Pfeiffer Vacuum HISCROLL 6 User manual

OPERATING INSTRUCTIONS

Translation of the Original

HISCROLL 6 | 12 | 18

Scroll pump with integrated pressure sensor

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new scroll pump is designed to

support you with its performance, perfect operation and without impacting your individual

application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. From this

extensive, practical experience we have gained a large volume of information that can

contribute to efficient deployment and to your personal safety.

In the knowledge that our product must avoid consuming work output, we trust that our

product can offer you a solution that supports you in the effective and trouble-free

implementation of your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/80

Table of contents

1 About this manual 8

1.1 Validity 8

1.1.1 Applicable documents 8

1.1.2 Variants 8

1.2 Target group 8

1.3 Conventions 8

1.3.1 Pictographs 8

1.3.2 Instructions in the text 9

1.3.3 Stickers on the product 9

1.3.4 Abbreviations 11

2 Safety 12

2.1 General safety information 12

2.2 Safety instructions 12

2.3 Safety precautions 16

2.4 Limits of use of the product 16

2.5 Proper use 17

2.6 Foreseeable improper use 17

2.7 Personnel qualification 17

2.7.1 Ensuring personnel qualification 18

2.7.2 Personnel qualification for maintenance and repair 18

2.7.3 Advanced training with Pfeiffer Vacuum 18

3 Product description 19

3.1 Function 19

3.1.1 Drive 20

3.1.2 Cooling 20

3.1.3 Shaft bearing 20

3.1.4 Gas ballast 20

3.1.5 Pressure sensor 20

3.2 Connections 21

3.3 Identifying the product 21

3.4 Product features 21

3.5 Scope of delivery 21

4 Transportation and Storage 22

4.1 Transporting vacuum pump 22

4.2 Storing the vacuum pump 23

5 Installation 24

5.1 Set up the vacuum pump 24

5.2 Connecting vacuum side 24

5.3 Connecting the exhaust side 25

5.4 Connecting gas ballast external supply 26

5.5 Connecting to mains power supply 27

6 Interfaces 29

6.1 Interface overview 29

6.2 "Remote" interface 29

6.2.1 Inputs 30

6.2.2 Outputs 30

6.2.3 RS-485 31

6.3 Connecting control unit 31

6.4 Using RS-485 interface 31

6.5 Pfeiffer Vacuum protocol for RS-485 interface 32

6.5.1 Telegram frame 32

6.5.2 Telegram description 33

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6.5.3 Telegram example 1 33

6.5.4 Telegram example 2 33

6.5.5 Data types 34

7 Parameter set 35

7.1 General 35

7.2 Control commands 35

7.3 Status requests 37

7.4 Reference value inputs 37

8 Operation 39

8.1 Putting the vacuum pump into operation 39

8.2 Switch vacuum pump on 39

8.3 Configuring the connections with the Pfeiffer Vacuum parameter set 39

8.3.1 Configuring the digital outputs 39

8.3.2 Configuring the digital input 40

8.3.3 Selecting the interfaces 40

8.3.4 Configuring accessories 40

8.4 Selecting operating mode 41

8.5 Speed modes 41

8.5.1 Normal operation 42

8.5.2 Standby mode 42

8.5.3 Speed actuator operation 42

8.5.4 Auto boost 43

8.5.5 Auto standby 43

8.6 Pressure regulation operation 43

8.7 Determining effective pressure with calibration factors 44

8.8 Operation with gas ballast 45

8.8.1 Controlling gas ballast valve with a pressure sensor 46

8.8.2 Controlling gas ballast valve without a pressure sensor 47

8.9 Operating mode display via LED 48

8.10 Switching off vacuum pump 48

9 Maintenance 49

9.1 Maintenance information 49

9.2 Checklist for inspection and maintenance 49

9.3 Replacing the non-return valve on the exhaust side 50

9.3.1 Removing the non-return valve 51

9.3.2 Installing the non-return valve 51

9.4 Replacing the gas ballast valve 52

9.4.1 Removing gas ballast valve 52

9.4.2 Installing gas ballast valve 53

9.5 Changing the tip seal 54

9.5.1 Disassembling the spiral housing 54

9.5.2 Replacing the tip seal 56

9.5.3 Assembling the pump housing 58

9.6 Final inspection 59

10 Decommissioning 60

10.1 Shutting down for longer periods 60

10.2 Recommissioning 60

11 Recycling and disposal 61

11.1 General disposal information 61

11.2 Disposing of the scroll pump 61

12 Malfunctions 62

12.1 General 62

12.2 Error codes 63

12.3 Warning and malfunction messages when operating with control units 64

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13 Service solutions by Pfeiffer Vacuum 66

