Pfeiffer Vacuum PMP06021 User manual

OPERATING INSTRUCTIONS

Translation of the Original

HIPACE 1200

Turbopump

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to

support you by its performance, its perfect operation and without interfering your individual

application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. With this

expertise, we have acquired a multitude of skills contributing to an efficient and secure

implementation of our product.

Knowing that our product must not interfere with your actual work, we are convinced that our

product offers you the solution that supports you in the effective and trouble-free execution of

your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/74

Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Variants 7

1.2 Target group 7

1.3 Conventions 8

1.3.1 Instructions in the text 8

1.3.2 Pictographs 8

1.3.3 Stickers on the product 8

1.3.4 Abbreviations 9

1.4 Trademark proof 10

2 Safety 11

2.1 General safety information 11

2.2 Safety instructions 11

2.3 Safety precautions 16

2.4 Limits of use of the product 17

2.5 Proper use 17

2.6 Foreseeable improper use 17

2.7 Personnel qualification 18

2.7.1 Ensuring personnel qualification 18

2.7.2 Personnel qualification for maintenance and repair 18

2.7.3 Advanced training with Pfeiffer Vacuum 19

3 Product description 20

3.1 Function 20

3.1.1 Cooling 20

3.1.2 Rotor bearing 20

3.1.3 Drive 20

3.2 Scope of delivery 20

3.3 Identifying the product 21

3.3.1 Product types 21

3.3.2 Product features 21

4 Transportation and Storage 22

4.1 Transport 22

4.1.1 Transport in vertical position 22

4.1.2 Transport in horizontal space 23

4.2 Storage 24

5 Installation 25

5.1 Preparatory work 25

5.2 Connecting the high vacuum side 26

5.2.1 Requirements for the dimensioning of a counter flange 26

5.2.2 Considering earthquake protection 26

5.2.3 Using a splinter shield or protective screen 27

5.2.4 Using the vibration compensator 27

5.2.5 Mounting orientations 28

5.2.6 Attaching ISO-K flange onto ISO-K 29

5.2.7 Attaching ISO-K flange to ISO-F 29

5.2.8 Attaching ISO-F flange to ISO-F 31

5.2.9 Attaching CF flange to CF-F 32

5.3 Filling the operating fluid 34

5.4 Connecting the fore-vacuum side 35

5.5 Connecting the cooling water supply 36

5.6 Connecting accessories 37

Table of contents

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5.7 Connecting sealing gas 38

5.8 Connecting the electrical supply 38

5.8.1 Implement electrical safety measures 38

5.8.2 Grounding the vacuum pump 39

5.8.3 Establishing the electric connection 39

6 Operation 41

6.1 Commissioning 41

6.2 Operating modes 42

6.2.1 Operation without operating unit 42

6.2.2 Operation via connection "E74" 42

6.2.3 Operation via multi-function connection "remote" 42

6.2.4 Operation via Pfeiffer Vacuum display and control unit 42

6.2.5 Operation via field bus 42

6.3 Switching on the turbopump 43

6.4 Operation monitoring 43

6.4.1 Operating mode display via LED 43

6.4.2 Temperature monitoring 44

6.5 Switching off and venting 44

6.5.1 Switching off 44

6.5.2 Venting 44

7 Maintenance 46

7.1 General maintenance information 46

7.2 Maintenance intervals and responsibilities 46

7.3 Changing the operating fluid 47

7.3.1 Draining the operating fluid 47

7.3.2 Filling the operating fluid 48

7.4 Replacing the electronic drive unit 49

7.4.1 Removing electronic drive unit 50

7.4.2 Installing the electronic drive unit 51

7.4.3 Confirming the speed specification 52

8 Decommissioning 53

8.1 Stillsetzen für längere Zeit 53

8.2 Recommissioning 53

9 Recycling and disposal 55

9.1 General disposal information 55

9.2 Dispose of turbopumps 55

10 Malfunctions 56

11 Service solutions by Pfeiffer Vacuum 58

12 Spare parts 60

13 Accessories 61

13.1 Accessory information 61

13.2 Ordering accessories 61

14 Technical data and dimensions 64

14.1 General 64

14.2 Technical data 64

14.3 Dimensions 70

Declaration of conformity 72

Table of contents

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List of tables

Tbl. 1: Stickers on the product 9

Tbl. 2: Abbreviations used in this document 10

Tbl. 3: Permissible ambient conditions 17

Tbl. 4: Product designation of Pfeiffer Vacuum HiPace turbopumps 21

Tbl. 5: Turbopump features 21

Tbl. 6: Delivered drive power depending on the supplied mains voltage 21

Tbl. 7: Requirements for the dimensioning of customer-specific high vacuum con-

nection

Tbl. 8: Behavior of pumping speed when using a splinter shield or protective screen 27

