Entegris InVue CR288 User manual

ADVANCED MATERIALS HANDLING |MANUAL

InVue®CR288

Concentration

Monitor

User guide

2Installation and Use Manual | Entegris, Inc.

INVUE CR288 CONCENTRATION MONITOR

Installation and Use Manual | Entegris, Inc.

TABLE OF CONTENTS

—

Safety .............................................................................. 4

Safe Disposal ................................................................... 4

Installation and Workflow Overview ........................ 4

User-supplied Tools and Equipment ......................... 5

Optional User-supplied Equipment .......................... 5

Installing CR288 ............................................................ 5

Choosing a Location .................................................... 5

Other Flow Considerations ......................................... 6

Mounting CR288 Concentration Monitor .............. 6

Attaching Fluid Lines ..................................................... 6

Installing the Digital Display Unit (DDU) .................. 6

Choosing a Location .................................................... 6

Connect CR288 Sensor(s) to DDU ............................. 7

Connect Electrical Wiring ............................................ 7

Connect Power to Unit ................................................ 7

Terminal Block Pinout .................................................. 7

Install Drivers and Set Port BPS Rate ........................ 8

Install and Launch 288-connnect® Software ......... 8

Save Factory Initialization Settings to a File ............ 8

Check Factory Initialization ........................................ 9

Set Initial Parameters ................................................... 9

Re-zero .......................................................................... 10

Determine Temperature Compensation

Coefficient (TCC) ........................................................ 10

Temperature Compensation .................................... 10

Calculate the TCC Using Excel®................................ 11

Collect Data ................................................................... 11

Calculate the TCC ........................................................ 11

Implement the Calculated TCC ................................ 11

Option: Run or Continue Calibration ...................... 11

Calibrate Sensor to a Chemical ................................ 12

Basic Procedure ........................................................... 12

Unit Operation ............................................................. 12

Launch the Program ................................................... 12

Functions ....................................................................... 12

Display Tab .................................................................... 12

Data Graph Tab ............................................................ 13

Data Logging Tab ........................................................ 15

Sensor Calibration Tab ............................................... 16

Sensor Info Tab Fields ................................................ 16

Chemical Calibration Tab .......................................... 17

Digital I/O Tab ............................................................... 19

Diagnostics Tab ............................................................ 20

Raw Data Tab ................................................................ 20

First Derivative Tab ...................................................... 21

Maintenance ................................................................ 22

Re-zero and Re-titration ........................................... 22

Cleaning and Re-initialization ................................. 22

Precautions ................................................................... 22

Cleaning the Sensor Window .................................... 23

Troubleshooting ........................................................... 23

Appendix A: Advanced Features .............................. 27

Create a New Chemical Calibration Table ............ 27

Temperature Compensation Wizard ...................... 27

Information for 420 mA Applications ..................28

Appendix B: Theory of Operations .......................... 29

Appendix C: Performance Data ................................ 30

Limited Warranty ........................................................ 32

For More Information ................................................ 32

Terms and Conditions of Sale .................................. 32

INVUE CR288 CONCENTRATION MONITOR

Installation and Use Manual | Entegris, Inc.

SAFETY

—

Before assembling, installing or running InVue®

CR288 liquid chemical concentration monitor,

heed the following:

CAUTION: CR288 is a sensitive elec-

tronic device. Rough handling may

cause damage. Do not drop.

WARNING:

• Touching live electrical parts can

cause fatal shocks and severe burns.

Incorrectly installed or improperly

grounded equipment is a hazard.

 Do not touch live electrical parts.

 Contact Entegris representative for

training before cleaning.

 Keep all panels and covers securely in place.

 Properly ground the system before use.

Plug the power supply into a properly

wired receptacle.

 Follow local electrical codes and the

guidelines in the manual when installing

the CR288 concentration monitor. Failure

to do so may create an electrical shock hazard.

Shock hazards can exist even when equipment

is properly installed. The operator should

be properly trained and follow established

safety practices.

SAFE DISPOSAL

When disposing of any component of the CR288

concentration monitor, observe the local and national

requirements for the disposal of electrical and

electronic equipment.

Additional technical information is posted on

www.entegris.com.

INSTALLATION AND WORKFLOW OVERVIEW

—

Prepare Gather user-supplied tools and

equipment

Install Determine best location for mounting

equipment

Mount sensor, attach ﬂuid lines

Connect electrical wiring

Install driver and software

Connect sensor to software

Setup Initialize in air

Enter initial parameters

Re-zero to DI water or other baseline

chemical

Determine the Temperature

Compensation Coecient (TCC)

Implement the calculated TCC

Calibrate to the process chemical

Run Use 288-connect®software to view

and log data

Maintain Clean window, re-zero, re-titrate

Troubleshoot Software messages, hardware issues

HANDLE

WITH CARE

INVUE CR288 CONCENTRATION MONITOR

5Installation and Use Manual | Entegris, Inc.

USER-SUPPLIED TOOLS AND EQUIPMENT

—

These supplies are also required for completing the

installation and calibration.

