Pfeiffer Vacuum TPR 265 User manual

Operating manual

BG 805 174 BE (9910) 1

Compact Pirani Gauge

TPR 265

2BG 805 174 BE (9910) TPR265.bet

In all communications with Pfeiffer Vacuum, please specify the information given

on the product nameplate. Copy that information into the nameplate replica.

Typ:

No:

F-No:

14...30V ; 1.5W

This document applies to products with ordering number

PT R26 750 (DN 16 ISO-KF short)

PT R26 751 (DN 16 CF-R short)

PT R26 752 (

" NPT short)

PT R26 760 (DN 16 ISO-KF long)

PT R26 761 (DN 16 CF-R long)

The ordering number can be taken from the nameplate.

We reserve the right to make technical changes without prior notice.

The Compact Pirani Gauge TPR 265 has been designed for vacuum

measurement of gases in the pressure range of 5×10-4 ... 1000 mbar.

The gauge can be operated in connection with a Pfeiffer Vacuum controller for

compact gauges or with another evaluation unit.

Over the whole measurement range, the measuring signal is output as a logarithm

of the pressure.

Product identification

Validity

Intended use

Functional principle

BG 805 174 BE (9910) TPR265.bet 3

Contents

Product identification 2

Validity 2

Intended use 2

Functional principle 2

1 Safety 4

1.1 Symbols used 4

1.2 Personnel qualifications 4

1.3 General safety instructions 4

1.4 Liability and warranty 4

2 Technical data 5

3 Installation 7

3.1 Vacuum connection 7

3.2 Electrical connection 8

3.2.1 Use with Pfeiffer Vacuum controller for compact gauges 8

3.2.2 Use with other supply and evaluation units 8

4 Operation 10

5 Maintenance 11

5.1 Adjusting the gauge 11

5.2 Cleaning the sensor 12

5.3 What to do in case of problems 13

6 Removal 14

7 Accessories 15

8 Returning the product 15

9 Disposal 16

Appendix 17

A: Relationship between measuring signal and pressure 17

B: Gas type dependency 18

Declaration of contamination 19

For cross-references within this document, the symbol (→2XY) is used, for cross-

references to other documents, the symbol (→&[Z]).

4BG 805 174 BE (9910) TPR265.bet

1 Safety

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Note

Information on correct handling or use. Disregard can lead to malfunctions or

minor equipment damage.

Skilled personnel

All work described in this document may only be carried out by persons who

have suitable technical training and the necessary experience or who have been

instructed by the end-user of the product.

• Adhere to the applicable regulations and take the necessary precautions for

the process media used.

Consider possible reactions between the materials (→26) and the process

media.

Consider possible reactions of the process media due to heat generated by the

product.

• All work may only be carried out in adherence to the applicable regulations and

with the necessary precautions. Consider the safety remarks within this

document.

• Before you begin to work, find out whether any vacuum components are

contaminated. Adhere to the relevant regulations and take the necessary

precautions when handling contaminated parts.

Communicate the safety instructions to other users.

Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the

end-user or third parties

• disregard the information in this document

• use the product in a non-conforming manner

• make any kind of changes (modifications, alterations etc.) to the product

• use the product with accessories not listed in the corresponding product

documentation.

The end-user assumes the responsibility in conjunction with the process media

used.

1.1 Symbols used

1.2 Personnel qualifications

1.3 General safety

instructions

1.4 Liability and warranty

BG 805 174 BE (9910) TPR265.bet 5

2 Technical data

Measurement principle thermal conductance Pirani

Measurement range (Air, N2, O2, CO) 5×10-4 ... 1000 mbar

Accuracy ≈10 % of reading

in the range of 1×10-3 ... 100 mbar

(outside of this range up to factor 2)

Repeatability ≈2 % of reading

in the range of 1×10-3 ... 100 mbar

Gas type dependency →Appendix B

Voltage range ≈0 V ... ≈+10.3 V

Measurement range 2.2 V ... 8.5 V

Relationship voltage-pressure logarithmic, increase 1.0 V / decade

(→Appendix A)

Error signal < 0.5 V (filament rupture)

Output impedance 2×10 Ω

Minimum load 10 kΩ, short circuit-proof

Rise time ≈10 ms

Gauge identification 3.0 kΩresistance referenced to supply

common

Trimming potentiometer <HV>

Trimming potentiometer <ATM> adjustment at 5×10-4 mbar

adjustment at atmospheric pressure

DANGER

The gauge may only be connected to supply and evaluation units that

conform to the requirements of a grounded protective extra-low

voltage (SELV-E according to EN 61010). The connection to the

gauge has to be fused. 1)

Voltage at gauge 14.0 ... 30.0 V= (max. ripple 1 Vpp)

Power consumption ≤1.5 W

Fuse 1) ≤1 AT

Electrical connection Hirschmann compact connector type

GO 6, 6 poles, male

Cable 5 poles plus screening

Cable length max. 150 m (0.25 mm2conductor)

200 m (0.34 mm2conductor)

Grounding concept →Figure 1

Vacuum flange – measuring

common connected by 10 kΩ

(max. voltage differential ±50 V)

Supply common – signal common conducted separately; for great cable

lengths (≥10 m) differential measuring

is recommended

1) Pfeiffer Vacuum controllers for compact gauges fulfill this requirement.

