Pfeiffer Vacuum MPT 200 User manual

OPERATING INSTRUCTIONS

Translation of the Original

MPT 200

Digital Pirani/cold cathode gauge

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new gauge is designed to support

you in your individual application with maximum performance and without malfunctions. The

name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and

complete range of top-quality products and first-class service. From this extensive, practical

experience we have gained a large volume of information that can contribute to efficient

deployment and to your personal safety.

In the knowledge that our product must avoid consuming work output, we trust that our

product can offer you a solution that supports you in the effective and trouble-free

implementation of your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/54

Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Variants 7

1.2 Target group 7

1.3 Conventions 8

1.3.1 Instructions in the text 8

1.3.2 Pictographs 8

1.3.3 Stickers on product 8

1.3.4 Abbreviations 9

1.4 Trademark proof 9

2 Safety 10

2.1 General safety information 10

2.2 Safety instructions 10

2.3 Safety precautions 13

2.4 Limits of use of the product 13

2.5 Proper use 14

2.6 Foreseeable improper use 14

3 Product description 15

3.1 Function 15

3.1.1 Gauge mode of operation 15

3.1.2 Measuring range 15

3.1.3 Measurement systems 15

3.1.4 Cold cathode measuring system 16

3.1.5 Pirani measurement system 16

3.2 Identifying the product 16

3.3 Scope of delivery 16

4 Transport and storage 17

4.1 Transporting the product 17

4.2 Storing the product 17

5 Installation 18

5.1 Establishing vacuum connection 18

5.2 Creating "RS-485" connection 19

6 Interfaces 21

6.1 Interface RS-485 21

6.2 Pfeiffer Vacuum protocol for RS-485 interface 21

6.2.1 Telegram frame 21

6.2.2 Telegram description 22

6.2.3 Telegram example 1 22

6.2.4 Telegram example 2 22

6.2.5 Data types 23

7 Parameter set 24

7.1 General 24

7.2 Overview of parameters of MPT gauge 24

7.3 Control commands 25

7.4 Status requests 25

7.5 Pressure values and correction factors 25

8 Operation 26

8.1 Selecting switching ranges 27

8.2 Determining effective pressure with correction factors 27

Table of contents

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8.3 Switching cold cathode sensor on/off 29

8.4 Reading and setting relay and switch-points 30

8.5 Baking out gauge 30

9 Dismantling 32

10 Maintenance 34

10.1 Cleaning of components 34

10.2 Calibrating gauge 35

10.3 Replacing measurement system 36

11 Malfunctions 38

12 Shipping 39

13 Recycling and disposal 40

13.1 General disposal information 40

13.2 Dispose of gauges 40

14 Service solutions by Pfeiffer Vacuum 41

15 Spare parts 43

16 Accessories 44

16.1 Accessory information 44

16.2 Ordering accessories 44

17 Technical data and dimensions 46

17.1 General 46

17.2 Technical data 46

17.3 Dimensions 48

UL/CSA certification 50

EC Declaration of Conformity 51

UK Declaration of Conformity 52

Table of contents

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List of tables

Tbl. 1: Applicable documents 7

Tbl. 2: Variants 7

Tbl. 3: Abbreviations used 9

Tbl. 4: Permissible ambient conditions 14

Tbl. 5: Features of the RS-485 interface 21

Tbl. 6: Explanation and meaning of the parameters 24

Tbl. 7: Overview of parameters of MPT gauge 24

Tbl. 8: Parameter set | Control commands 25

Tbl. 9: Parameter set | Status requests 25

Tbl. 10: Parameter set | Pressure values and correction factors 25

Tbl. 11: Operating mode display via "device status" LED 26

Tbl. 12: Correction factor for Pirani-only operation 28

Tbl. 13: Correction factors for cold cathode 29

Tbl. 14: Switch-on/-off condition 29

Tbl. 15: Malfunctions 38

Tbl. 16: Spare parts 43

Tbl. 17: Accessories 45

Tbl. 18: Conversion table: Pressure units 46

Tbl. 19: Conversion table: Units for gas throughput 46

Tbl. 20: Measured and pressure values 46

Tbl. 21: Electrical data 46

Tbl. 22: RS-485 interface 47

Tbl. 23: Connection flanges and weight 47

Tbl. 24: Ambient conditions 47

Tbl. 25: Temperatures 47

Tbl. 26: Substances in contact with media 47

List of tables

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List of figures

Fig. 1: Structure of the MPT gauge 15

Fig. 2: Measuring configuration 15

Fig. 3: Establishing vacuum connection 19

Fig. 4: Cross-link via connection RS-485 using connection cables and accessories 20

