Omega 3200 User manual

FMA 3200/3200ST/3400/3400ST Series

Thermal Mass Flow Controllers

M-4271/0707, pg. 3 of 26

READ THIS MANUAL COMPLETELY BEFORE ATTEMPTING TO CONNECT OR

OPERATE YOUR FLOW SENSOR. FAILURE TO DO SO MAY RESULT IN INJURY

TO YOU OR DAMAGE TO THE FLOW CONTROLLER.

TABLE OF CONTENTS

A. Introduction .............................................................................................4

1. Unpacking...........................................................................................4

2. Product Overview And Principle Of Operation ..........................................4

B. Installation...............................................................................................5

1. General Considerations.........................................................................5

2. Mounting The flow controller ...............................................................7

3. Tubing Connections ..............................................................................7

5. Electrical Connections ...........................................................................8

a) Overview ....................................................................................8

b) Connecting The 6 Pin Mini Din Connector............................................9

c) Connecting The 6 Pin Mini Din Connector & FMA 3000C Cable ...........10

d) Connections For The 9 Pin D Sub Connector ......................................11

e) Connections For The 15 Pin D Sub Connector..................................... 12

f) Using a 0-5VDC Output / Input Power Adapter Package....................... 13

C. Operation ............................................................................................. 14

1. Warm-Up .......................................................................................... 14

2. Verification Of Zero ............................................................................ 14

3. Flow Readings.................................................................................... 14

4. Changing The Flow Rate Set-Point (Using An External Voltage Source) ....... 15

5. Changing The Flow Rate Set-Point – FMA3400 / 3400ST Only................. 16

6. Power Save Mode............................................................................... 16

7. Zero Adjustments................................................................................ 17

8. Recalibration...................................................................................... 17

9. Changing The Calibration Gas – FMA3400 / 3400ST Only ..................... 17

D. Maintenance And Product Care ................................................................ 18

1. General............................................................................................. 18

2. Returning Units For Repair Or Recalibration............................................ 18

E. Specifications......................................................................................... 19

F. Dimensions............................................................................................ 20

G. Gas K Factors ........................................................................................ 22

H. Trouble Shooting Guide .......................................................................... 23

M-4271/0707, pg. 4 of 26

Introduction

1. Unpacking

All units are suitably packaged to prevent damage during shipping. If

external damage is noted upon receipt of the package, please contact

Omega Engineering immediately.

Open the package from the top, taking care not to cut too deeply into the

package. Remove all the documentation and contents. Take care to

remove all the items and check them against the packing slip. The

products should also be checked for any concealed shipping damage. If

any shortages or damage is noted, please contact Omega Engineering to

resolve the problem.

Typical Contents of Box: Controller, Calibration Certificate & Manual

FMA 3200/3200ST shown; FMA 3400/3400ST have an integrated display.

Caution: Take care not to

drop

your controller. Read the

installation section of this manual before providing power or

tubing connections to the unit. Any damage caused by improper

installation or careless handling will not be repaired under

warranty (see limited warranty on page 25 for more details).

2. Product Overview and Principle of Operation

The FMA 3200/3400 Series Mass Flow Controllers from Omega

Engineering are capable of measuring and controlling the flow of virtually

any clean, dry gas as low as 0-20 sccm or as high as 0-10 l/min.

Repeatable results are achieved using a patented thermal mass flow

M-4271/0707, pg. 5 of 26

sensor design. This proven design minimizes zero drift while maintaining

fast response and linear outputs with virtually no maintenance.

The FMA 3200/3400 Series

utilizes thermal flow sensing

technology. A portion of the

gas flowing through the unit is

redirected into a small sensor

tube. This tube has two coils

on the outside. The first coil

introduces a small amount of

heat into the gas stream. As

the gas passes through the

tube heat is transferred from

one coil to the other. The flow

rate is proportional to the

amount of heat transfer. Smart

electronics analyze the amount

of temperature change in the

second coil and provide a

linearized analog output. A patented system insures that the zero remains

stable and the sensor is extremely repeatable.

Flow in the FMA 3200/3400 Series is controlled by a proportional solenoid

valve with active servo electronics. The flow measurement signal is

analyzed by micro-processor controlled electronics and compared to a set-

point. Adjustments are then made to the valve in order to achieve the

required flow rate. The set point can be either externally input via a 0-

5VDC signal or in the case of the FMA 3400/3400ST Series it can be input

manually on the unit.

The output of the thermal mass flow sensor is directly related to the

specific heat characteristic of the gas being measured. A sensor is

calibrated for one gas but may be used with other gases by applying a

correction factor to the output. The calibration gas for each specific flow

controller is detailed on the product label.

Installation

Caution: Do not exceed the pressure, temperature or power

operating ranges detailed in the SPECIFICATIONS section of this

manual. Omega Engineering shall not be liable for any damage

or injury caused by incorrect operation of their products.

1. General Considerations

It is recommended that a safety shut-off valve be installed upstream

(before) of the controller.

All wetted parts should be checked for compatibility with the gas to be

used. If there are any incompatibilities eg. highly corrosive gas, then the

M-4271/0707, pg. 6 of 26

unit may be damaged or fail prematurely. Such damage will not be

repaired under warranty.

