MJ400259A1
1
Table of Contents
Page
1．Foreword・・・・・・・・・・・・・・・・・・・・・・・・・・・ 2
2．Switching to “control by digital communications”・・・・・・・・・・・2
3．Basic Specifications・・・・・・・・・・・・・・・・・・・・・・・ 4
4．Message Structure・・・・・・・・・・・・・・・・・・・・・・・ 5
5．Details of Commands・・・・・・・・・・・・・・・・・・・・・・ 7
1) RCFS：Acquisition of the full scale flow rate [significand]・・・・・・・
7
2) RDPP：Acquisition of the flow rate decimal point position
[number of decimal places]・・・・・・・・・
7
3) RFRU：Acquisition of the flow rate unit・・・・・・・・・・・・・・・
7
4) RFRC：Acquisition of the flow rate reference temperature condition・・
8
5) WFRC：Setting of the flow rate reference temperature condition・・・・
8
6) RCFR：Acquisition of the instantaneous flow rate [significand]・・・・・
8
7) RPGT：Acquisition of the calibration gas type・・・・・・・・・・・・
8
8) RCGT：Acquisition of the gas type・・・・・・・・・・・・・・・・・
9
9) RCFM：Acquisition of the CF value in the user custom CF mode・・・・
9
10) WCFM：Setting of the CF value in the user custom CF mode・・・・・
9
11) RLFD ：Acquisition of the display cut setting (0 shown if within ±1%F.S.)・
10
12) WLFD：Setting of the display cut setting (0 shown if within ±1%F.S.) ・・
10
13) RALM：Acquisition of the alarm occurrence status・・・・・・・・・・
10
14) ZERO：Execution of sensor zero adjustment・・・・・・・・・・・・
10
- - - - - -The following are commands used by the mass flow controller only - - - - - - -
15) RCVS：Acquisition of the valve status・・・・・・・・・・・・・・・
11
16) RCVO：Acquisition of the valve opening・・・・・・・・・・・・・・
11
17) RSFR：Acquisition of the set flow rate [significand]・・・・・・・・・・
11
18) RRDP：Acquisition of the motion differential pressure・・・・・・・・
11
19) WRDP：Setting of the motion differential pressure
・・・・
・・・・・・
12
20) RFSM：Acquisition of the flow rate setting method・・・・・・・・・・
12
21) WFSM：Setting of the flow rate setting method・・・・・・・・・・・・
12
22) RVSS：Acquisition of the valve status (digital)・・・・・・・・・・・・
12
23) WVSS：Setting of the valve status (digital)・・・・・・・・・・・・・・
12
24) RSFD：Acquisition of the set flow rate [significand] (digital) ・・・・・・
13
25) WSFD：Setting of the set flow rate [significand] (digital)・・・・・・・・
13
26) RALA：Acquisition of the response to alarm occurrence・・・・・・・・
13
27) WALA：Setting of the response to alarm occurrence ・・・・・・・・・
13
28) RAZS：Acquisition of the auto zero ・・・・・・・・・・・・・・・・
14
29) WAZS：Setting of the auto zero・・・・・・・・・・・・・・・・・・
14
6．Flow Rate Expression・・・・・・・・・・・・・・・・・・・・・・15