Tbl. 9: Requirements on the cooling water composition 36

Tbl. 10: Requirements on the cooling water connection 36

Tbl. 11: Factory pre-set accessory connections on the electronic drive unit 37

Tbl. 12: Terminal lay-out of the power supply connector 40

Tbl. 13: Preconfigured settings for turbopumps when delivered 41

Tbl. 14: Behavior and meaning of the LEDs on the electronic drive unit 44

Tbl. 15: Factory settings for delayed venting in turbopumps 45

Tbl. 16: Characteristic nominal rotation speeds of the turbopumps 52

Tbl. 17: Troubleshooting turbopumps 57

Tbl. 18: Available spare parts 60

Tbl. 19: Accessories 63

Tbl. 20: Conversion table: Pressure units 64

Tbl. 21: Conversion table: Units for gas throughput 64

Tbl. 22: Technical data for HiPace 1200 Standard 66

Tbl. 23: Technical data for HiPace 1200 U 67

Tbl. 24: Technical data for HiPace 1200 C 68

Tbl. 25: Technical data for HiPace 1200 UC 69

List of tables

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List of figures

Fig. 1: Position of the labels on the product 9

Fig. 2: Design HiPace 1200 standard and U version 20

Fig. 3: Slinging points for vertical transport of the turbopump without packaging 23

Fig. 4: Slinging points for horizontal transport of the turbopump without packaging 24

Fig. 5: Example: Secure against displacement and tipping caused by external vi-

brations

Fig. 6: Mounting orientations of the standard version, upright 28

Fig. 7: Mounting orientations of the U version, overhead 28

Fig. 8: Alignment of the fore-vacuum connection with horizontal mounting orienta-

tion

Fig. 9: Flange connection ISO-K to ISO-F, bracket screws 29

Fig. 10: Flange connection ISO-K to ISO-F, hexagon head screw and tapped hole 30

Fig. 11: Flange connection ISO-K to ISO-F, stud screw and tapped hole 30

Fig. 12: Flange connection ISO-K to ISO-F, stud screw and through hole 30

Fig. 13: Flange connection ISO-F, hexagon head screw and tapped hole 31

Fig. 14: Flange connection ISO-F, hexagon head screw and through hole 31

Fig. 15: Flange connection ISO-F, stud screw and tapped hole 31

Fig. 16: Flange connection ISO-F, stud screw and through hole 32

Fig. 17: Flange connection CF-F, hexagon head screw and through hole 32

Fig. 18: Flange connection CF-F, stud screw and tapped hole 33

Fig. 19: Flange connection CF-F, stud screw and through hole 33

Fig. 20: The position of the filler screws depends on the mounting orientation. Exam-

ple: Standard versions

Fig. 21: The position of the filler screws depends on the mounting orientation. Exam-

ple: U versions

Fig. 22: Example of fore-vacuum connection 35

Fig. 23: Cooling water connection 37

Fig. 24: Example: Connecting the grounding cable 39

Fig. 25: Examples: Draining operating fluid for the standard and U versions 47

Fig. 26: The position of the filler screws depends on the mounting orientation. Exam-

ple: Standard versions

Fig. 27: The position of the filler screws depends on the mounting orientation. Exam-

ple: U versions

Fig. 28: Removing the electronic drive unit 50

Fig. 29: Fitting the electronic drive unit 51

Fig. 30: Attaching the electronic drive unit 51

Fig. 31: Spare parts HiPace 1200 60

Fig. 32: Dimensions HiPace 1200 and HiPace 1200 C | DN 200 ISO-K 70

Fig. 33: Dimensions HiPace 1200 and HiPace 1200 C | DN 200 ISO-F 70

Fig. 34: Dimensions HiPace 1200 and HiPace 1200 C | DN 200 CF-F 70

Fig. 35: Dimensions HiPace 1200 U and HiPace 1200 U C | DN 200 ISO-K 71

Fig. 36: Dimensions HiPace 1200 U and HiPace 1200 U C | DN 200 ISO-F 71

Fig. 37: Dimensions HiPace 1200 U and HiPace 1200 U C | DN 200 CF-F 71

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-

scribe the functions of the named product and provide the most important information for the safe use of

the device. The description is written in accordance with the valid directives. The information in this op-

erating instructions refers to the product's current development status. The document shall remain valid

provided that the customer does not make any changes to the product.

