Pfeiffer Vacuum OBC V4 User manual

Profinet

Bus Fault

LNKTX/RX

OPERATING INSTRUCTIONS

Original

PROFINET FOR OBCV4 AND OBCV5

Communication protocol - Turbomolecular pumps

2/24

Table of contents

1 About this manual 5

1.1 Validity 5

1.1.1 Applicable documents 5

1.1.2 Variants 5

1.2 Target group 5

1.3 Conventions 6

1.3.1 Instructions in the text 6

1.3.2 Pictographs 6

1.3.3 Labels 6

1.4 Trademark proof 6

2 Safety 7

2.1 General safety information 7

2.2 Safety instructions 7

2.3 Precautions 7

2.4 Intended use 8

2.5 Foreseeable misuse 8

3 Product description 9

3.1 Product identification 9

3.2 Man/machine interface 9

4 Installation 10

4.1 Configuration with GSDML file 10

5 Operation 11

5.1 LEDs Operation 11

5.2 Available functional elements 11

5.3 Used units 12

5.4 Physical Block 12

5.5 Assemblies 12

5.5.1 Generic Pump Assembly 13

5.5.2 Simple Turbomolecular Vacuum Pump Assembly 13

5.5.3 Speed Controlled Turbomolecular Vacuum Pump Assembly 15

5.6 Available Function Blocks 16

5.6.1 Generic Pump 16

5.6.2 Pump Activation 17

5.6.3 Pump Actuation 17

5.6.4 HeatingTMS 17

5.6.5 TargetSpeed 17

5.6.6 RatedSpeed 17

5.6.7 StandbySpeed 18

5.6.8 Acceleration 18

5.6.9 Deceleration 18

5.6.10NoRotation 18

5.6.11PumpStandByRequest 18

5.6.12PurgeValveRequest 18

5.6.13VentValveRequest 18

5.6.14ElectronicTemp 19

5.6.15MotorTemp 19

5.6.16DCLinkVoltage 19

5.6.17DCLinkCurrent 19

5.6.18DrivePower 19

5.6.19DriveTemp 19

5.6.20ErrorCode 19

5.7 Parameter channel 20

Table of contents

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5.7.1 Output (PLC → Pump) 20

5.7.2 Input (Pump → PLC) 20

5.7.3 Available Parameters 20

5.7.4 Examples 22

Table of contents

4/24

1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

These operating instructions are a customer document of Pfeiffer Vacuum. The operating instructions

describe the functions of the named product and provide the most important information for the safe use

of the device. The description is written in accordance with the valid directives. The information in these

operating instructions refers to the product's current development status. The document shall remain

valid provided that the customer does not make any changes to the product.

1.1.1 Applicable documents

Document Part number

OBCV4 Electronic Drive Unit Operating instructions 129285

ATH 1300 - 1600 M/MT Operating instructions 105677

ATH 1603 M - ATH 2303 M/MB Operating instructions 115101

ATH 2300 M/MT Operating instructions 108895

ATH 2804/3204 M/MT Operating instructions 121608

ATP 1603 M Operating instructions 127646

ATP 2300 M Operating instructions 112419

1.1.2 Variants

This operating instruction applies to the products with the following part numbers:

Part number Description

129353 OBC Electronic drive unit V4, equipped with Profinet™ control interface

- OBC Electronic drive unit V5, equipped with Profinet™ control interface

These products are used in conjunction with magnetically levitated turbomolecular pump models operat-

ed with :

●electronic drive unit (OBCV4) : ATH 1300 M (MZxxxxxx), ATH 1600 M (PZxxxxxx), ATH 1603 M

(YZxxxxxx), ATH 2300 M (QZxxxxxx), ATH 2303 M (TMBBGxxxxxxx), ATP 1603 M

(TMDBGxxxxxxx), ATP 2300 M (TZxxxxxx).

●electronic drive unit (OBCV5) : ATH 2804/3204 M (TMAAGxxxxxxx)

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

About this manual

5/24

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

Note

Tip

1.3.3 Labels

98 avenue de Brogny F-74000 ANNECY

In :

Out :

200-240 VAC 50/60 HZ 7 ARMS

0-69 V. 1300 HZ 11 A.