Fig. 5: Cross-link via RS-485 connection using OmniControl 20

Fig. 6: Connection assignment of RS-485 connecting socket 21

Fig. 7: Examples of reading current pressure values via [P:740] 26

Fig. 8: Selecting switching ranges 27

Fig. 9: Measurement curve for Pirani-only operation and when using the correction

factors

Fig. 10: Components of the gauge 30

Fig. 11: Replacing measurement system 36

Fig. 12: MPT 200 with DN 25 ISO-KF 48

Fig. 13: MPT 200 with DN 40 ISO-KF 48

Fig. 14: MPT 200 with DN 40 CF-F 49

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This document describes the function of the products listed in the following and provides the most im-

portant information for safe use. The description is written in accordance with the valid directives. The

information in this document refers to the current development status of the products. The document

retains its validity assuming that the customer does not make any changes to the product.

1.1.1 Applicable documents

Designation Document

Operating instructions for “Control unit” OmniControl PT 0670

Declaration of conformity A component of these instructions

Tbl. 1: Applicable documents

You can find this document in the Pfeiffer Vacuum Download Center.

1.1.2 Variants

This document applies to products with the following article numbers:

Article number Designation

PT R40 140 MPT 200, DN 25 ISO-KF

PT R40 150 MPT 200, DN 40 ISO-KF

PT R40 350 MPT 200, DN 40 CF-F

Tbl. 2: Variants

The part number is found on the rating plate of the product.

Pfeiffer Vacuum reserves the right to make technical changes without prior notification.

Information that relates to only one of the products is indicated accordingly.

The figures in this document are not to scale.

Graphics without a caption reflect the product featuring a DN 25 ISO-KF vacuum connection, however,

they also apply for the other vacuum connection accordingly.

Dimensions are in mm unless stated otherwise.

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

About this manual

7/54

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

The pictographs used in the document indicate useful information.

Note

Tip

Wear laboratory gloves

Perform a visual inspection

1.3.3 Stickers on product

This section describes all the stickers on the product along with their meanings.

D-35614 Asslar

Mod.

P/N

S/N

Input

MPT 200

PT R40 xxx

12345678

24 V DC 3 W

Made in Germany 2023/01

Range 5.0x10 - 1x10 hPa

-9 3

Rating plate

The rating plate is located on the back

of the device.

About this manual

8/54

1.3.4 Abbreviations

Abbreviation Explanation

ATM Atmosphere

C Correction factor for calculating the pressure of gases other than air

Sensitivity of the Bayard-Alpert measurement system for nitrogen

EC Electron collector

F Filament

HV High vacuum

IC Ion collector

CC Cold cathode

LED Light emitting diode

LPS Limited power source

MSL Mean sea level

p Pressure

P Pirani

PELV Protective extra low voltage

U Measuring signal [V] (output voltage)

Tbl. 3: Abbreviations used

1.4 Trademark proof

●Binder® is a trademark of Franz Binder GmbH + Co. Elektrische Bauelemente KG.

About this manual

9/54

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Safety instructions

Safety instructions according to product life stages

All safety instructions in this document are based on the results of a risk assessment.

Pfeiffer Vacuum has taken into account all the relevant life stages of the product.

Risks during installation

DANGER

Risk to life due to electric shock

An improperly earthed product is potentially fatal in the event of a fault.

►Connect the product galvanically with the earthed vacuum chamber.

►Ensure that the connection complies with the requirements of a protective bonding according to

EN 61010. (CF and VCR connections comply with this requirement.)

►Use electrically conductive centering rings and circlips for KF connections.

Safety

10/54

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