14 Spare parts 68

15 Accessories 70

15.1 Accessory information 70

15.2 Ordering accessories 70

16 Technical data and dimensions 72

16.1 General 72

16.2 Technical data 72

16.3 Substances in contact with the media 75

16.4 Dimensions 76

Declaration of Conformity 78

UK Declaration of Conformity 79

Table of contents

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List of tables

Tbl. 1: Abbreviations used 11

Tbl. 2: Permissible ambient conditions 17

Tbl. 3: Interfaces of the electronic drive unit 21

Tbl. 4: Features of scroll pumps 21

Tbl. 5: Connection assignment of 15-pin "remote" connection 30

Tbl. 6: Features of the RS-485 interface 31

Tbl. 7: Explanation and meaning of the parameters 35

Tbl. 8: Control commands 36

Tbl. 9: Status requests 37

Tbl. 10: Reference value inputs 38

Tbl. 11: Configure parameters [P:019] and [P:024] 40

Tbl. 12: Configure parameter [P:063] 40

Tbl. 13: Parameter [P:060] 40

Tbl. 14: Calibration factors for the pressure range < 1 hPa 44

Tbl. 15: HiScroll gas ballast valve switch settings 46

Tbl. 16: Behavior and meaning of the LEDS of the electronic drive unit 48

Tbl. 17: Behavior and meaning of the LED standby 48

Tbl. 18: Maintenance intervals 50

Tbl. 19: Troubleshooting with scroll pumps 63

Tbl. 20: Error messages of the electronic drive unit 64

Tbl. 21: Warning messages of the electronic drive unit 64

Tbl. 22: Warning and malfunction messages 65

Tbl. 23: Spare part package 68

Tbl. 24: Spare part package 69

Tbl. 25: Accessories for HiScroll 71

Tbl. 26: Conversion table: Pressure units 72

Tbl. 27: Conversion table: Units for gas throughput 72

Tbl. 28: Technical data for HiScroll 6 73

Tbl. 29: Technical data for HiScroll 12 74

Tbl. 30: Technical data for HiScroll 18 75

Tbl. 31: Materials that make contact with the process media 75

List of tables

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List of figures

Fig. 1: Position of the stickers on the product 10

Fig. 2: Schematic compression cycle of scroll pumps 19

Fig. 3: HiScroll design, version with pressure sensor 20

Fig. 4: Slinging points for transport of the scroll pump 22

Fig. 5: Minimum clearances and permissible inclination 24

Fig. 6: Example of vacuum connection 25

Fig. 7: Example of exhaust connection 26

Fig. 8: Connecting gas ballast external supply 27

Fig. 9: Connecting to mains power supply 28

Fig. 10: Interfaces of the electronic drive unit 29

Fig. 11: Connection diagram of 15-pin "remote" connection 29

Fig. 12: Connecting a control unit via the "remote" connection 31

Fig. 13: Cross-link via connection RS-485 using connection cables and accessories 32

Fig. 14: Accessory connector assignment 41

Fig. 15: Speed modes 42

Fig. 16: Displayed pressure 45

Fig. 17: Pressure-dependent gas ballast valve control in automatic mode 47

Fig. 18: Gas ballast valve control in automatic mode 47

Fig. 19: Removing valve 51

Fig. 20: Installing valve 51

Fig. 21: Removing gas ballast valve 52

Fig. 22: Removing gas ballast valve 53

Fig. 23: Assemble gas ballast valve 53

Fig. 24: Installing gas ballast valve 54

Fig. 25: Loosening the fan cover on the scroll pump 55

Fig. 26: Removing the fan cover from the scroll pump 55

Fig. 27: Removing the scroll pump spiral housing 56

Fig. 28: Replacing the tip seal on the scroll pump 57

Fig. 29: Tip seal nut in the spiral housing 57

Fig. 30: Assembling the housing parts 58

Fig. 31: HiScroll maintenance kit 1 68

Fig. 32: HiScroll valve set 69

Fig. 33: HiScroll 6 | Version with pressure sensor 76

Fig. 34: HiScroll 12 | HiScroll 18 | Version with pressure sensor 77

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-

scribe the functions of the named product and provide the most important information for the safe use of

