Agilent Technologies B1542A User manual

Agilent Technologies

Agilent B1542A

Pulsed IV Package for

B1500A/EasyEXPERT

User’s Guide

Notices

No part of this manual may be reproduced in

any form or by any means (including elec-

tronic storage and retrieval or translation

into a foreign language) without prior agree-

ment and written consent from Agilent

Technologies, Inc. as governed by United

States and international copyright laws.

Manual Part Number

B1542-90003

Edition

Edition 1, July 2006

Edition 2, September 2006

Edition 3, February 2007

Edition 4, June 2007

Agilent Technologies, Inc.

5301 Stevens Creek Blvd

Santa Clara, CA 95051 USA

Warranty

The material contained in this docu-

ment is provided “as is,” and is sub-

ject to being changed, without notice,

in future editions. Further, to the max-

imum extent permitted by applicable

law, Agilent disclaims all warranties,

either express or implied, with regard

to this manual and any information

contained herein, including but not

limited to the implied warranties of

merchantability and fitness for a par-

ticular purpose. Agilent shall not be

liable for errors or for incidental or

consequential damages in connec-

tion with the furnishing, use, or per-

formance of this document or of any

information contained herein. Should

Agilent and the user have a separate

written agreement with warranty

terms covering the material in this

document that conflict with these

terms, the warranty terms in the sep-

arate agreement shall control.

Technol o gy Licenses

The hardware and/or software described in

this document are furnished under a license

and may be used or copied only in accor-

dance with the terms of such license.

Restricted Rights Legend

If software is for use in the performance of a

U.S. Government prime contract or subcon-

tract, Software is delivered and licensed as

“Commercial computer software” as

defined in DFAR 252.227-7014 (June 1995),

or as a “commercial item” as defined in FAR

2.101(a) or as “Restricted computer soft-

ware” as defined in FAR 52.227-19 (June

1987) or any equivalent agency regulation or

contract clause. Use, duplication or disclo-

sure of Software is subject to Agilent Tech-

nologies’ standard commercial license

terms, and non-DOD Departments and

Agencies of the U.S. Government will

receive no greater than Restricted Rights as

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will receive

no greater than Limited Rights as defined in

FAR 52.227-14 (June 1987) or DFAR

252.227-7015 (b)(2) (November 1995), as

applicable in any technical data.

This product complies with the WEEE Directive (2002/96/EC) marking requirements.

The affixed label indicates that you must not discard this electrical/ electronic product

in domestic household waste.

Product Category: With reference to the equipment types in the WEEE Directive

Annex I, this product is classed as a “Monitoring and Control instrumentation”

product.

Do not dispose in domestic household waste.

To return unwanted products, contact your local Agilent office, or see

www.agilent.com/environment/product/ for more information.

In This Manual

This manual provides the information about Agilent Technologies B1542A and

consists of the following chapters. This manual supports the pulsed IV system

software revision A.01.02.

•Chapter 1, “Introduction”

Describes product overview of Agilent B1542A.

•Chapter 2, “Installation”

Explains how to install Agilent B1542A.

•Chapter 3, “Performing System Setup and Compensation”

Explains how to perform system setup and how to update compensation data.

•Chapter 4, “Performing Measurement”

Describes measurement examples by using the pulsed IV test system.

•Chapter 5, “PLSDIV Test Definitions”

Provides reference information for application test definitions (PLSDIV test

definitions) used for the pulsed IV measurement.

•Chapter 6, “PLSDIV TIS Commands”

Provides reference information for execution files (Plsdiv commands, PLSDIV TIS)

used in the PLSDIV test definitions.

•Chapter 7, “Status Code and Error Messages”

Lists the status code and the error messages.

NOTE The pulsed IV test system consists of some instruments, oscilloscope, pulse

generator, source monitor unit, and so on. To use the instruments independently or for

details of the instruments, see the manual of each instrument.

NOTE To get the latest firmware/software/electronic manuals/support information, visit

Agilent Technologies support site (http://www.home.agilent.com), and click

Additional Test & Measurement Products > Parametric Test, click Semiconductor

Parameter/Device Analyzer Series, and click B1500A Semiconductor Device Analyzer.

You can reach Agilent B1500A support site.

Contents

Agilent B1542A User’s Guide, Edition 4

1. Introduction

Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Typical Technical Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

Accessories and Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

2. Installation

Inspection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

RF Probes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

DC Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

Hardware Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Installing Instruments. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Connecting GPIB Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Installing Pulsed IV Test System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

Installing DC + Pulsed IV Test System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Connecting RF Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

Connecting DC Probes. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

System Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

Installing Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21

Installing Cable Compensation Data . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21

After Software Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22

Updating Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23

If You Remove Pulsed IV Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23

Rack-mounting Pulse/dc Switch Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24

Rack-mounting Pulse/dc Switch Units. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26

Rack-mounting the Infiniium Oscilloscope . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28

3. Performing System Setup and Compensation

Agilent B1542A User’s Guide, Edition 4

Contents

Pulsed IV System Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Starting System Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Starting System Setup for B1542A-003 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-7

System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10

Compensation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11

Drain Cable Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-16

4. Performing Measurement

Theory of Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

Terminal Voltage and Source Output Value. . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

Before Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

Performing System Reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

Pulse Waveform Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Pulsed Id-Vd Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-10

Pulsed Id-Vg Measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-12

DC I-V Measurements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14

5. PLSDIV Test Definitions

PLSDIV Capt Wave. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4

PLSDIV DC IdVd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

PLSDIV DC IdVd SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9

PLSDIV DC IdVg . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

PLSDIV DC IdVg SMU . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14

PLSDIV IdVd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

PLSDIV IdVg . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21

Contents

Agilent B1542A User’s Guide, Edition 4

PLSDIV IV SMU. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25

PLSDIV Reset . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-29

PLSDIV Setup . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30

Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31

6. PLSDIV TIS Commands

Command Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

Entering Plsdiv Commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

Command Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5

Defining Numeric/Vector Input Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

Defining String/Numeric Input Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

Defining Numeric Output Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

Defining Vector Output Parameter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

Defining String Output Parameter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

Defining Format Field . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

Setup Example . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8

Command Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9

DispMessage. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10

PlsdivCaptureMonData . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11

PlsdivCaptureTimeData . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12

PlsdivCutoffVd. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

PlsdivCutoffVg. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

PlsdivErrorMessage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-13

PlsdivForceVd . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

PlsdivForceVg . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

PlsdivInit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15

PlsdivMeasureId. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

PlsdivSetAdjustStat . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

PlsdivSetAveraging . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

Agilent B1542A User’s Guide, Edition 4

Contents

PlsdivSetDeviceDelay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-19

PlsdivSetMeasTime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-20

PlsdivSetPulseWidth . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21

PlsdivSetSampling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21

PlsdivSetSmoothing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22

PlsdivSetTransTime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

PlsdivSetVgLevel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-23

PlsdivUninit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-24

7. Status Code and Error Messages

1Introduction

1-2 Agilent B1542A User’s Guide, Edition 4

Introduction

Agilent B1542A Pulsed IV Package for B1500/EasyEXPERT is a solution package

for the Agilent B1500A or Desktop EasyEXPERT users and provides the automated

pulsed IV test environment. This chapter introduces Agilent B1542A, and consists

of the following sections.

•“Overview”

•“Typical Technical Information”

•“Accessories and Options”

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