Inficon Cube CDGsci User manual
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Capacitance Diaphragm Gauge
Cube CDGsci
Operating Manual
Incl. EC Declaration of Conformity
2tina88e1 (2014-01)
Product Identification
In all communications with INFICON, please specify the infor-
mation given on the product nameplate. For convenient refer-
ence copy that information into the space provided below.
Model:
SN:
PN:
MAC:
V W;LPS
Validity
This document applies to products of the CDGsci series.
Flange 1
3
E
DN 16 ISO-KF
DN 16 CF-R
8VCR female
3
6
9
C
F
0.1
1
10
100
1000
Measurement range
(F.S.)
3CS1-
3
1
1
-2300
The part number (PN) can be taken from the product nameplate.
tina88e1 (2014-01) 3
If not indicated otherwise in the legends, the illustrations in this
document correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to the other gauges by analogy.
We reserve the right to make technical changes without prior
notice.
Intended Use
The temperature compensated Capacitance Diaphragm Gauges
of the CDGsci series are intended for absolute pressure mea-
surement of gases in their respective pressure ranges.
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear out-
put signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45°C which results in a
compensation of changes in the ambient conditions and a re-
duced deposition of process products and by-products in pro-
cess applications. An integrated baffle protects the sensor
against coating.
Trademarks
SKY®INFICON GmbH
VCR®Swagelok Marketing Co.
Cube™ INFICON GmbH
Windows CE Microsoft
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
4tina88e1 (2014-01)
Scope of Delivery
1× gauge CDGsci
1× pin for adjusting settings via buttons
1× Calibration Test Report
1× Operating Manual English
1× Damping unit
2× LEMO connector
1× WLAN USB adapter IEEE822.11g
1× Swagelok 8VCR adapter (gauge with VCR connection only)
1× Swagelok 8VCR seal (gauge with VCR connection only)
1× Swagelok 4VCR seal (gauge with VCR connection only)
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Contents
Product Identification 2
Validity 2
Intended Use 3
Functional Principle 3
Trademarks 3
Patents 3
Scope of Delivery 4
1Safety 7
1.1 Symbols Used 7
1.2 Personnel Qualifications 7
1.3 General Safety Instructions 8
1.4 Liability and Warranty 8
2Technical Data 9
3Installation 17
3.1 Vacuum Connection 17
3.2 Power Connection 24
3.2.1 D-Sub, 15-pin Connector 25
3.2.2 RJ45, 8-pin Connector 26
3.2.3 LEMO, 2-pin Connector 26
3.2.4 USB, Typ A Connector 26
4Operation 27
4.1 Status Indication 27
4.2 Configuring the network interface 28
4.2.1 Changing IP Address of the Wired Network 28
4.2.2 Activating the Wireless Network 28
4.2.3 Changing IP Address of the Wireless Network 29
4.3 Websites 31
4.4 Zeroing the Gauge 32
4.4.1 <ZERO>Adjustment 32
4.5 Switching Functions 36
4.6 Activating the Factory Setting (Factory Reset) 39
4.7 Diagnostic Port (RS232C Interface) 39
6tina88e1 (2014-01)
5Deinstallation 39
6Maintenance, Repair 42
7Returning the Product 42
8Disposal 43
9Accessories 44
Further Information 44
EC Declaration of Conformity 46
For cross-references within this document, the symbol (→XY)
is used, for cross-references to further documents, listed under
"Further Information", the symbol (→[Z]).
tina88e1 (2014-01) 7
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.
8tina88e1 (2014-01)
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
INFICON assumes no liability and the warranty becomes null
and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear are not
covered by the warranty.
tina88e1 (2014-01) 9
2 Technical Data
Measurement range →"Validity"
Accuracy 1)
0.1 F.S.
1 … 1000 F.S.
0.05% of reading
0.025% of reading
Temperature effect on zero
0.1 F.S.
1 … 1000 F.S.
10 ppm F.S./ °C
5 ppm F.S./ °C
Temperature effect on span
0.1 F.S.
1 … 1000 F.S.
10 ppm of reading / °C
5 ppm of reading / °C
Resolution, nominal 0.95 ppm F.S.
Gas type dependence none
Output signal analog (measurement signal)
Measurement range 0 … +10 V
Voltage range –2 … +10.24 V
(limited to +10.20 V)
Relationship voltage-pressure linear
Output impedance 0 Ω(short-circuit proof)
Loaded impedance >10 kΩ
Response time2) 350 ms
Pressure unit Torr (default), mbar, Pa
(→16)
1) Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C
ambient operating temperature without temperature effects after
operation of 2 h.
2) Increase 10 … 90 % F.S.R.
10 tina88e1 (2014-01)
Output signal analog (temperature / atmosphere)
Scaling temperature 10 °C – 0.00 V
60 °C – 10.00 V
Temp[V] = 10+5×Aout[V]
Scaling atmosphere 10 °C – 0.00 V
60 °C – 10.00 V
ATM[Torr] =
Aout[V]/5×1000/1.33322
Switchable between temperature and atmosphere via
RS232 ASCII, REST services and website (→[2], [3], [4],
[5]).
Identification
Resistance RIdent
Voltage
13.2 kΩreferenced to
supply common
≤5 V
Remote Zero Adjust
External switching contact
digital input for zero adjust-
ment (→32)
30 V (dc) / <5 mA (dc)
Switching functions SETPOINT 1, 2
Setting range 0 … 99% F.S. (0 … 9.9 V)
Hysteresis 1% F.S.
Relay contact 30 V (dc)/ ≤0.5 A (dc)
floating (NO)
closed p ≤pSP (LED lit solid)
open p ≥pSP (LED off)
Switching time ≤50 ms
Status relay
Relay contact 30 V (dc)/ ≤0.5 A (dc)
connected to supply com-
mon (pin 5)
closed measurement mode
warning
open no supply voltage
warming up
error
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