Computer MS Windows®98 or higher

128+MB RAM

DI water or other

reference index

chemical

Used for initial re-zero to DI water

Fluid lines Fine thread ﬂare, PrimeLock®or

Super 300 Type Pillar®standard

end connections

Installation tools

and ﬁttings to

attach lines to

CR288 ﬁttings

OPTIONAL USER-SUPPLIED EQUIPMENT

The most common integration is wiring the CR288

concentration monitor with a current measurement

device via a Programmable Logic Controller (PLC).

See Installing CR288 Concentration Monitor In-line

to assess the tools and equipment needed.

4-20 mA analog

measurement

device

Various

Basic wiring tools

Site-speciﬁc

installation tools,

mounts

INSTALLING CR288 CONCENTRATION MONITOR IN-LINE

—

CHOOSING A LOCATION

Environmental Requirements

Process chemical

temperature

16°–50°C (60°–122°F)

Ambient Temperature 25°C ±5°C (77°F ±9°F)

Lighting condition

changes

Minimal

NOTE: Install a light shield over the concentration monitor

and/or translucent ﬂuid lines to minimize changes.

Figure 1. Light shield over concentration monitor.

Fluid Flow Requirements

Fluid ﬂow/direction Bidirectional

Line pressure 0–5.5 bar (0–80 psig)

Location relative to

pump/bellows

Upstream of pump/bellows

Location relative to

pressure-regulating

device

Downstream of pressure-

regulating device

INVUE CR288 CONCENTRATION MONITOR

Installation and Use Manual | Entegris, Inc.

OTHER FLOW CONSIDERATIONS

For accuracy, the in-line location must:

• Provide ﬂow representative of the bulk ﬂuid.

• Maintain adequate ﬂow so that sediment and

bubbles do not collect on the sensor.

• Provide minimal ﬂow pulses. Strong pressure pulses

in the ﬂuid stream may cause erratic readings.

NOTE: A pressure-regulating device can improve sensor

operation and performance.

MOUNTING CR288 CONCENTRATION MONITOR

The sensor is mounted in-line with the process ﬂuid

stream using the end connections on either side of

the body.

Orientation

Figure 2. Recommended orientation for normal mounting.

Figure 3. Alternate orientation for minimum bubble rejection.

Figure 4. Alternate orientation for maximum bubble rejection.

ATTACHING FLUID LINES

Attach tubes using standard procedure for

Teﬂon®connections.

NOTE: Lines must be dry. Do not use any DI water or

process ﬂuids.

INSTALLING THE DIGITAL DISPLAY UNIT (DDU)

—

CHOOSING A LOCATION

Environmental Requirements

No exposure to moisture

and chemicals

Preferred location is in an

electrical cabinet

Within 3 m (10’) of

the sensor

Distance is limited by the

length of the supplied

interconnecting cable

Other Considerations

Power supply 24 V (dc), ≥1A (included)

On/o switch (optional

but recommended)

The DDU does not have

a built-in power switch.

The system will always be

powered on when connected

to a power source. Mounting

an external power switch

to control the DDU’s power

supply is recommended.

Front View

INVUE CR288 CONCENTRATION MONITOR

7Installation and Use Manual | Entegris, Inc.

Figure 5. Digital display unit (DDU).

CONNECT CR288 SENSOR(S) TO DDU

—

1. To connect the IP67 end of the cable to the top of

the sensor, align the keyed connectors and twist

the connector hand tight.

2. Connect the HD 15 end of the cable to one of the

four sensor input ports on the bottom of the DDU.

3. Use a screwdriver to secure the HD 15 end to

the DDU.

4. Connect the USB-to-serial cable to the computer.

CONNECT ELECTRICAL WIRING

—

CONNECT POWER TO UNIT

1. Wire 24 volts according to the terminal block.

See Terminal Block Pinout.

2. Optional: If using 4-20 mA outputs, wire according

to the Terminal Block Pinout.

3. Connect terminal block to DDU.

TERMINAL BLOCK PINOUT

124 V+ supply

2Power GND

Sensor 1 concentration 3Source

4GND

Sensor 1 temperature 5Source

6GND

Sensor 2 concentration 7Source

8GND

Sensor 2 temperature 9Source

10 GND

Sensor 3 concentration 11 Source

12 GND

Sensor 3 temperature 13 Source

14 GND

Sensor 4 concentration 15 Source

16 GND

Sensor 4 temperature 17 Source

18 GND

Digital alarm 1 19 NC

Digital alarm 2 20 NC

Figure 6. Terminal block pinout.

182.9 mm (7.20”)

193.0 mm

(7.60”)

Ports 1–4

Terminal block

INVUE CR288 CONCENTRATION MONITOR

Installation and Use Manual | Entegris, Inc.

INSTALL DRIVER AND SET PORT BPS RATE

Figure 7. Setting port BPS rate.

1. Plug the RS-232 USB adapter into the selected

computer USB port.

2. Wait for Windows to download and install the

appropriate driver from the Internet. It may take up

to 30 seconds for this process to complete.

NOTE: Internet access is required.

