BIRD 7027 Series User manual
©Copyright 2018 by Bird Technologies Inc.
Instruction Book Part Number 920-7027S Rev. A
Thruline® is a registered trademark
of Bird Electronic Corporation
Time Domain
Pulse Power Sensor
7027 Series
Operation Manual
Bird Pulse Power Sensor 7027
i
Safety Precautions
The following are general safety precautions that are not necessarily related to
any specific part or procedure, and do not necessarily appear elsewhere in this
publication. These precautions must be thoroughly understood and apply to all
phases of operation and maintenance.
WARNING
Keep Away From Live Circuits
Operating Personnel must at all times observe general safety precautions. Do
not replace components or make adjustments to the inside of the test
equipment with the high voltage supply turned on. To avoid casualties,
always remove power.
WARNING
Shock Hazard
Do not attempt to remove the RF transmission line while RF power is present.
WARNING
Do Not Service Or Adjust Alone
Under no circumstances should any person reach into an enclosure for the
purpose of service or adjustment of equipment except in the presence of
someone who is capable of rendering aid.
WARNING
Safety Earth Ground
An uniterruptible earth safety ground must be supplied from the main power
source to test instruments. Grounding one conductor of a two conductor
power cable is not sufficient protection. Serious injury or death can occur if
this grounding is not properly supplied.
WARNING
Resuscitation
Personnel working with or near high voltages should be familiar with modern
methods of resuscitation.
WARNING
Remove Power
Observe general safety precautions. Do not open the instrument with the
power on.
Safety Precautions
ii
Safety Symbols
WARNING
Warning notes call attention to a procedure, which if not correctly
performed, could result in personal injury.
CAUTION
Caution notes call attention to a procedure, which if not correctly performed,
could result in damage to the instrument.
The caution symbol appears on the equipment indicating there is
important information in the instruction manual regarding that
particular area
Note: Calls attention to supplemental information.
Warning Statements
The following safety warnings appear in the text where there is danger to
operating and maintenance personnel, and are repeated here for emphasis.
WARNING
Never attempt to connect or disconnect RF equipment from the transmission
line while RF power is being applied.
Leaking RF energy is a potential health hazard.
On page 5.
Bird Pulse Power Sensor 7027
iii
Safety Statements
USAGE
ANY USE OF THIS INSTRUMENT IN A MANNER NOT SPECIFIED BY
THE MANUFACTURER MAY IMPAIR THE INSTRUMENT’S SAFETY
PROTECTION.
USO
EL USO DE ESTE INSTRUMENTO DE MANERA NO ESPECIFICADA
POR EL FABRICANTE, PUEDE ANULAR LA PROTECCIÓN DE
SEGURIDAD DEL INSTRUMENTO.
BENUTZUNG
WIRD DAS GERÄT AUF ANDERE WEISE VERWENDET ALS VOM
HERSTELLER BESCHRIEBEN, KANN DIE GERÄTESICHERHEIT
BEEINTRÄCHTIGT WERDEN.
UTILISATION
TOUTE UTILISATION DE CET INSTRUMENT QUI N’EST PAS
EXPLICITEMENT PRÉVUE PAR LE FABRICANT PEUT
ENDOMMAGER LE DISPOSITIF DE PROTECTION DE
L’INSTRUMENT.
IMPIEGO
QUALORA QUESTO STRUMENTO VENISSE UTILIZZATO IN MODO
DIVERSO DA COME SPECIFICATO DAL PRODUTTORE LA
PROZIONE DI SICUREZZA POTREBBE VENIRNE COMPROMESSA.
Safety Precautions
iv
SERVICE
SERVICING INSTRUCTIONS ARE FOR USE BY SERVICE - TRAINED
PERSONNEL ONLY. TO AVOID DANGEROUS ELECTRIC SHOCK, DO
NOT PERFORM ANY SERVICING UNLESS QUALIFIED TO DO SO.
SERVICIO
LAS INSTRUCCIONES DE SERVICIO SON PARA USO EXCLUSIVO
DEL PERSONAL DE SERVICIO CAPACITADO. PARA EVITAR EL
PELIGRO DE DESCARGAS ELÉCTRICAS, NO REALICE NINGÚN
SERVICIO A MENOS QUE ESTÉ CAPACITADO PARA HACERIO.
WARTUNG
ANWEISUNGEN FÜR DIE WARTUNG DES GERÄTES GELTEN NUR
FÜR GESCHULTES FACHPERSONAL.
ZUR VERMEIDUNG GEFÄHRLICHE, ELEKTRISCHE SCHOCKS, SIND
WARTUNGSARBEITEN AUSSCHLIEßLICH VON QUALIFIZIERTEM
SERVICEPERSONAL DURCHZUFÜHREN.
