Zeiss AURIGA Compact Crossbeam User manual

AURIGA®Compact

Crossbeam®workstation

Instruction Manual

AURIGA® Compact

Crossbeam®workstation

Original instructions

Carl Zeiss Microscopy GmbH

Carl-Zeiss-Promenade 10

07745 Jena, Germany

[email protected]

www.zeiss.com/microscopy

Carl Zeiss Microscopy GmbH

Carl-Zeiss-Straße 22

73447 Oberkochen

Document name: Instruction Manual AURIGA® Compact

Revision: en03

Effective from: January 2015

346500-8099-000

This document or any part of it must not be translated, reproduced or transmitted in any form or by any means, electronic or

mechanical, including photocopying, recording, or by any information or retrieval system. Violations will be prosecuted.

The use of general descriptive names, registered names, trademarks, etc. in this document does not imply, even in the absence of a

speciﬁc statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use.

Software programs will fully remain the property of Carl Zeiss Microscopy. No program, documentation or subsequent upgrade thereof

may be disclosed to any third party, unless prior written consent of Carl Zeiss Microscopy has been procured to do so, nor may they be

copied or otherwise duplicated, even for the customer’s internal needs apart from a single back-up copy for safety purposes.

Due to an ongoing process of improvement Carl Zeiss Microscopy reserves the right to make modiﬁcations of this document without

notice.

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Table of contents

1. About this manual ........................................................................................ 7

1.1. Safety instructions in this manual .................................................................. 8

1.2. Typographical conventions ............................................................................ 9

1.3. Definition of terms ......................................................................................... 10

2. Safety .......................................................................................................... 11

2.1. Intended use ................................................................................................... 11

2.2. Prevention of accidents and of improper use ............................................. 13

2.3. Safety summary ............................................................................................. 14

2.3.1. Hazards related to personal injury ......................................................................... 14

2.3.2. Hazards not related to personal injury ................................................................... 17

2.4. Safety equipment ........................................................................................... 18

2.4.1. Safety devices ....................................................................................................... 18

2.4.1.1. Protective cover panels................................................................................................. 18

2.4.1.2. Interlock system ............................................................................................................ 18

2.4.1.3. ON/OFF switch.............................................................................................................. 19

2.4.1.4. EMO box with main switch............................................................................................ 19

2.4.1.5. EMO button................................................................................................................... 20

2.4.1.6. Main shut-off valves ...................................................................................................... 20

2.4.2. Safety labels and labels ........................................................................................ 21

2.4.2.1. At the front of the workstation........................................................................................ 21

2.4.2.2. At the rear of the workstation ........................................................................................ 22

2.4.2.3. At the rear of the electron optical column...................................................................... 23

2.4.2.4. Inside the workstation.................................................................................................... 23

2.4.3. Material Safety Data Sheets .................................................................................. 23

2.5. Safety instructions for handling precursors (with GIS upgrade only) ...... 24

3. Description ................................................................................................. 25

3.1. Overview ......................................................................................................... 25

3.2. Workstation .................................................................................................... 26

3.2.1. Gas injection system (GIS) upgrade ..................................................................... 27

3.2.1.1. Multi GIS........................................................................................................................ 27

3.2.1.2. Single GIS..................................................................................................................... 27

3.2.2. Charge compensation upgrade ............................................................................. 28

3.2.2.1. Charge Compensator.................................................................................................... 28

3.2.2.2. Five-channel GIS with integrated charge compensation............................................... 28

3.3. Control elements ............................................................................................ 29

3.3.1. SmartSEM®user interface .................................................................................... 29

3.3.2. Dual joystick .......................................................................................................... 30

3.3.3. Optional control panel ........................................................................................... 31

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3.4. Principle of operation .....................................................................................32

3.4.1. Vacuum system ..................................................................................................... 32

3.4.2. Specimen stage ..................................................................................................... 33

3.4.3. Electron optics (GEMINI®column) ........................................................................ 34

3.4.4. Ion optics (FIB column) .......................................................................................... 36

3.4.4.1. Imaging modes.............................................................................................................. 38

3.4.5. Signal detection ..................................................................................................... 39

3.4.5.1. In-lens detector............................................................................................................. 40

3.4.5.2. SE2 detector ................................................................................................................. 41

3.4.5.3. InlensDuo detector (optional)........................................................................................ 42

3.4.5.4. SESI detector (optional)................................................................................................ 43

3.5. Specification ...................................................................................................44

3.5.1. Workstation ........................................................................................................... 44

3.5.2. FIB column ............................................................................................................ 46

3.6. Installation requirements ...............................................................................47

3.7. Options ............................................................................................................49

3.7.1. Airlock .................................................................................................................... 49

3.8. Customer service ............................................................................................49

4. Transport and storage ...............................................................................51

4.1. Transport .........................................................................................................51

4.2. Storage ............................................................................................................52

5. Installation ...................................................................................................53

6. Operation .....................................................................................................55

6.1. Switching on the workstation ........................................................................55

6.2. Starting the SmartSEM®user interface ........................................................56

6.3. Finding your way in the SmartSEM®user interface ....................................58

6.3.1. Showing or hiding toolbars .................................................................................... 58