the device. The description is written in accordance with the valid directives. The information in this op-

erating instructions refers to the product's current development status. The document shall remain valid

provided that the customer does not make any changes to the product.

1.1.1 Applicable documents

Document Number

Operating instructions for gas ballast valve, automated PU 0104 BN

Declaration of conformity A component of these instructions

You can find this document in the Pfeiffer Vacuum Download Center.

1.1.2 Variants

●HiScroll 6, Scroll pump, with pressure sensor

●HiScroll 6, Scroll pump, with pressure sensor, without GB

●HiScroll 6, scroll pump, with pressure sensor and automated GB

●HiScroll 12, Scroll pump, with pressure sensor

●HiScroll 12, Scroll pump, with pressure sensor, without GB

●HiScroll 12, scroll pump, with pressure sensor and automated GB

●HiScroll 18, Scroll pump, with pressure sensor

●HiScroll 18, Scroll pump, with pressure sensor, without GB

●HiScroll 18, scroll pump, with pressure sensor and automated GB

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

1.3 Conventions

1.3.1 Pictographs

Pictographs used in the document indicate useful information.

About this manual

8/80

Note

Tip

1.3.2 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.3 Stickers on the product

This section describes all the stickers on the product along with their meanings.

C US

TÜV Rheinland

UL/CSA 61010-1

IP20

Mod. HiScroll 6

P/N PD S10 010

S/N - - - - - - - -

Made in Germany 2022/07

S(N2)max. 6.1 m3/h

Mass 19 kg

nmax. 3000 1/min

100-127 VAC ±10% 50/60 Hz 4.0 A

200-240 VAC ±10% 50/60 Hz 2.0 A

SCCR: 500 A @ 250 VAC,

10 kA @ 125 VAC

D-35614 Asslar Berliner Str. 43

Rating plate

The rating plate is located clearly visible on a longitudinal side of

the vacuum pump.

C US

TÜV Rheinland

Mod. HiScroll 12

P/N PD S20 010

S/N - - - - - - - -

Made in Germany 2022/07

S(N2)max. 12.1 m3/h

Mass 24 kg

nmax. 1870 1/min

100-127 VAC ±10% 50/60 Hz 8.0 A

200-240 VAC ±10% 50/60 Hz 4.0 A

SCCR: 500 A @ 250 VAC,

10 kA @ 125 VAC

D-35614 Asslar Berliner Str. 43

UL/CSA 61010-1

IP20

Rating plate

The rating plate is located clearly visible on a longitudinal side of

the vacuum pump.

About this manual

9/80

C US

TÜV Rheinland

Mod. HiScroll 18

P/N PD S30 010

S/N - - - - - - - -

Made in Germany 2022/07

S(N2)max. 18.1 m3/h

Mass 23 kg

nmax. 1870 1/min

100-127 VAC ±10% 50/60 Hz 10.0 A

200-240 VAC ±10% 50/60 Hz 6.0 A

SCCR: 500 A @ 250 VAC,

10 kA @ 125 VAC

D-35614 Asslar Berliner Str. 43

UL/CSA 61010-1

IP20

Rating plate

The rating plate is located clearly visible on a longitudinal side of

the vacuum pump.

Warning hot surface

This sticker warns of injuries caused by high temperatures as a

result of contact without protection during operation.

Operating instructions note

This sticker indicates that this operating instructions must be

read before performing any tasks.

warranty seal

Warranty seal

The product is sealed ex factory. Damaging or removing a war-

ranty seal results in loss of the warranty.

Fig. 1: Position of the stickers on the product

1Note: Read the operating instructions

2Rating plate

3Hot surface warning sign

4Warranty seal

About this manual

10/80

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