SevenStar D07-60B User manual
D07 –60B
Mass Flow controller
D07-60BM
Mass Flow Meter
INSTRUCTION MANUAL
2017.03
ANOTE TO OUR CUSTOMERS
The Sevenstar D07 series Mass Flow Meter/Controller you have just received is of the leading quality available. It
includes excellent high degree of accuracy and repeatability, in addition to the variety of operation pressure available.
It offers soft-start, tightly controlled response and maximum applications flexibility.
We strongly recommend that you read this manual thoroughly before performing any operation. This manual will
enable the full information necessary for installation, operation and ease of maintenance to be realized.
Should you require any additional information concerning the Sevenstar D07 series Mass Flow Controller or Mass
Flow Meter, please feel free to contact your local Sevenstar Sales Agent or Sevenstar Customer Service at:
(8610)--- 6436 2939.
We appreciate this opportunity to service your Mass Flow Meter/Controller, and hope we will be able to provide you
with further assistance in future.
Yours sincerely,
Sevenstar
目录
1. APPLICATION & FEATURES…………….
1
5.2.2 Zero Test and Adjustment…………………..
16
2. SPECIFICATION…………………………..
2
5.2.3 Gas Supply………………………………….
16
3. STRUCTURE & PRINCIPLE……………...
3
5.2.4 Shut Off…………………………………….
16
3.1 Structure…………………………………….
3
6. CAUTION……………………………………
16
3.2 Operation Principle…………………………
3
6.1 Medium Forbidden …………………………...
16
4. INSTALLATION & CONNECTION ……..
5
6.2 Corrosive Gas ………………………………..
16
4.1 Dimension…………………………………..
5
6.3 Valves Dynamic Sealing ……………………..
16
4.2 Fittings………………………………………
9
6.4 Valves Operating …………………………….
17
4.3 Electrical Interfacing………………………..
10
6.5 Installation Position ……………….................
17
4.4 PC Connection………………………………
11
6.6 Operation Pressure Resistance……………….
17
4.5 Zero Adjustment…………………………….
13
6.7 Calibration and Conversion…………………..
17
5. OPERATION INSTRUCTIONS…………..
14
6.8 D07-60B, 60BM Ordering Code….. …………
18
5.1 MFC Operation……………………………..
14
7. TROUBLESHOOTING……………………..
21
5.1.1 Start Up……………………………………
14
8. WARRANTY & SERVICE…………………..
23
5.1.2 Purge………………………………………
15
8.1 Product Warranty……………………………..
23
5.1.3 Readout Box & PC Connection…………...
15
8.2 Specific warranty requirements ………………
23
5.1.4 PC Connection…………………………….
15
8.3 Service…………………..……………………
23
5.1.5 Valves Control…………………………….
15
9. APPENDIX…………………………….…….
24
5.1.6 Shut Off Operation………………………..
15
9.1 Mass Flow Conversion factors…………….....
24
5.2 MFM Operation……………………………..
16
9.2 Conversion factors Introduction.......................
26
5.2.1 Start Up …………………………………..
16
MASS FLOW CONTROLLER & MASS FLOW METER
Page 1 of 26
Operating Instruction
1. APPLICATION & FEATURES
Mass Flow Meter (MFM) accurately measures mass flow rates, Mass Flow Controller (MFC) accurately measures
and controls mass flow rates despites gas volume fluctuated due to pressure or temperature changes. They are
widely applied in the fields as: semiconductor and IC fabrication, special materials science, chemical industry,
petrolic industry, pharmaceutical industry, environmental protecting and vacuum system researching, etc. The
typical applications include: microelectronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma
etching, sputtering, ion implantation; vacuum deposition equipment, optical fiber melting, micro-reaction equipment,
mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments.
D07 series MFM & MFC bring the high accuracy, excellent repeatability, quick response, soft-start, better reliability,
wide variety ranges of operation pressure (good operation in high pressure and vacuum situations), simple
convenient operation, flexible installation, possible connecting with PC to carry out automatic control to the users’
system.
D07-60B、D07-60BM all use ±15 VDC power supply, and they are better connected together with D08 series
Readout Box, the cable connection is showing as following (Figure 1):
Figure 1 D07-60B MFC and Readout Box
Page 2 of 26
2. SPECIFICATION
Table 1. Specifications of D07-60B MFC and D07-60BM MFM
NO
Item
D07-60B
D07-60BM
1
Flow Ranges
300，500，750，1000，1500，2000SLM
2
Accuracy
±2% F.S.
3
Linearity
±1% F.S.
4
Repeatability
±0.2%F.S.
