 General safety information 10

2.2 Safety instructions 10

2.3 Safety precautions 12

2.4 Limits of use of product 13

2.5 Proper use 13

2.6 Foreseeable improper use 13

2.7 Responsibilities and warranty 13

2.8 Owner requirements 13

2.9 Personnel qualification 14

2.9.1 Ensuring personnel qualification 14

2.9.2 Personnel qualification for maintenance and repair 14

2.9.3 Advanced training with Pfeiffer Vacuum 15

2.10 Operator requirements 15

3 Product description 16

3.1 Function 16

3.2 Button and status display 16

3.3 Identifying the product 16

3.4 Scope of delivery 16

4 Transport and storage 17

4.1 Transporting the product 17

4.2 Storing the product 17

5 Installation 18

5.1 Establishing vacuum connection 18

5.2 Establishing electric connection 19

6 Operation 22

6.1 Operating modes 22

6.2 Converting measuring signal and pressure 22

7 Dismantling 24

8 Maintenance 26

8.1 Cleaning of components 26

8.2 Calibrating gauge 27

8.2.1 Carrying out zero point calibration with "zero" button 28

8.2.2 Carry out zero point calibration with “zero“ button and ramp function 29

8.3 Load factory settings 30

9 Shipping 31

10 Recycling and disposal 32

10.1 General disposal information 32

Table of contents

3/44

10.2 Dispose of gauges 32

11 Service solutions by Pfeiffer Vacuum 33

12 Accessories 35

12.1 Accessory information 35

12.2 Ordering accessories 35

13 Technical data and dimensions 36

13.1 General 36

13.2 Technical data 36

13.3 Dimensions 39

ETL certification 40

EC Declaration of Conformity 41

UK Declaration of Conformity 42

Table of contents

4/44

List of tables

Tbl. 1: Applicable documents 7

Tbl. 2: Variants 7

Tbl. 3: Abbreviations used 9

Tbl. 4: Permissible ambient conditions 13

Tbl. 5: “STATUS“ light emitting diode 22

Tbl. 6: Constants for converting measuring signal and pressure 23

Tbl. 7: Deviation of output signal between vertical upright and horizontal mounting

orientation

Tbl. 8: Recommended final pressure for zero point calibration 28

Tbl. 9: Conversion table: Pressure units 36

Tbl. 10: Conversion table: Units for gas throughput 36

Tbl. 11: Measured and pressure values 37

Tbl. 12: Electrical data 38

Tbl. 13: Internal volume and weight 38

Tbl. 14: Ambient conditions 38

Tbl. 15: Temperatures 38

Tbl. 16: Substances in contact with media 38

List of tables

5/44

List of figures

Fig. 1: Button and LED 16

Fig. 2: Establishing vacuum connection 19

Fig. 3: Connection diagram 20

Fig. 4: Measurement cable and Hirschmann cable socket 21

Fig. 5: Relation between measuring signal and pressure 22

Fig. 6: Zero point calibration with "zero" button 28

Fig. 7: Zero point calibration with "zero" button 29

Fig. 8: Use the "zero" button to load the factory settings 30

Fig. 9: Dimensions 39

List of figures

6/44

1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This document describes the function of the products listed in the following and provides the most im-

portant information for safe use. The description is written in accordance with the valid directives. The

information in this document refers to the current development status of the products. The document

retains its validity assuming that the customer does not make any changes to the product.

1.1.1 Applicable documents

Designation Document

OmniControl “Control unit” operating instructions PT 0670

TPG 366 “Total Pressure Measuring and Control Unit” operating in-

structions

BG 5501

Declaration of conformity A component of these in-

structions

Tbl. 1: Applicable documents

You can find these documents in the Pfeiffer Vacuum Download Center.

1.1.2 Variants

This document applies to products with the following article numbers:

Article number Type Connection Measuring range min/max.

PT R25 100 CMR 371 1/2" tube 1 × 10-1 hPa (1 V)

1100 hPa (9.8 V)

1000 hPa (FS, 9 V)

PT R25 101 DN 16 ISO-KF

PT R25 102 DN 16 CF-R

PT R25 103 8 VCR

PT R25 110 CMR 372 1/2" tube 1 × 10-2 hPa (1 V)

110 hPa (9.8 V)

100 hPa (FS, 9 V)

PT R25 111 DN 16 ISO-KF

PT R25 112 DN 16 CF-R

PT R25 113 8 VCR

PT R25 120 CMR 373 1/2" tube 1 × 10-3 hPa (1 V)

11 hPa (9.8 V)

10 hPa (FS, 9 V)

PT R25 121 DN 16 ISO-KF

PT R25 122 DN 16 CF-R

PT R25 123 8 VCR

PT R25 130 CMR 374 1/2" tube 1 × 10-4 hPa (1 V)

1.1 hPa (9.8 V)

1 hPa (FS, 9 V)

PT R25 131 DN 16 ISO-KF

PT R25 132 DN 16 CF-R

PT R25 133 8 VCR

PT R25 140 CMR 375 1/2" tube 1 × 10-5 hPa (1 V)

0.11 hPa (9.8 V)

0.1 hPa (FS, 9 V)

PT R25 141 DN 16 ISO-KF

PT R25 142 DN 16 CF-R

PT R25 143 8 VCR

Tbl. 2: Variants

You can find the part number on the rating plate of the product.

