NF ZM2371 User manual

NF Corporation

LCR METER

ZM2371 / ZM2372

Instruction Manual

LCR METER

ZM2371 / ZM2372

Instruction Manual

DA00026021-007

Registered Trademarks

National Instruments and LabVIEW are registered trademarks of National Instruments

Corporation in the United States.

Other company names and product names used in this Instruction Manual may be

trademarks or registered trademarks of respective companies.

i ZM2371/ZM2372

Preface

Thank you very much for purchasing our “ZM2371/ZM2372 LCR METER”.

To ensure safe and proper use of this electric equipment, please read first

“Safety Precautions” on the following pages.

Caution Symbols Used in This Manual

The following caution symbols are used in this manual. Be sure to observe these caution

symbols and their contents to ensure the safety of the user and avoid damage to the equipment.

！

WARNING

Equipment handling could result in death or serious injury. This symbol contains

information to avoid such risk.

！

CAUTION

Equipment handling could result in minor or moderate injury or property damage.

This symbol contains information to avoid such risk.

The scope of this Manual

This manual describes the ZM2371/ZM2372 with the firmware version 1.30 or more and CE

Marking.

The early products without CE Marking do not meet the CE Marking (EMC and others). Please

make sure the CE marking on the rear panel.

The ZM2371/ZM2372 with the version 1.00, 1.10, or 1.20 has no function fixing the output

impedance to 100 , and the minimum output impedance setting is either 5 or 25 .

Please watch the version that appears at the power-on.

Preface

ii ZM2371/ZM2372

This manual has the following chapter organization.

If using this equipment for the first time, start form Chapter 1.

1. OUTLINE

This chapter describes the overview, specificities, applications, functions and simple

principle of operations of this product.

2. PREPARATIONS BEFORE USE

This chapter describes important preparation before installation and operation.

3. PANEL FEATURES AND BASIC OPERATIONS

This chapter describes the functions and simple operations available for each panel screen

part.

Read while operation the device.

4. ADVANCED OPERATIONS

This chapter describes even further the device operation.

5. REMOTE CONTROL

This chapter describes remote control through USB, RS-232 and GPIB.

6. CHANGE OF OPERATION MODE

This chapter describes how to use remote control commands and operation panel different

from a standard method.

7. TROUBLESHOOTING

This chapter describes how to deal with error messages and troubles.

8. MAINTENANCE

This chapter describes storage, repacking transportation as well as performance testing.

9. SPECIFICATIONS

This chapter describes the product’s specifications (functions and performance).

Safety Precautions

iii ZM2371/ZM2372

──── Safety Precautions ────

To ensure safe use, be sure to observe the following warnings and cautions.

NF Corporation shall not be held liable for damages that arise from a failure to observe these

warnings and cautions.

This product is a Class I product (with protective conductor terminal) that conforms to the JIS

and IEC insulation standards.

Be sure to observe the contents of instruction manual.

This instruction manual contains information for the safe operation and use of this product.

Be sure to read this information first before using this product.

All the warnings in the instruction manual must be heeded to prevent hazards that may

cause major accidents.

Be sure to ground the product.

This product uses a line filter, which may cause electric shock if the product is not

grounded.

To prevent electric shock accidents, connect it to an earth ground so that ground resistance

is 100Ω or less.

Check the power supply voltage

This product operates on the power supply voltage indicated in “Grounding and Power

Supply Connection” in this instruction manual.

Prior to connecting the power supply, check that the voltage of the power supply matches

the rated power supply of the product.

In case of suspected anomaly

If this product emits smoke, an abnormal smell, or abnormal noise, immediately power it

off and stop using it.

If such an abnormal occurs, prevent anyone from using this product until it has been

repaired, and immediately report the problem to NF Corporation or one of our

representatives.

Do not use this product when flammable gas is present.

An explosion or other such hazard may result.

Do not remove the cover.

This product contains high-voltage parts. Absolutely never remove its cover.

Even when the inside of this product needs to be inspected, do not touch the inside. All such

inspections are to be performed by service technicians designated by NF Corporation.

Safety Precautions

iv ZM2371/ZM2372

Do not modify this product.

Absolutely never modify this product, as this may cause new hazards and may disqualify

this product from repair in case of failure.

Do not expose this product to water.

When this product is used in wet condition, it may cause an electric shock and a fire. If

this product is exposed to water, unplug the power cord immediately, and contact NF

Corporation or one of our representatives.

If lightning occurs, power off this product and unplug the power cord.

A lightning may cause an electric shock, a fire and a failure.

Safety-related symbols

The general definitions of the safety-related symbols used on this product and in the

instruction manual are provided below.

！

Instruction Manual Reference Symbol

This symbol is displayed to alert the user to potential danger and refer

him/her to the instruction manual.

Warning Symbol

This symbol indicates information for the avoidance of a hazard such as

electric shock that may endanger human life or cause serious injury

during handling of the equipment.

Caution Symbol

This symbol indicates information for minor or moderate injury, or

property damage to the equipment during handling.

Other Symbols

This symbol indicates the “on”position of the power swich.

This symbol indicates the “off”position of the power switch.

Shows when connected to the chassis.

──── Electromagnetic Compatibility ────

This product may cause interference if used in residential areas. Such use must be avoided

unless the user takes special measures to reduce electromagnetic emissions to prevent

interference to the reception of radio and television broadcasts.

──── Note on Waste Processing ────

To protect the environment, ensure that this device is disposed of by an appropriate industrial

waste processor. This product does not use batteries or a backlight that contains mercury.