5
Response-Time
＜10 sec
6
Operation
Pressure
(0.25 ~ 0.5) MPa （≤1000SLM）
(0.4 ~ 0.6) MPa （＞1000SLM）
＜0.2 MPa
7
Max Pressure
3 MPa
8
Operation
Temperature
5~ 45 ℃
9
Input Signal
0 ~ 5.00 V (Input Resistance > 500K)
NO
10
Output Signal
0V ~ 5.00 V (Output Electric Current ≤3mA)
11
Valve Type
N.C. Solenoid
NO
12
Power Supply
+15V 50 mA
-15V 200 mA
+15V 50 mA
-15V 50 mA
13
Dimension (mm)
According to Figure 3a、3b、3c、3d
14
Weight (kg)
6
5
Notes :
MFC/MFM is calibrated by N2as a standard gas.
Units: SCCM (Standard Cubic Centimeter/Min);
SLM (Standard Liter/Min)
Standard Situation: Tem —273.15K ( 0 ºC );
Air Pressure —101325 Pa (760mm Hg)
For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 ºC ,1atm”, and the unit of SLM
Page 3 of 26
is identical to “L/min, 0 ºC ,1atm”.
F.S. : Full Scale
3. STRUCTURE & OPERATION PRINCIPLE
3.1 Structure
The MFM consists of flow sensor, flow-splitter bypass and flow amplifying circuit. If add Control valves and PID
control circuit to MFM will compose a MFC.
3.2 Operation Principle
According to the Capillary Heat Transfer Temperature Difference Calorimetry Theory, the flow sensor measures the
mass flow without pressure compensation. The sensor heated the flow signal which was measured by electric bridge
and amplified it through amplifier, the amplified flow testing voltage is compared with presetting voltage, the
differential signal will control valve after amplified, then the flow rate of closed loop control will be as same as
presetting flow rate. The bypass divider controls the flow rate. The corresponding D08 series Flow Readout Boxes
have stabilized power supply, 3 and 1/2 digital voltage meter, presetting potentiometer, external & internal
converters and three-phase switches. Figure 2 is exactly showing the operating principle while MFC is connecting
with Flow Readout Box.
Page 4 of 26
INT
out
INLET
I
Bypass
Sensor
Ru Rd
MASS FLOW
CONTROLLER
Power
Readout
100.0
~220V
+15V
Power Com.
-15V
Amplifier
+5.00V
+15V
Override
Valve
Valve
Drive
OUTLET
AUTO
PURGE
-15V
OFF
FLOW READOUT BOX
(0 ~ +5.00V)
Comparator
set
EXT
SET (0 ~ +5.00V)
Signal Com.
Output
Setpoint
Figure2. Principle of MFC
The outputting flow testing signal from MFC is a direct ratio with the flow through the channels, flow outputting
signal is 0~5VDC. The Flow control ranges of MFC is (2~100) %F.S., flow resolving power is 0.1% F.S..
Attention:
When Valve controller of MFC is posited on position of “PURGE”, it can be functioned as a MFM. In that
case, the maximum flow testing voltage could reach beyond +10V, please be careful, while flow is beyond
F.S. +5V(Full Scale), the real flow will have no linearity corresponding with flow testing voltage. While it’s
purging, flow display will be inaccurate, even showing “reduce” while the real flow is enhanced, please be
sure it’ll be no damaged to device itself.
Page 5 of 26
Operation control could accomplish by Flow Readout Box. When set point is turned on the “INT”, flow rate will be
under controlled by the presetting potentiometer; when setpoint is turned on the “EXT”, flow rate will be controlled
by set signal which is supplied by users.
There are three valves control switches on the panel of D08 series Flow Readout Box: CLOSE, PURGE and AUTO.
In case of CLOSE, Valves of MFC will shut off; in case of PURGE, Valve will open reach to the tip to purge the
Gas systems or could be functioned as a MFM; when set to AUTO, Valve can control the flow rate automatically.
4. INSTALLATION & CONNECTION
4.1 Dimension
Dimensions and installations are showing as following figure 3a、3b、3c、3d:
Figure 3a. Dimension of D07-60B MFC With 1/2″/φ10 Compression Fitting Fitting
Page 6 of 26
Flange
D
K
L
DIN DN15- PN40
95
65
14
DIN DN20- PN40
105
75
14
DIN DN25- PN40
115
85
14
Figure 3b. Dimension of D07-60B MFC With Flange
Page 7 of 26
Figure 3c. Dimension of D07-60BM MFM With 1/2″/φ10 Compression Fitting Fitting
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