Siargo MF5600 Series User manual

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Gas Mass Flow Meter

VC.3

Model MF5600

Sold in North America by:

Servoﬂo Corporation

75 Allen Street

Lexington, MA 02472

www.servoﬂo.com/info@servoﬂo.com

781-862-9572

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www.Siargo.com

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MF5600UserManual

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

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Gas Mass Flow Meter

withMEMScalorimetricsensingtechnology

MF5600Series

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User Manual

DocumentNo. 04‐2022‐M2EN

Issuedate:  2022.04

Revision:  VC.3

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SiargoLtd.

3100DeLaCruzBoulevard,Suite210

SantaClara,CA95054

USA

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Tel:+1(408)969.0368

Email:[email protected]

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©Copyright2022bySiargoLtd.

SiargoLtd.anditssubsidiariesreservetherighttochangethespecificationsand/ordescriptions

withoutpriornotice.Forfurtherinformationandupdates,pleasevisit:www.Siargo.com

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www.Siargo.com

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MF5600UserManual

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

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Attention!

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Usewithcaution!

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Pleasecarefullyreadthismanualpriortooperatingthisproduct.

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Donotopenormodifyanyhardwarewhichmayleadtoirrecoverable

damage.

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Donotusethisproductifyoususpectanymalfunctionsordefection.

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Donotusethisproductforcorrosivemediaorinastrongvibration

environment.

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Usethisproductaccordingtothespecifiedparameters.

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Onlythetrainedorqualifiedpersonnelshallbeallowedtoperform

productservices.

Becautiousfortheelectricalsafety,evenitoperatesatalowvoltage,

anyelectricalshockmightleadtosomeunexpecteddamages.

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Thegastobemeasuredshouldbecleanandfreeofparticles.Donotapply

thismeterforliquidmedium.

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Donotapplyforanyunknownornon‐specifiedgasesthatmay

damagetheproduct.

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Forremotedata,pleasebesurethemeterisproperlyconfigured.

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www.Siargo.com

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MF5600UserManual

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

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TableofContents

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1.Overview..................................................................................................5

2.Receipt/unpackoftheproducts................................................................6

3.Knowingtheproducts...............................................................................7

3.1Productdescription...............................................................................................7

3.2LCDdescription.....................................................................................................7

3.3Poweranddatacabledescription...........................................................................8

3.4Mechanicaldimensions..........................................................................................9

4.Installation..............................................................................................10

5.OperationandMENUdescription..............................................................13

5.1Checktheproductspecifications...........................................................................13

5.2Checktheleakage...............................................................................................13

5.3Powerthemeteranddigitaldataconnection.........................................................13

5.4MeterMENUdescriptions....................................................................................14

5.4.1Startingthemeasurement............................................................................................14

5.4.2MENUentrywithaverifiedpassword............................................................................15

5.4.3SettheRS485Modbusaddress......................................................................................15

5.4.4SettheRS485communicationbaudrate........................................................................16

5.4.5Resetorcalibratetheoffset..........................................................................................16

5.4.6Gasconversionfactor(GCF)fordifferentgasmeasurement.............................................17

5.4.7Setthe2nd‐correctionfactor..........................................................................................18

5.4.8SettheResponsetime..................................................................................................18

5.4.9Settheunitfortheaccumulatedortotalizedflowrate....................................................19

5.4.10Settheunitfortheinstantflowrate..............................................................................19

5.4.11Setthepulse................................................................................................................20

5.4.12Changethedefaultpassword........................................................................................20

5.4.13Resettheaccumulatedortotalizedflowrate..................................................................21

5.4.14Resetthe2nd‐correctionfactor.......................................................................................21

5.4.15ExittheMENU..............................................................................................................21

5.4.16MENUkeysequenceforthesettings..............................................................................22

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www.Siargo.com

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MF5600UserManual

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

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5.5RS485Modbuscommunicationprotocol...............................................................23

5.5.1Hardwareconnection....................................................................................................23

5.5.2Communicationparameters..........................................................................................23

5.5.3Frame..........................................................................................................................24

5.5.4Functioncodes.............................................................................................................24

5.5.5Registers......................................................................................................................24

5.6Analogoutput.....................................................................................................29

5.6.14~20mAoutput..........................................................................................................29

5.6.2Pulseoutput.................................................................................................................29

6.Productselectionandorderinformation....................................................30

6.1Productselection................................................................................................30

6.2Ordercontactandcustomersupport.....................................................................30

7.Technicalspecifications............................................................................31

7.1Specifications.....................................................................................................31

7.2Pressureloss.......................................................................................................32

8.Technicalnotesfortheproductperformance.............................................33

8.1Measurementprinciple........................................................................................33

8.2Precautionsforthebestperformanceoftheproduct..............................................33

8.2.1Comparisonwithathirdpartyreferencemeter...............................................................33

8.2.2Particlecontaminationandfluidiccleanness..................................................................34

8.2.3Applytoadifferentgasmedium....................................................................................34

9.Troubleshooting......................................................................................35

10.WarrantyandLiability..............................................................................36

11.Servicecontact........................................................................................38

AppendixI:Productevaluationkit..................................................................39

AppendixII:Documenthistory.......................................................................40

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www.Siargo.com

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MF5600UserManual

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

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1. Overview

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Allcontactinformationcanbefoundattheendofthismanual.