Units should be installed in a clean, dry environment with an ambient

temperature that is as stable as possible. Avoid areas with strong magnetic

fields, strong air flows or excessive vibration.

In order to operate the differential pressure across the controller should be

in the range 15-45psid (1-3 bar). For optimum performance a differential

pressure of 25psid is recommended.

For Example, consider the following system:

The differential pressure across the flow controller in this system would be

100 psi – 14 psi = 86 psid. Consequently the flow controller would NOT be

able to control flow. For the unit to operate at optimum performance the

supply pressure from the gas cylinder would need to be lowered to 39 psig

to give 39 psi -14 psi = 25 psid.

M-4271/0707, pg. 7 of 26

2. Mounting the Flow Controller.

The FMA 3200/3400 Series controllers have no particular orientation or

installation requirements so may be mounted in any convenient position.

It is recommended that units be fixed to a suitable substrate using the two

4-40 mounting holes provided.

Mounting View from Bottom

(mounting hardware not included with sensor)

3. Tubing Connections

All tubing must be clean, dry and purged with clean dry air before

installation of the FLO-CONTROLLER®.

If the gas to be used may contain particles then a filter (20 microns or

less) should be installed upstream of (before) the unit.

When connecting the sensor to the tubing, take care not to over-tighten

the fittings or leaking may occur.

Caution: Only use the fittings factory installed on the unit. If

the fittings are removed the calibration of the unit may be

effected and leaking may occur. If different fittings are required

please contact the Omega Engineering Customer Service

Department for assistance.

M-4271/0707, pg. 8 of 26

4. Electrical Connections

Caution: Incorrect wiring may cause severe damage to the unit.

Applying an AC voltage (115VAC or 230VAC) directly to the unit

will cause damage. Read the following instructions carefully

before making any connections.

a) Overview

The FMA 3200/3400 Series provides a 0-5VDC analog output proportional

to the flow rate. This output may be connected to a display, data

acquisition system or voltmeter with an impedance of greater than 2.5 kΩ

(kilo ohms).

The flow controller needs to be supplied with a 0-5 VDC set point signal to

enable control. On the FMA 3400/3400ST Series this may be generated

internally by altering the set-point potentiometer on the front panel of the

unit.

A stable D.C. power supply is required to operate the unit. The voltage

and current requirements depend on the configuration of the unit. Full

details may be found in the Specification section of this manual.

Connecting wires should be as short as possible to avoid voltage drops.

Twisted conductor cable should be used if the length of the wiring is to be

longer than 2 meters.

Units are supplied with either a 6 pin mini DIN type connector (requires

mating cable assembly), a 9 Pin D Sub connector or 15 Pin D Sub

connector.

Caution: Cutting off the integrated connectors on the unit IS

NOT RECOMMENDED and will void the product warranty. Mating

cables should be ordered along with each unit.

Electrical connections to the units are made as detailed in the following

sections.

M-4271/0707, pg. 9 of 26

b) Connecting The 6 Pin Mini Din Connector

Using a suitable mating connector the pins of the integrated connector

should be wired as follows:

Connecting To The Integrated 6 Pin Connector

Pin 2 should be connected to the Positive of the power source.

Pin 6 should be connected to the Negative (Ground) of the power source.

Pin 3 provides the signal output and should be connected to the positive

terminal of the display, data acquisition system or voltmeter.

Pin 1 is the signal negative (ground) and should be connected to the

negative (Ground) terminal of the display, data acquisition system or

voltmeter.

Pin 4 provides the input signal and should be connected to the positive

terminal of the voltage source. The (0-5VDC) voltage control signal should

be supplied from a low impedance source.

Pin 5 is the input signal negative (ground) and should be connected to

the negative (Ground) terminal of the voltage source.

Caution: Avoid high voltage static discharges to the input signal

connection. Do not short the input/output signal wires or allow

them to contact the power wires at any time. DAMAGE WILL

RESULT!

Pin Out of Integrated

Connector

M-4271/0707, pg. 10 of 26

c) Connecting The 6 Pin Mini Din Connector & FMA 3000C Cable

The two mating connectors should be pushed together and the pigtail

leads wired as follows:

Connecting To The Integrated 6 Pin Connector Using A FMA 3000C Cable

The RED wire should be connected to the Positive of the power source.

The BLACK wire should be connected to the Negative (Ground) of the

power source.

The ORANGE wire provides the signal output and should be connected to

the positive terminal of the display, data acquisition system or voltmeter.

The BROWN wire is the signal negative (ground) and should be

connected to the negative (Ground) terminal of the display, data

acquisition system or voltmeter.

The YELLOW wire provides the input signal and should be connected to

the positive terminal of the voltage source. The (0-5VDC) voltage control

signal should be supplied from a low impedance source.

The GREEN wire is the input signal negative (ground) and should be

connected to the negative (Ground) terminal of the voltage source.

The wire colors above describe the pigtail leads of the FMA 3000C cable

assembly and may not correspond with the internal wiring of your flow

sensor.

Caution: Avoid high voltage static discharges to the input signal

connection. Do not short the input/output signal wires or allow

them to contact the power wires at any time. DAMAGE WILL

RESULT!

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