6.3.2. Showing or hiding the data zone ........................................................................... 59

6.3.3. Showing a full screen image .................................................................................. 59

6.3.4. Docking panels ...................................................................................................... 60

6.3.5. Opening the Panel Configuration Bar .................................................................... 62

6.4. SEM operation .................................................................................................63

6.4.1. Obtaining a first image ........................................................................................... 63

6.4.1.1. Preparing the sample holder......................................................................................... 64

6.4.1.2. Loading the specimen chamber.................................................................................... 65

6.4.1.3. Locating the specimen.................................................................................................. 69

6.4.1.4. Switching on the electron gun....................................................................................... 70

6.4.1.5. Switching on the EHT.................................................................................................... 71

6.4.1.6. Generating an image..................................................................................................... 73

6.4.1.7. Optimising the image.................................................................................................... 75

6.4.1.8. Saving the image.......................................................................................................... 79

6.4.1.9. Finishing the work session............................................................................................ 81

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6.4.2. Setting detection parameters ................................................................................ 82

6.4.2.1. Selecting a detector....................................................................................................... 82

6.4.2.2. Using the SE2 detector ................................................................................................. 83

6.5. Electron beam deposition or etching (with GIS upgrade only) ................. 83

6.5.1. Heating the reservoirs ........................................................................................... 84

6.5.2. Depositing or etching with the electron beam ....................................................... 85

6.6. CrossBeam® operation .................................................................................. 86

6.6.1. Preparing the workstation ...................................................................................... 86

6.6.1.1. Getting started............................................................................................................... 86

6.6.1.2. Adjusting tilt eucentricity................................................................................................ 87

6.6.1.3. Switching on the ion beam (FIB)................................................................................... 88

6.6.1.4. Setting the coincidence point ........................................................................................ 93

6.6.2. Milling for depth ..................................................................................................... 94

6.6.2.1. Selecting milling conditions ........................................................................................... 94

6.6.2.2. Starting the milling procedure........................................................................................ 97

6.6.3. Recording images during milling ........................................................................... 99

6.6.4. Gas assisted deposition: Platinum (with GIS upgrade only) ............................... 100

6.6.4.1. Heating the platinum reservoir .................................................................................... 100

6.6.4.2. Outgassing the platinum reservoir (only with five-channel GIS).................................. 102

6.6.4.3. Selecting deposition conditions................................................................................... 105

6.6.4.4. Starting the deposition procedure ............................................................................... 107

6.6.5. Setting detection parameters .............................................................................. 110

6.6.5.1. Using the SESI detector (optional).............................................................................. 110

6.6.6. Adjusting a FIB probe current at high kV (30 kV) ................................................ 112

6.6.6.1. Overview ..................................................................................................................... 112

6.6.6.2. Adjusting a low probe current (pA).............................................................................. 114

6.6.6.3. Adjusting a high probe current (nA)............................................................................. 116

6.6.6.4. Optimising a high probe current (nA) .......................................................................... 118

6.6.6.5. Adjusting Beam Shift correction.................................................................................. 121

6.7. Using the help functions ............................................................................. 124

6.7.1. Calling the SmartSEM®help ............................................................................... 124

6.7.1.1. Printing help texts........................................................................................................ 124

6.7.1.2. Bringing help texts to the foreground .......................................................................... 124

6.7.2. Calling the context-sensitive help ........................................................................ 125

6.7.3. Searching for a topic ........................................................................................... 125

6.7.4. Using the step-by-step guides ............................................................................. 126

6.7.4.1. Getting started............................................................................................................. 126

6.7.4.2. Frequently used operation sequences........................................................................ 126

6.7.5. Calling the short cuts help ................................................................................... 127

6.7.6. Showing information about SmartSEM®............................................................. 128

6.7.6.1. Version history............................................................................................................. 128

6.7.6.2. About SmartSEM®....................................................................................................... 128

6.8. Closing the SmartSEM®user interface ...................................................... 129

6.8.1. Logging off ........................................................................................................... 129

6.8.2. Exiting .................................................................................................................. 129

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6.9. Switching off the workstation as a matter of routine ................................130

6.9.1. Changing to STANDBY mode ............................................................................. 130

6.9.2. Changing to OFF mode ....................................................................................... 131

6.10. Switching off in an emergency ..................................................................132

6.10.1. Switching on again after an emergency off ....................................................... 132

6.11. Switching off the workstation completely ................................................134

7. Maintenance and repair ...........................................................................135

7.1. Maintenance work .........................................................................................135

7.2. Maintenance intervals ..................................................................................135

7.3. Change of consumables and chemicals ....................................................136

8. Troubleshooting .......................................................................................137

8.1. Overview ........................................................................................................137

8.2. Chamber ........................................................................................................139

8.2.1. Initialising the stage ............................................................................................. 139

8.2.2. Replacing the chamber door seal ........................................................................ 139

8.3. Column ..........................................................................................................141

8.3.1. Baking ot the gun head ....................................................................................... 141

