Olympus Lext OLS3100 User manual

The name "LEXT" is formed from the words "Laser" and "Next," and means "next-generation 3D confocal laser microscopes".

CONFOCAL LASER SCANNING

MICROSCOPE

OLS3100

NEW

Greater simplicity with higher precision:

The next step in the evolution of three dimensional

laser confocal metrology.

LEXT minimizes manual operation, improving ease of use for everyone.

Even a first-time user can operate the system like an expert, and obtain fast reliable measurement results.

The system features not only improved functionality, but also an even higher level of measurement performance.

Constantly evolving toward greater simplicity and higher precision,

LEXT meets a diverse range of needs in fine surface profile measurement.

Welcome to the world of LEXT 3D

Automatic operation achieves speedy, high-precision output.

Position and

magnification settings

New, Operation Navigator feature is an online wizard

that guides the user in the operation of the LEXT

The operation navigator provides

animations to guide the user through

each step of microscopic observation.

You can complete a series of steps by

simply operating the mouse in the same

way as shown in the animations

appearing on the screen.

The motorized, high-speed revolving nosepiece ensures

the safe and speedy microscopic inspections

Motorized switching between magnifications helps the user to

increase work efficiency and to keep the specimen safe; an

automatic retracting function prevents an objective lens from

coming contact with a specimen. It also

offers excellent parfocality of all

objective lenses and an automatic light

intensity adjusting function keeps

brightness levels unchanged after

magnification switching.

High-speed automatic focusing and one-push gain

enable the user to complete preparations for 3D image

capturing quickly and easily

The speed of the automatic focusing function has been made

three times faster so that the user can reach an image or a point

on an image in an instant. Additionally, one-push gain allows the

user to adjust brightness optimally and to complete preparations

for 3D image capturing with ease.

Click

3D image capturing with one click automatically

detecting upper and lower limits

With LEXT, 3D image capturing is performed by just one click of

the “3D capture button.” Upper- and lower-limit settings or other

cumbersome preparations are unnecessary. A beginner can

obtain a 3D image of the best quality easily. For experienced

users, this automated 3D image capturing feature lightens their

work load and contributes greatly to increasing their work

efficiency.

Auto Fine View does it all automatically

The brightness and contrast of a captured image are automatical-

ly adjusted. Image conditioning is typically a manual process

requiring an experienced operator. Using the auto fine view

function of LEXT, anybody can acquire ideal, high-quality 3D

images without special training.

Introducing the user to a new 3D world

by providing a variety of image presentation

patterns, high precision measurement and

advanced analytical techniques

A captured image is rendered to an ideal 3D image by

using LEXT’s display capabilities. High precise

measurement, high repeatability, and advanced analytical

techniques related to roughness and particle analyses

provide the user with a new dimension of microscopic

observation.

Welcome to the world of LEXT 3D

Display, measurement and

analysis

Image

capturing

Wired frame

Microlens

Image intensity

profile

Step height

measurement

Surface

roughness

analysis

After auto

processing

Before

processing

Wafer bump

Powerful 3D display facilitates measurement and analysis.

● Adjustable 3D image

The angle of a 3D image can be now changed freely

with the mouse by grabbing the image. In addition,

the 3D image can be scaled up or down in 100 steps

using the mouse wheel. This is done using a unique

algorithm to prevent the quality of the enlarged image

from deteriorating. The background color can now

also be changed to improve the observation and

contrast of the specimen.

● 3D measurement

Step height, line width and the distance between two

points can now be measured on the 3D image.

Allowing measurement conditions to be recognized

intuitively.

Display

Measurement

Step height measurement

Line width measurement

Distance between two points measurement

Filamentation electrode

● A variety of 3D image presentation patterns

A variety of 3D image presentation patterns are provided,

including surface texture, real color, wired frame, etc. A 3D image

can be rendered to make it more visually effective.

● Surface roughness analysis

Non-contact surface roughness measurement can be gathered

using the small laser spot. Further minute roughness analysis can

be made using the unique ROI function. Roughness can also be

made along a single line much like conventional roughness

gauges.