1.1.1 Applicable documents

Document Number

Operating instructions, Electronic drive unit TC 1200, standard PT 0239 BN

Operating instructions, Electronic drive unit TC 1200 PB, Profibus PT 0269 BN

Operating instructions, Electronic drive unit TC 1200 E74, according to

Semi E74

PT 0303 BN

Operating instructions, Electronic drive unit TC 1200 DN, DeviceNet PT 0353 BN

Operating instructions, Electronic drive unit TC 1200 EC, EtherCat PT 0455 BN

Declaration of conformity A component of these in-

structions

You can find these documents in the Pfeiffer Vacuum Download Center.

1.1.2 Variants

●HiPace 1200, DN 200 ISO-K

●HiPace 1200, DN 200 ISO-F

●HiPace 1200, DN 200 CF-F

●HiPace 1200 C, DN 200 ISO-K

●HiPace 1200 C, DN 200 ISO-F

●HiPace 1200 C, DN 200 CF-F

●HiPace 1200 U, DN 200 ISO-K

●HiPace 1200 U, DN 200 ISO-F

●HiPace 1200 U, DN 200 CF-F

●HiPace 1200 U C, DN 200 ISO-K

●HiPace 1200 U C, DN 200 ISO-F

●HiPace 1200 U C, DN 200 CF-F

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

About this manual

7/74

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

Note

Tip

1.3.3 Stickers on the product

This section describes all the stickers on the product along with their meaning.

C US

T V Rheinland

Oil

S/N

Mod.

HiPace 1200

PM P06 000

- - - - - - - -

P/N

n, f

Mass Made in Germany 2019/06

PM 006 336 -T

37800 1/min, 630 Hz

30.0 kg

D-35614 Asslar

Rating plate

Rating plates of individual assemblies are located on the lower

part of the turbopump or on the relevant attachments.

Operating instructions note

This sticker indicates that this operating instructions must be read

before performing any tasks.

Mounting orientation upright note

This sticker depends on the variant. The sticker shows the valid

spatial positions for the installation and operation of the turbo-

pump.

Overhead mounting orientation note

This sticker depends on the variant. The sticker shows the valid

spatial positions for the installation and operation of the turbo-

pump.

About this manual

8/74

Operating fluid filler screw

This sticker describes the position of the respective filler screw for

operating fluid.

Protection class

This sticker describes protection class 1 for the product. The posi-

tioning indicates the position for the ground connection.

COOLING WATER IN

max. 6 bar (90 psi)

Cooling water connection

This sticker indicates the position and conditions for the cooling

water supply of the turbopump.

COOLING WATER OUT

Cooling water connection

This sticker indicates the position for the cooling water outlet of the

turbopump.

warranty seal

Closure seal

The product is sealed ex-factory. Damaging or removing a closure

seal results in loss of the warranty.

Is stuck on concealed underneath the electronic drive unit.

PURGE

Sealing gas connection note

This label describes the position for the exclusive sealing gas con-

nection.

Tbl. 1: Stickers on the product

678910 5234

Fig. 1: Position of the labels on the product

1 Label for operating instructions 6 Label for operating fluid

2 Label for cooling water outlet 7 Label for sealing gas connection (purge)

3 Label for cooling water inlet 8 Label for ground terminal

4 Label for mounting orientation 9 Electronic drive unit type plate

5 Label for operating instructions 10 Turbopump type plate

1.3.4 Abbreviations

Abbreviation Meaning in this document

AC Alternating current (AC)

CCorrosive gas version

About this manual

9/74

Abbreviation Meaning in this document

dDiameter value (in mm)

DCU Display Control Unit (Pfeiffer Vacuum display and control unit).

DN Nominal diameter as size description

EMS Emergency Stop

fRotation speed value of a vacuum pump (frequency, in rpm or Hz)

HPU Handheld Programming Unit. Aid for control and monitoring pump parameters

HV High vacuum flange, high vacuum side

ISO Flange: Connector in accordance with ISO 1609 and ISO 2861

LED Light emitting diode

PE Earthed conductor (protective earth)

[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in

square brackets. Frequently displayed in conjunction with a short description.

Example: [P:312] software version

remote 26-pole D-Sub connecting socket on the turbopump electronic drive unit

WAF width across flats

TTemperature (in °C)

TC Turbo Controller

UUpside-down version

VV Fore-vacuum flange, fore-vacuum connection

Tbl. 2: Abbreviations used in this document

1.4 Trademark proof

●DeviceNet® is a tademark of Open DeviceNet Vendor Association Inc.

●Profibus® is a trademark of Profibus Nutzerorganisation e.V.

●EtherCAT® is a trademark of Beckhoff Automation GmbH, Germany

●HAN® 3 A is a trademark of HARTING Electric GmbH & Co. KG.

About this manual

10/74

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