2
(Note 1) Value obtained under conditions using the recommended air nozzle (p.7). If an air nozzle of a
different shape will be used, verify on the actual machine before deciding.
(Note 2) Value obtained under conditions using the recommended piping. If a different piping diameter will
be used, verify on the actual machine before deciding.
(Note 3) Value obtained under conditions using one nozzle per port. If multiple nozzles per port will be
used, verify on the actual machine before deciding.
(Note 4) Value obtained under conditions using the included leakage unit.
(Note 5) The external shape of the connection tube for the attached leakage unit is Φ6.
A converter is required to connect a tube with an outer shape of Φ4.
Product name
Repeatability (Note 1) - (Note 4)
Guaranteed repeat accuracy range (Note 1) - (Note 4)
Fluid used
Setting pressure
Consumption flow rate
(Note 1) - (Note 4)
Connection bore
Recommended piping
Response speed
Power supply voltage
Current consumption
Input specification
Output specification
Cable
Electrical response speed
Protective structure
Operating temperature range
DPA-3SR1
±
0.5
μm (master value
：
1〜60
μm)
±
1
μm (master value
：
60〜100
μm)
Air Pressure change : within ±1%
1〜100
μm
Dry air (filtered to 5μm)
150
〜
200
kPa
27
ℓ/min
（max）
Rc
1/8
φ
6
×φ
4
φ
4
×φ
2.5
,φ
6
×φ
4
Refer to response time characteristics graph (p.3)
DC
24
V±
10
％
Up to 100
mA
Photocoupler output: Non-voltage output with polarity
DC
24
V±
10
％
Photocoupler output: Non-voltage output with polarity
(collector/emitter floating)
Voltage: Up to 24 VDC±10%
Current: Up to 20 mA
Residual voltage 1.5 V or less (at 15 mA)
Standard length 3m Oil resistance φ
5.5/
16 cores AWG 28
10
ms、
20
ms、
80
ms (can be set in SMOOTHING set mode)
IP
67
0℃−60℃ (no condensation)
2-2. Specifications table
2. Specifications
SUP port
OUT port (Note 5)