3. Using Windows Menu set the baud rate for the

RS-232 cable.

4. Go to Device Manager.

a. Right click the COM port for the USB

RS-232 cable.

b. Select Properties-> Port Settings

c. Change the Bits Per Second to 9600.

INSTALL AND LAUNCH 288-CONNECT SOFTWARE

1. Download and run the Entegris 288-

connect installation program from the

entegris.com website.

NOTE: You will need to complete a user proﬁle.

2. Be sure the CR288 sensor is on. Ensure all parts

are clean and dry.

3. Launch the program by double clicking on the

288-connect icon on the desktop.

Figure 8. 288-connect icon.

Figure 9. 288-connect opening screen.

4. Select the Display tab.

5. Select the COM port from the pull-down menu.

NOTE: If you have trouble establishing communication,

power cycle the CR288 to reestablish communication.

If you still have trouble establishing communication,

contact Customer Service.

6. Access Expert mode by clicking the About box

and entering the password Advanced288.

SAVE FACTORY INITIALIZATION SETTINGS TO A FILE

—

The sensor was initialized in air at the factory.

Initializing the sensor in air conﬁgures the optical

components and removes background and electrical

noise. This step records the initialization settings

to a ﬁle. This ﬁle is used to restore the sensor to

factory settings.

INVUE CR288 CONCENTRATION MONITOR

9Installation and Use Manual | Entegris, Inc.

1. On the Sensor Calibration tab, press Load Memory

to import factory settings.

2. Press Save Complete Sensor Info to File to

write the factory settings to a ﬁle. The ﬁle size is

approximately 2 K and has a *.cr288 extension.

NOTE: Keep this ﬁle and back it up to a secure location.

The ﬁle enables you to restore factory settings.

Figure 10. Saving factory settings to a file.

CHECK FACTORY INITIALIZATION

—

This step conﬁrms that the sensor is functioning

in air as expected.

1. On the Diagnostics tab, ensure the TIR curve is

ﬂat and the “Line Quality in Air” is below 3.0e-3.

See Figure 11. Flat TIR curve.

2. Set initial parameters.

NOTE: If the TIR curve is not ﬂat:

a. Reconﬁrm that the CR288 window is clean

and dry.

b. Perform a re-zero. See Re-zero for instructions.

If the problem persists, contact Technical Support.

Figure 11. Flat TIR curve.

SET INITIAL PARAMETERS

—

1. Select the Sensor Calibration tab. Within that tab,

select the Sensor Info tab.

2. Set desired number of rolling averages. See Change

Rolling Averages for information.

3. Optional: On the Sensor Info tab, set 4–20 mA

zero to full span to match user PLC settings for

concentration.

4. Optional: Set 4–20 mA zero to full span to match

user PLC settings for temperature.

5. Leave other settings unchanged.

6. Press Save Memory to activate the new settings.

Figure 12. Setting initial parameters.

INVUE CR288 CONCENTRATION MONITOR

Installation and Use Manual | Entegris, Inc.

RE-ZERO

The Re-zero function calibrates the refractive index

measurement to a known baseline.

The Re-zero function compensates for dierences

between sensors and operating environments

(ambient temperatures, ambient light, etc.) and for

slow drift in the signal.

The typical baseline is DI water (IoR =1.333000).

Process lines that cannot be run with water may use

another reference chemical of a known concentration

or Index of Refraction.

Important Notes

• Only Re-zero when at system operating pressure

and ﬂow.

• Follow the Chemical Concentration Oset proce-

dure if it is not possible to run DIW through the

sensor. See Chemical Concentration Oset.

• If the Chemical Concentration Oset function was

used before using the Re-zero function, reset the

chemical concentration oset value to zero. See

Chemical Concentration Oset.

• The quality of the Re-zero procedure depends on

having the correct temperature compensation

value for the reference chemical. The value of

FTCC1 for distilled water at 20°C is -0.00004.

Steps

1. Select port.

2. Run DI water through loop and ensure thermal

steady-state stability (<0.1°C) on the Data

Graph tab.

3. Go to Sensor Calibration/Factory Calibration tab.

Click Load memory.

4. Click Re-zero Sensor.

5. Click Save Memory.

6. Go to the Data Graph tab.

7. Select the IoR@20 tab.

8. Observe the IoR@20 data.

9. Ensure that sensor is reading 1.333000 (±2-6).

If it does not, repeat the Re-zero steps. If problem

persists, contact Technical Support.

Figure 13. Performing a re-zero.

Figure 14. Checking the re-zero.

DETERMINE TEMPERATURE COMPENSATION

COEFFICIENT (TCC)

—

TEMPERATURE COMPENSATION

CR288 actively monitors and compensates for

changes in the IoR caused by ﬂuid temperature

changes. The compensation is determined by a

calculation (TCC).

NOTE: Entegris Technical Support assists customers with

setting the TCC. Contact Technical Support.

CR288 applies a linear temperature compensation

model as determined by the TCC.

The default is set for H2O at -4 × 10. New TCCs must

be calculated for other chemistries or processes.

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