ThismanualprovidesessentialinformationfortheoperationoftheMF5600seriesofgasmassflow

metersforgeneral‐purposegasmetrologyapplications.Theproductperformance,maintenance,

andtrouble‐shootingaswellastheinformationforproductorder,technicalsupport,andrepairare

alsoincluded.

MF5600massflowmetersaredesignedforgeneralpurposepreciseindustrialgasmeasurement,

monitor,orcontrol.Thedesignoptsforapplicationswherethedisplaymustbeseparatelyplaced

fromthemeterbodyorflowchannel.

ThemetersareoperatedwithSiargo’sproprietaryMEMScalorimetricmassflowsensorstogether

withthesmartcontrolelectronics.Thesensorsurfaceispassivatedwithsiliconnitrideceramic

materialstogetherwithawater/oilproofnano‐coatingforperformanceandreliability.Thecurrent

modelsarereadytoconnectto12mm(1/2”)or19mm(3/4”)lineswhileotherpipediameterscanbe

offeredascustomizedmodels.Themeterbodyismadeofstainlesssteelthatisavailablefor

applicationsofmostgases.

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www.Siargo.com

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MF5600UserManual

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

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2. Receipt/unpackoftheproducts

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Uponreceiptoftheproducts,pleasecheckthepackingboxbeforethedismantlementofthepacking

materials.Ensurenodamagesduringshipping.Ifanyabnormalityisobserved,pleasecontactand

notifythecarrierwhoshippedtheproductandinformthedistributorsorsalesrepresentativesifthe

orderisnotplaceddirectlywiththemanufacturer,otherwise,themanufacturershouldbeinformed

aswell.Foranyfurtheractions,pleaserefertothereturnandrepairsectioninthismanual.

Ifthepackingboxisintact,proceedtoopenthepackingbox,andyoushallfindtheproduct(either

themeterorthemeterwiththevalvepertheactualorder).Thepoweradapterand/ordatacableas

shownbelowmayalsobefoundaccordingtoyouractualorder.

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

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

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





FlowmeterPower&datacableDisplaycable

IC7‐150,Length:1.5mIC7‐30‐IC7,Length:30cm

orIC7‐200‐IC7,Length:2m.

Figure2.1:MF5600flowmeterandaccessories

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Pleasecheckimmediatelyfortheintegrityoftheproductaswellasthepoweranddatacable,ifany

abnormalisidentified,pleasenotifythedistributor/salesrepresentativeormanufacturerassoonas

youcan.Ifanydefectsareconfirmed,anexchangeshallbearrangedimmediatelyviatheoriginal

saleschannel.(Note:theLCDscreenshallnotbelighteduntilthepowercableispluggedin).This

usermanualshallalsoeitherbeincludedinthepackingboxorviaanonlinerequestforanelectronic

version.Inmostcases,thismanualshallbemadeavailabletothecustomerbeforetheactualorder.

ThetwocablesaretheAccessoryCable1forpower&datainputs/outputs(Partnumber:IC7‐150,

Length:1.5m)andtheAccessoryCable2forthedetachableLCD(Displaycable,Partnumber:IC7‐

30‐IC7,Length:30cm;orPartnumber:IC7‐200‐IC7,Length:2m).

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www.Siargo.com



MF5600UserManual

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

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3. Knowingtheproducts

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3.1 Productdescription

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Figure3.1:MF5600partsdescription

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3.2 LCDdescription

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

Figure3.2:LCDsymbolillustration.



TheLCDprovidesallinformationthattheproductmeasures.Somesymbolsarereservedfor

futureupgrades,andwillnotbelightedduringtheoperation.Thefollowingtabledetailsthe

meaningofeachofthesymbols.



Display

connection

Meterbody



DetachableLCDdisplay

MENUkeys

NPTorother

connectors



Flowdirection

Electricalinterface





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www.Siargo.com



MF5600UserManual

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

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Table3.1:Symbolsdescription

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USERThetoprowisonlydisplayedwhencommunicationorotheruser‐

definedfunctionisinprocess.

Total

ThemiddlerowdisplaysthetotalizeroraccumulatedflowrateinSL

(standardliters)orNm

(Normalizedcubicmeters).Herethe

standard(normalized)conditionsreferto20°C,101.325kPa.

FlowrateThebottomrowdisplaystheinstantflowrateinSLPM(Standard

Litersperminute)

E1Error1–Sensorerror

E2Error2–ADCerror

E3Error3–RTCerror

E4Error4–EEPROMerror

E4Error5–Oscillator(crystal)error

Temperature,formodelswithtemperatureoption

PPressure,formodelswithpressureoption

*Note:Boththepressureandtemperaturesensorscanbeintegratedwiththecurrentproduct

butnotwiththedefaultmodels.Pleasecontactthemanufacturerforfurther

information.



3.3 Poweranddatacabledescription



 Table3.2:MF5600wireassignments.



 



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Figure3.3:MF5600powercable

PartnumberIC7‐150

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Thecableconnectorhastwopinsforpositioningwhenpluggingintothemeter.Donotforcethe

plug.Aftertheplugisproperlyengaged,usetheplugscrewtotightentheengagement.

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Wire Color Definition

1Red



Powersupply



(12



24Vdc)

2BlackGND,ground

3GreenRS485A

4BrownRS485B

5Violet4~20mA,flowrateoutput

6Transparent



4~20mA/pulseground

7YellowPulseoutput



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www.Siargo.com



MF5600UserManual

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

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3.4 Mechanicaldimensions

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Figure3.4:MF5600dimensions

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