Welcome to the world of LEXT 3D

Analysis

Toner film

Surface

Surface 1

Corny layer cells

Reverse face of a Si wafer

Texture

Surface 2

Wired frame

Texture

Real color (brightfield observation)

Stud bump

Surface

Perspective

Balance perspective

Surface roughness

analysis

Light guide plate (for LCD)

Versatile observation methods to handle a wide range of applic

● Brightfield observation

Color information can be obtained from brightfield (color)

observation. Therefore, brightfield observation can be used

effectively to observe a flaw on a color filter or to locate the

position of an area of corrosion on metal.

● DIC (Differential Interference Contrast) observation

In DIC observation, it is possible to observe a scratch or flaw as

small as a few nanometers in height that could not be observed in

a brightfield observation.

● Laser confocal

Observation with a much higher level of resolution impracticable

with conventional microscopes is now possible through a

combination of a 408 nm laser and confocal optics.

● Laser confocal DIC

Microscopic unevenness on a surface can be observed in three

dimensions in real time, which is impossible with conventional

laser microscopes. Observation of surface conditions with the

level of dimensional reality comparable to that of an SEM has

been made fully possible, opening up a new dimension in surface

profile observation.

Display

Laser printer toner

Reverse face of a wafer

Circuits patterns on wafer

Polymeric film

Non confocal image

Confocal image

ations.

Welcome to the world of LEXT 3D

● Real-time distance measurement

A distance can be measured in real time by using image intensity

profile. A distance can be measured in live observation.

● Particle analysis

Particles can be automatically separated using the separator

function, threshold values can be set, and the range of detection

can be specified. Automatic measurement of all particles can be

made using various particle measurement parameters, and

measured data can be statistically processed to support

advanced particle analyses.

● Split screen display

An image observed in one observation mode and the same image

observed in another observation mode can be displayed

simultaneously during live observation. A target point can be

located easily by observing a microscopic image with color

information and a high-resolution LSM (Laser Scanning

Microscope) image simultaneously. By using this two-screen

display function, the quality of a specimen can be checked by

comparing it with a reference specimen in live observation, and

whether it is acceptable or not can be determined.

Measurement

Analysis

Stud bump

Test patterns (Chromium)

Corny layer cells

World-class resolution and precision.

Objective lens

Circular confocal

pinhole

LED light

CCD

Photomultiplier

Laser

● World’s highest level of resolution

The optical system designed exclusively for use with 408-nm

laser light (violet opt system) prevents the occurrence of

aberrations associated with the use of a short-wavelength light

source, and brings the highest performance out of the 408-nm

light source. Such a high level of resolution has been made

possible by the confocal optical system having an optimized

circular pinhole and the high-

speed XY scanner with the

MEMS technology of Olympus.

With the world's highest-level

planar resolution, a line or space

of 0.12 µm can be resolved.

Additionally, the 0.01 µm height

resolution supports the user in

undertaking measurements of

microscopic surface profiles.

Basic concept of a light path in the violet opt system

Basic concept of the two-dimensional scanner

Multiple points

at peak

intensity

Intensity

Height

MEMS scanner

Incident light

Scan pattern

0.12 µm line and space 14,400x

● Further advanced, the world’s highest level of

repeatability

Advanced optical techniques of Olympus accumulated over

years have made possible the planar measurement

repeatability of 3σ= 0.02 µm and the height measurement

repeatability of 3σ= 0.04 + 0.002L mm (L = measured length

in µm). A guide with high performance in terms of straightness

and a high-precision linear scale are used for Z-axis scanning.

These parts combined with the further advanced CFO search

function contribute to very high level of repeatability. The high

degree of reliability makes it possible for LEXT to meet the

highly demanding needs of diverse fields of research and

industry.

● Measurements that can be trusted

Highly reliable data can be provided based on the strict

traceability system that is linked with the JCSS (Japan

Calibration Service System). JCSS Japan Calibration Service System

Block Gauge

OLYMPUS

Stabilized He-Ne Laser

Calibration standard Calibration block

LEXT (OLS3100)

Traceability chart

Japan (NMIJ/AIST)

CFO search function

The original I-Z curve is

drawn based on the upper,

high-luminance points, and

maximum luminance values

are calculated with high

accuracy by using an

advanced formula. The high

repeatability of LEXT is

made possible through the

height data being obtained

in this process.

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