About this manual

7/44

Pfeiffer Vacuum reserves the right to make technical changes without prior notification.

Information that relates to only one of the products is indicated accordingly.

The figures in this document are not to scale.

The figures show the product with a DN 16 ISO-KF vacuum connection, however, they also apply to the

other vacuum connections where applicable.

Dimensions are provided in mm, unless specified otherwise.

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

The pictographs used in the document indicate useful information.

Note

Tip

Wear laboratory gloves

Perform a visual inspection

1.3.3 Stickers on product

This section describes all the stickers on the product along with their meanings.

About this manual

8/44

D-35614 Asslar

Mod.

P/N

S/N

Input

CxR 3xx

PT R2x xxx

xxxxxxxxx

xx...xx V DC x W LPS

Made in Liechtenstein 2023/06

3103457

Range xxxx hPa

Rating plate

The rating plate is located on

the side of the unit.

1.3.4 Abbreviations

Abbreviation Explanation

AC Alternating current (AC)

OD Analog/Digital

ATM Atmosphere

c Constant for converting measuring signal and pressure

DC Direct current

FKM Fluorinated rubber

FS Measuring range max. (full scale)

GND Ground

HV High vacuum

LPS Limited power source

MSL Mean sea level

p Pressure

PE Protective earth (earthed conductor)

PELV Protective extra low voltage

U Measuring signal [V] (output voltage)

Tbl. 3: Abbreviations used

1.4 Trademark proof

●VCR® is a trademark of the Swagelok Company.

●Vacon 70 is a trademark of Vacuumschmelze GmbH & Co. KG.

About this manual

9/44

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Safety instructions

Safety instructions according to product life stages

All safety instructions in this document are based on the results of a risk assessment.

Pfeiffer Vacuum has taken into account all the relevant life stages of the product.

Risks during installation

DANGER

Danger to life due to dangerous contact voltage

Voltages above 30 V (AC) or 60 V (DC) are considered dangerous in accordance with EN 61010. If

you come into contact with dangerous contact voltage, this can result in injury through electric shocks

or even death.

►Only connect the product to devices which meet the following criteria:

●Requirements of the earthed protective extra-low voltage (PELV)

●Limited power source (LPS) Class 2

►Secure the line to the product.

–Pfeiffer Vacuum measuring and control equipment complies with this requirement.

Safety

10/44

Other manuals for CMR371

This manual suits for next models

Table of contents

Other Pfeiffer Vacuum Measuring Instrument manuals

Pfeiffer Vacuum

Pfeiffer Vacuum MPT 200 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum PPT 200 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum GSD 350 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum TPG 202 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum GAUGE/IO Owner's manual

Pfeiffer Vacuum

Pfeiffer Vacuum GSD 350 OMNISTAR User manual

Pfeiffer Vacuum

Pfeiffer Vacuum IKR 251 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum IKR 261 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum FullRange PTR 91 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum TPG 500 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum FullRange PKR 36 Series User manual

Pfeiffer Vacuum

Pfeiffer Vacuum PCR 260 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum QMG 422 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum FullRange PBR 260 Manual

Pfeiffer Vacuum

Pfeiffer Vacuum OmniStar GSD 300 C Series User manual

Pfeiffer Vacuum

Pfeiffer Vacuum QMA 4 0 Series User manual

Pfeiffer Vacuum

Pfeiffer Vacuum PrismaPlus QMG 220 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum OmniStar GSD 300 O1 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum TTR 91 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum GSD 350 OMNISTAR User manual

Pfeiffer Vacuum

Pfeiffer Vacuum CCR 351 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum IKR 251 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum PKR 261 User manual

Pfeiffer Vacuum

Pfeiffer Vacuum IKR 270 User manual

Popular Measuring Instrument manuals by other brands

Suaoki

Suaoki D40 user manual

Elster

Elster BK-G1.6 operating instructions

Endress+Hauser

Endress+Hauser Deltabar FMD71 technical information

Duratool

Duratool D03128 manual

Vega

Vega VEGAPULS 65 Quick setup guide

Tonghui

Tonghui TH2618B Operation manual

Tenmars

Tenmars TM-801 user manual

MSR

MSR 145 user manual

TPS

TPS WP-82 manual

ELMETRON

ELMETRON CP-511 user manual

PCB Piezotronics

PCB Piezotronics 003C30 Installation and operating manual

Tenma

Tenma 72-10465 manual

Endress+Hauser

Endress+Hauser Proline Promag 50 Brief operating instructions

Siemens

Siemens SITRANS F Coriolis FCT030 Function manual

KLINGER

KLINGER CMF V Series instruction manual

EXFO

EXFO FTB-2 Notice

Keysight

Keysight M8290A Getting started guide

ADTEK

ADTEK MW-5 operating manual