！

CAUTION

！

WARNING

v ZM2371/ZM2372

Contents

Page

1. OUTLINE··························································································1-1

1.1 Features·····································································································1-2

1.2 Applications·································································································1-2

1.3 List of Functions···························································································1-3

1.4 Principle of Operation····················································································1-4

2. PREPARATIONS BEFORE USE····························································2-1

2.1 Checking Before Use ····················································································2-2

2.2 Installation···································································································2-4

2.2.1 General Precautions for Installation·····························································2-4

2.2.2 Installation Conditions ·············································································· 2-4

2.2.3 Rack Mounting························································································2-5

2.3 Grounding and Power Supply Connection ·······················································2-10

2.4 Simplified Operation Check ·········································································· 2-11

2.5 Calibration·································································································2-12

3. PANEL FEATURES AND BASIC OPERATIONS········································3-1

3.1 Panel Component Names and Functions···························································3-2

3.2 Display at Power “ON” and Initial Settings ·························································3-4

3.2.1 Check before Power “ON” ·········································································3-4

3.2.2 Displays and Indications at Power “ON”························································ 3-5

3.2.3 Initialization····························································································3-6

3.3 Operation Tree···························································································3-10

3.4 Connection of DUT ·····················································································3-13

3.4.1 Measurement Terminals·········································································· 3-13

3.4.2 Connection to DUT················································································ 3-14

3.4.3 Precautions on Connection······································································ 3-15

3.5 Basic Operations························································································3-17

3.5.1 Outline of Measurement Screen ······························································· 3-17

3.5.2 Basic Key Operations············································································· 3-18

3.5.3 Simplified Operating Method When You Use Instrument for the First Time ········· 3-21

3.5.4 Initialization·························································································· 3-25

3.5.5 Setting of Measurement Parameters·························································· 3-26

3.5.5.1 Selection of Primary Parameters ································································ 3-26

3.5.5.2 Setting of Equivalent Circuit······································································· 3-28

3.5.5.3 Setting of Secondary Parameters ······························································· 3-29

3.5.6 Setting of Basic Measurement Conditions··················································· 3-31

3.5.6.1 Measurement Frequency·········································································· 3-31

3.5.6.2 Measurement Signal Level········································································ 3-32

3.5.6.3 Measurement Range ··············································································· 3-35

3.5.6.4 Trigger·································································································· 3-38

3.5.6.5 Measurement Speed················································································ 3-42

3.5.6.6 Correction of Measurement Error································································ 3-44

3.5.6.7 OPEN Correction ···················································································· 3-45

3.5.6.8 SHORT Correction ·················································································· 3-50

3.5.6.9 LOAD Correction····················································································· 3-53

3.5.6.10 Cable Length Correction··········································································· 3-57

Contents

vi ZM2371/ZM2372

4. ADVANCED OPERATIONS··································································4-1

4.1 Restricting the Variation of Measured Values (Averaging) ·····································4-2

4.2 Displaying the Deviation from the Reference Value··············································4-3

4.3 Sorting the Part (Comparator) ·········································································4-6

4.4 Connecting to the Part Handler (Handler Interface)············································4-15

4.5 Changing the Contents Displayed on the Second line of Measurement Screen

(Auxiliary Display)······················································································· 4-22

4.6 Saving/Recalling the Setting and Correction Value into the Memory······················4-24

4.7 Setting the Contact Check············································································4-26

4.8 Using the DC Bias ······················································································4-30

4.9 Disabling the Key-Operation of Panel ·····························································4-35

4.10 Initializing of All Settings ·············································································4-36

4.11 Self-Diagnosis··························································································4-39

4.12 Checking the Version·················································································4-40

5. REMOTE CONTROL ··········································································5-1

5.1 Preparations Before Use················································································5-2

5.1.1 Remote Control Interface Selection ····························································· 5-2

5.1.2 Outline of USB························································································5-3

5.1.2.1 Preparation of Controller·············································································5-3

5.1.2.2 Preparation of ZM2371 / ZM2372 ·································································5-4

5.1.2.3 USB Device Identification············································································5-4

5.1.3 Outline of RS-232····················································································5-5

5.1.3.1 Preparation of Controller·············································································5-5

5.1.3.2 Preparation of ZM2371 / ZM2372 ·································································5-5

5.1.3.3 Connection ······························································································5-8

5.1.3.4 Difference between RS-232 and USB/GPIB, and Precautions ····························5-9

5.1.4 Outline of GPIB····················································································· 5-10

5.1.4.1 Preparation of Controller··········································································· 5-10

5.1.4.2 Preparation of ZM2372············································································· 5-10

5.1.4.3 Precautions on Use of GPIB······································································ 5-10

5.1.4.4 Basic Specifications of GPIB ····································································· 5-11

5.1.5 Precautions on Communication ································································ 5-12

5.2 Switching between Remote State and Local State·············································5-13

5.3 Response to Interface Message ····································································5-14

5.4 Command List ···························································································5-15

5.5 Command Tree ··························································································5-19

5.6 Command Explanation ················································································5-21

5.6.1 Summary of Terms················································································· 5-21

5.6.1.1 Subsystem Commands ············································································ 5-21

5.6.1.2 Path Separator ······················································································· 5-21

5.6.1.3 Keywords Simplification············································································ 5-22

5.6.1.4 Implicit Keywords···················································································· 5-22

5.6.2 Overlap Commands and Sequential Commands ·········································· 5-22

5.6.3 Command Detailed Explanations ······························································ 5-23

5.6.3.1 Common Commands··············································································· 5-24

5.6.3.2 Subsystem Commands ············································································ 5-28

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