
C-1*
12702A/B Resistivity Chamber Operation Manual
Table of Contents
1. Introduction..................................................................................................1-1
1.1 Product Overview.........................................................................................................................1-1
1.2 Before Using the Product .............................................................................................................1-1
2. Panel Descriptions........................................................................................2-1
2.1 Front Panel....................................................................................................................................2-1
2.2 Electrodes .....................................................................................................................................2-3
2.3 Volume and Surface Resistivity Measurements............................................................................2-4
2.4 How to Calculate Volume and Surface Resistivities.....................................................................2-5
2.5 Pressure to Electrode ....................................................................................................................2-7
2.6 Cover ............................................................................................................................................2-7
2.7 Sample Thickness Measurement ..................................................................................................2-7
2.8 Internal Connection ......................................................................................................................2-7
3. Measurement Method ..................................................................................3-1
3.1 Connecting to the Measuring Instruments....................................................................................3-1
3.2 Measuring Volume and Surface Resistivities ...............................................................................3-4
4. Storage..........................................................................................................4-1
5. Specifications...............................................................................................5-1