ENTRENTIEN
L’EMPLOI DES INSTRUCTIONS D’ENTRETIEN DOIT ÊTRE RÉSERVÉ
AU PERSONNEL FORMÉ AUX OPÉRATIONS D’ENTRETIEN. POUR
PRÉVENIR UN CHOC ÉLECTRIQUE DANGEREUX, NE PAS
EFFECTUER D’ENTRETIEN SI L’ON N’A PAS ÉTÉ QUALIFIÉ POUR CE
FAIRE.
ASSISTENZA TECNICA
LE ISTRUZIONI RELATIVE ALL’ASSISTENZA SONO PREVISTE
ESCLUSIVAMENTE PER IL PERSONALE OPPORTUNAMENTE
ADDESTRATO. PER EVITARE PERICOLOSE SCOSSE ELETTRICHE
NON EFFETTUARRE ALCUNA RIPARAZIONE A MENO CHE
QUALIFICATI A FARLA.
Bird Pulse Power Sensor 7027
v
About This Manual
This manual covers the operating and maintenance instructions for the
following models:
7027 Series
Changes to this Manual
We have made every effort to ensure this manual is accurate. If you discover
any errors, or if you have suggestions for improving this manual, please send
your comments to our Solon, Ohio factory. This manual may be periodically
updated. When inquiring about updates to this manual refer to the part number
and revision on the title page.
Literature Contents
Chapter Layout
Introduction — Describes the features of the Bird 7027 Series Power Sensor.
Installation — Describes how to connect Bird 7027 Series Power Sensor to the
user’s system, and software requirements.
Operation — Describes the power measurement process.
Maintenance — Lists routine maintenance tasks as well as a specifications
and model features identification.
vi
Table of Contents
Safety Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . i
Safety Symbols . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ii
Warning Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . ii
Safety Statements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . iii
About This Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v
Changes to this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v
Literature Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v
Chapter Layout . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . v
Chapter 1 Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1
Sync Pulse . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Data Communication Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Status Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2
Chapter 2 USB Model Pulse Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Monitor/Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Interlock Switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Interlock wiring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Installing the 7027 USB Model Pulse Power Sensor . . . . . . . . . . . . . . . . . . . . 5
Install optional interlock bracket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6
Chapter 3 Ethernet Model Pulse Sensor . . . . . . . . . . . . . . . . . . . . . . . 7
Monitor/Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7
Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
IP Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Bird Pulse Power Sensor 7027
vii
Installing the 7027 Ethernet Model Pulse Power Sensor . . . . . . . . . . . . . . . . 9
Chapter 4 Theory of Operation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Measurement Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
Chapter 5 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Customer Service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Shipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Model Identification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 14
Limited Warranty . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
1
Chapter 1 Introduction
The Bird Precision Pulse Power Sensor for precision semiconductor applications.
General Description
The 7027 Series Power Sensors were designed to bring superb accuracy and
ease of use together for the engineer in the laboratory and semiconductor
fabrication environments. At the calibrated frequencies, these sensors are
capable of 1% accuracy measurements of the gated power within a pulsed
waveform.
Measurement
The 7027 is capable of measuring multi-level pulsed waveforms. It measures the
average power, gated power, rise and fall times of up to four levels (states)
within a pulse period. See
Figure 1
.
Figure 1 Multi-level Pulsed Waveform Measurement
See
Chapter 4 Theory of Operation on page 10
for a complete explanation of
the measurement process.
The input and output connectors of the Bird 7027 Series Power Sensor are Bird
Quick-Change type RF connectors, which allow the sensor to be reconfigured
with other Bird “QC” connectors. See
Figure 2 on page 3
.
Note: Recalibration is required following any connector changes
to guarantee rated accuracy.
Bird Pulse Power Sensor 7027
2
Sync Pulse
The pulsed waveform measurement uses an internal reference signal to
synchronize the measurement with start of the pulse period.
If desired, the measurement may be referenced to an external sync pulse. A
Sync Pulse input is provided for external sync pulse control of the measurement
period. The requirements for the sync pulse input are defined in
"Specifications" on page 12
.
Data Communication Options
The Pulse Sensor is available with two data communication options:
USB - The USB communication model is designed for use with Bird’s
VPM3 software or may also be controlled using Standard Commands
for Programmable Instrumentation (SCPI) over USB.
See
"USB Model Pulse Sensor" on page 3
.
Ethernet - The Ethernet communications model is controlled using
Standard Commands for Programmable Instrumentation (SCPI) over
Ethernet.
See
"Ethernet Model Pulse Sensor" on page 7
.
Refer to the 7027 Pulse Sensor Programming manual for details regarding SCPI
commands.
Status Indicator
A status indicator is provided to inform the user of the power sensors operating
condition.
Indicator Color Definition
Green (solid) Sensor is operating normally.
Blue (solid) Sensor is booting up.
Magenta (solid) Sensor is in programming mode.
Yellow (solid/blinking) Sensor communication error.
Any indications other than those provided here represent non-recoverable
errors, contact Bird Customer Service.
A reset pushbutton is provided to enable programming mode.
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