8.3.2. Ion source (Workstation with FIB) ....................................................................... 144

8.3.2.1. Checking the lifetime................................................................................................... 144

8.3.2.2. Regenerating by heating............................................................................................. 144

8.4. Power circuit .................................................................................................147

8.4.1. Checking the circuit breakers .............................................................................. 147

9. Shutdown and disposal ...........................................................................151

9.1. Putting the workstation out of operation ...................................................151

9.2. Disposal .........................................................................................................151

9.2.1. Disposing of solid waste (consumables) ............................................................. 151

9.2.2. Disposing of the workstation ................................................................................ 152

10. Parts and tools ........................................................................................153

10.1. Important consumables .............................................................................153

10.2. Important spare parts .................................................................................154

10.3. Tools and accessories ...............................................................................154

11. Abbreviations ..........................................................................................155

12. Glossary ..................................................................................................157

13. Declaration of conformity ......................................................................159

14. Index ........................................................................................................161

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1. About this manual

This instruction manual is considered to be part of the AURIGA®Compact workstation.

Read the instructions carefully. Keep the instruction manual nearby the workstation and hand it

over to future owners of the instrument.

This instruction manual is designed for users who have been trained to operate the workstation

by an authorised Carl Zeiss expert. Operators of the workstation must not deviate from the instruc-

tions provided in this document.

Reference to

documents

For detailed information regarding the operating software refer to

•Software Manual SmartSEM®for general information on FESEM operation (basic work-

station)

•Software Manual SmartSEM®XB for CrossBeam® specific topics (FIB and GIS upgrade)

For details on technical data refer to the documents Product Specification and Installation

Requirements.

For details on optional components of the workstation refer to the respective manuals delivered

with the workstation. You will find these manuals in the document folder.

At a glance This instruction manual contains the following chapters:

1. About this manual Explains function and structure of this instruction manual

2. Safety Summarises important safety details

3. Description Describes structure and principle of operation of the workstation

4. Transport and storage Gives details on transport and storage

5. Installation Refers to Carl Zeiss service staff

6. Operation Introduces fundamental operation procedures

7. Maintenance and repair Describes preventive maintenance and repair tasks

8. Troubleshooting Summarises clues to solve possible problems

9. Shutdown and disposal Summarises notes on shutdown and disposal

10. Parts and tools Lists consumables, spare parts, tools, and accessories

11. Abbreviations Alphabetical list of abbreviations used in this instruction manual

12. Glossary Alphabetical list of important technical terms

13. Declaration of conformity Important declaration

14. Index Alphabetical list of key words that are referred to in this instruction

manual

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1.1. Safety instructions in this manual

The safety instructions in this manual follow a system of risk levels, that are defined as follows:

DANGER

This safety symbol and signal word indicates an imminently hazardous situation.

Disregarding this warning WILL result in death or serious injury.

WARNING

This safety symbol and signal word indicates a potentially hazardous situation.

Disregarding this warning COULD result in death or serious injury.

CAUTION

This safety symbol and signal word indicates a potentially hazardous situation.

Disregarding this warning MAY result in minor or moderate injury.

CAUTION

This signal word used without a safety symbol indicates a potentially hazardous situation.

Disregarding this warning MAY result in property damage.

IMPORTANT

This symbol and signal word draws your attention to important and useful

information.

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1.2. Typographical conventions

For the description of software, the following typographical conventions are used:

Typography Meaning

Push <ENTER>. Push the ENTER key on the keyboard.

Type <key1, key2> Type key 1 first, then type key 2 on the keyboard.

Type <Ctrl + Alt + Del>. Simultaneously type CTRL key, ALT key and DEL

key on the keyboard.

Click the Magnification icon.

Select File/Exit from the menu. Icons, buttons, and menus are printed in bold.

Enter 10 kV in the EHT target field. Values to be selected are printed in italics.

Text Meaning

Click... Press the left mouse button.

Right-click... Press the right mouse button.

Double-click.... Press the left mouse button twice.

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1.3. Definition of terms

The following terms are used in this instruction manual:

This instruction manual refers to the operating software SmartSEM®V05.05.

Workstation The AURIGA®Compact CrossBeam® workstation, referred to as work-

station.

SmartSEM®Operating software for Carl Zeiss field emission scanning electron

microscopes

Operator A trained person, who is assigned to operate the workstation.

Basic operator:

Person who has been trained to perform fundamental operation

sequences

Specially trained operator:

Electrically skilled person who has been trained to perform basic main-

tenance tasks

User A person or organisation that uses products of Carl Zeiss.

Carl Zeiss service engineer,

Carl Zeiss service staff Specially trained service expert, either Carl Zeiss staff or authorised

service partner of Carl Zeiss.

EMO box Emergency off box; a safety device that contains the safety related

electronics to switch off the workstation (and connected options) com-

pletely in case of an emergency.

EMO button Emergency off button; to be pressed in an emergency to de-energize

the workstation completely.

FIB Focused ion beam

GEMINI®column Electron optical column

Canion column Type of FIB column

Coincidence point Point where electron beam and ion beam are crossed.

GIS Gas injection system (optional)

Several different types of available

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