Cust. P/N : Rev. :

P/N : 124400

Made in France

Product identification label (example)

1.4 Trademark proof

●Profinet® is a registered trade name of Profibus Nutzerorganisation e.V. (Profibus user organiza-

tion).

About this manual

6/24

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Safety instructions

The potential risks and safety precautions of Profinet use (integrated on OBC V4 Electronic Drive Unit)

are described in Security chapter of the OBC V4 Electronic Drive Unit operating instructions.

Read the safety instructions (mandatory!) of the OBC V4 Electronic Drive Unit operating instruc-

tions.

Only qualified personnel trained in safety rules (EMC, electrical safety, chemical pollution) may carry out

the installation and maintenance described in this manual. Our service centers can provide the neces-

sary training.

2.3 Precautions

Duty to provide information on potential dangers

The product holder or user is obliged to make all operating personnel aware of dangers

posed by this product.

Every person who is involved in the installation, operation or maintenance of the product

must read, understand and adhere to the safety-related parts of this document.

Safety

7/24

Infringement of conformity due to modifications to the product

The Declaration of Conformity from the manufacturer is no longer valid if the operator

changes the original product or installs additional equipment.

●Following the installation into a system, the operator is required to check and re-evalu-

ate the conformity of the overall system in the context of the relevant European Direc-

tives, before commissioning that system.

Only qualified personnel trained in safety rules (EMC, electrical safety, chemical pollution) may carry out

the installation and maintenance described in this manual. Our service centers can provide the neces-

sary training.

►Do not loosen any plug connection during operations.

►Keep leads and cables well away from hot surfaces (> 70 °C).

2.4 Intended use

●Profinet fieldbus communication protocol is used to operate the Pfeiffer Vacuum magnetically levi-

tated turbomolecular pumps listed in chapter Variants.

●Profinet fieldbus communication protocol must be used in conjunction with the OBC V4 electronic

drive unit equipped with relevant control interface.

●When the turbomolecular pump is integrated with industrial host tool equipment, it becomes a

pumping component: the integrator of this component must provide the operator with all safety

measures, mainly against hot surfaces.

2.5 Foreseeable misuse

Misuse of the product automatically invalidates all warranty and liability claims. Any use that is counter

to the purpose of the product, whether intentional or unintentional, is regarded as misuse, in particular:

●operation with improper high levels of insulated heat input

●use of accessories or spare parts, which are not named in this manual

●operation in potentially explosive areas

●operation of the devices in areas with ionizing radiation

●operation in improper high magnetic fields

●use of the devices in systems in which impact-like stress and vibrations or periodic forces affect

the devices

Safety

8/24

3 Product description

3.1 Product identification

To correctly identify the product when communicating with our service center, always have the informa-

tion from the product rating plate available (see chapter "Labels").

3.2 Man/machine interface

68 7 4 35

1 2

SERVICE

RS 232/485

AC in

200-240VAC 50/60 Hz 7A

Profinet

Bus Fault

LNKTX/RXLNKTX/RX

Ref. Description

1 Indicator for Module status (green LED)

2 Indicator for Module status (red LED)

3 Indicator for LNK of Profinet port 2 (green LED)

4 Profinet M12 socket connector port 2

5 Indicator for TX/RX of Profinet port 2 (green LED)

6 Indicator for LNK of Profinet port 1 (yellow LED)

7 Profinet M12 socket connector port 1

8 Indicator for TX/RX of Profinet port 1 (yellow LED)

Profinet port 1 :

M12 socket (D coded) for connecting an incoming Profinet cable

Profinet port 2 :

M12 socket (D coded) for connecting a Profinet cable to the next device

Profinet connection : M12 female connectors (4) + (6)

2 3

Pin Assignment

1 TX+

2 RX+

3 TX+

4 RX-

Product description

9/24

4 Installation

4.1 Configuration with GSDML file

For the configuration of the Profinet, use the GSDML file (delivered on request).

Installation

10/24

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