Measuring

Output signal

Adjustment

Supply

6BG 805 174 BE (9910) TPR265.bet

Materials on the vacuum side

Flange

Filament

Feedthrough

Baffle (only version DN 16 ISO-KF)

Other materials

stainless steel

tungsten

glass

stainless steel

Ni, copper, NiFe

Internal volume

short version

long version ≈2 cm³

≈10 cm³

Pressure max. ≤10 bar (absolute)

limited to inert gases

Admissible temperatures

Storage

Operation

Flange temperature short version

long version

–20°C ... +65°C

+ 5°C ... +60°C

up to 80 °C

up to 250 °C

Relative humidity max. 80% at temperatures up to +31 °C

decreasing to 50 % at +40 °C

Application only for indoor use

altitudes up to 2000 m NN

Type of protection IP 40

Measurements [mm]

" NPT

65.341.4

ATMHV

65.3121.6

121.65

DN 16 ISO-KFDN 16 CF-R

ATMHV

65.322.65 20

22.5

19.4

DN 16 ISO-KFDN 16 CF-R

Weight ≈100 g (DN 16 ISO-KF short)

≈120 g (DN 16 CF-R short)

≈120 g ('" NPT short)

≈140 g (DN 16 ISO-KF long)

≈160 g (DN 16 CF-R long)

Vacuum

Environment

Measurements, weight

BG 805 174 BE (9910) TPR265.bet 7

3 Installation

Note

Caution: vacuum component

Dirt and damages impair the function of the vacuum component.

When handling vacuum components, take appropriate measures to

ensure cleanliness and prevent damages.

The gauge may be mounted in any orientation. A horizontal to upright orientation

is to be preferred, to keep condensates and particles from getting into the meas -

uring chamber.

èRemove the protective cap.

The protective cap will be

needed for maintenance.

Make the flange connection.

Clamping ring Seal

If adjustment must be possible after the gauge has been installed, be sure

to install it so that trimmer potentiometers <HV> and <ATM> can be

accessed with a screwdriver.

The space necessary can be gathered from the diagram (→26).

DANGER

Caution: overpressure in the vacuum system > 4 bar

KF flange connections with elastomer seals (e.g. O-rings) cannot

withstand such pressures. Process media can thus leak and possibly

damage your health.

Use O-rings provided with an outer centering ring.

DANGER

Caution: overpressure in the vacuum system > 1 bar

If clamps are opened incorrectly or inadvertently, injury can be caused

by catapulted parts and your health can get damaged by leaking pro-

cess gases.

Do not open any clamps while the vacuum system is pressurized. Use

the type of clamps which cannot be opened inadvertently (e.g. hose

clip clamping rings).

3.1 Vacuum connection

Procedure

8BG 805 174 BE (9910) TPR265.bet

DANGER

The gauge must be electrically connected to the grounded vacuum

chamber. This connection must conform to the requirements of a

protective connection according to EN 61010:

• CF and NPT flanges fulfill this requirement

• For gauges with a KF flange, use a conductive metallic clamping

ring.

If the gauge is used with a

Pfeiffer Vacuum controller for

compact gauges, a corre-

sponding sensor cable is

required (→215).

• Plug the cable in at the

gauge and at the controller.

Secure the plug at the gauge

with the screw.

The gauge can also be operated with other supply and evaluation units. In this

case a sensor cable must be made by the user.

For cable lengths up to 10 m (with 0.25 mm2 conductor cross section), the

measuring signal can be read directly between positive signal (pin 2) and supply

common (pin 5). For longer sensor cable lengths, we recommend a differential

measurement between signal and signal common (Pin 3) (as a result of the

voltage drop along the supply cable grounding lead, the common mode signal is

approx. 0.5 V at the max. permissible cable length).

èPrepare the cable box

(ordering number

→215).

3.2 Electrical connection

3.2.1 Use with Pfeiffer Vacuum

controller for compact

gauges

3.2.2 Use with other supply

and evaluation units

Procedure

BG 805 174 BE (9910) TPR265.bet 9

Solder the sensor cable according to the diagram.

10k

V–

–

Figure 1:Electrical connection

Pin 1 identification

Pin 2 signal output

(measuring signal)

Pin 3 signal common

Pin 4 supply (14 ... 30 V=)

Pin 5 supply common

Pin 6 screening

Cable box solder side

WARNING

Supply common (pin 5) and screen (pin 6) must always be

grounded to the supply unit.

Incorrect connection, incorrect polarity or inadmissible supply

voltages can damage the gauge.

Assemble the cable box.

Equip the other end of the sensor cable with the appropriate connection for

the supply and evaluation unit.

Connect the cable box to the gauge

and secure it with the screw. Connect

the other end of the cable to the

supply and evaluation unit.

10 BG 805 174 BE (9910) TPR265.bet

4 Operation

This gauge uses the thermal conductivity of gases for vacuum measurements

(Pirani).

Two thin tungsten wires are heated up to two different, constant temperatures (ca.

65 °C and 120 °C). The difference between the required thermal inputs for this is a

measure for the pressure (independent of the ambient temperature). After

logarithmization the output signal is generated from this value (→Appendix A).

When voltage is being supplied to the gauge, the measuring signal is available

between pins 2 and 3 (relationship between measuring signal and pressure

→Appendix A).

Allow for a stabilization time of approx. 2 minutes. It is advisable to operate the

gauge continuously.

The gauge is factory-calibrated. Adjustment may become necessary because of

the use in different climatic conditions, extreme temperatures, contamination or

ageing (→211).

Measurement accuracy is reduced in the pressure range above 100 mbar and

below 1×10-3 mbar.

The measuring signal depends on the type of gas being measured. The

relationship between measuring signal and pressure is accurate for N 2, O2, dry air

and CO (→Appendix A). They can be mathematically converted for other gases

(→Appendix B).

Is the gauge being operated with a Pfeiffer Vacuum controller for compact gauges,

a calibration factor can be applied for correction of the reading

(→&of the appropriate controller).

Measurement principle

Stabilizing time

Accuracy

Gas type dependency

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