MKS 653B User manual
117082-P1
Rev D, 1/98
Instruction Manual
MKS Type 653B
Exhaust Throttle Valve
Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350
Fax: (978) 975-0093
E-mail: mks@mksinst.com
Web site: http://www.mksinst.com
WARRANTY
Type 653B Equipment
MKS Instruments, Inc. (MKS) warrants that for two years from the date of shipment
the equipment described above (the “equipment”) manufactured by MKS shall be
free from defects in materials and workmanship and will correctly perform all date-
related operations, including without limitation accepting data entry, sequencing,
sorting, comparing, and reporting, regardless of the date the operation is performed
or the date involved in the operation, provided that, if the equipment exchanges
data or is otherwise used with equipment, software, or other products of others,
such products of others themselves correctly perform all date-related operations
and store and transmit dates and date-related data in a format compatible with
MKS equipment. THIS WARRANTY IS MKS’ SOLE WARRANTY CONCERNING
DATE-RELATED OPERATIONS.
For the period commencing with the date of shipment of this equipment and ending
two years later, MKS will, at its option, either repair or replace any part which is
defective in materials or workmanship or with respect to the date-related operations
warranty without charge to the purchaser. The foregoing shall constitute the
exclusive and sole remedy of the purchaser for any breach by MKS of this
warranty.
The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrange-
ments with respect to the responsibility for shipping the equipment and handling
any other incidental charges with the MKS sales representative or distributor from
which the equipment was purchased or, in the case of a direct purchase from MKS,
with the MKS home office in Andover, Massachusetts, USA.
This warranty does not apply to any equipment which has not been installed and
used in accordance with the specifications recommended by MKS for the proper
and normal use of the equipment. MKS shall not be liable under any circumstances
for indirect, special, consequential, or incidental damages in connection with, or
arising out of, the sale, performance, or use of the equipment covered by this
warranty.
MKS recommends that all MKS pressure and flow products be calibrated
periodically (typically every 6 to 12 months) to ensure accurate readings. When a
product is returned to MKS for this periodic re-calibration it is considered normal
preventative maintenance not covered by any warranty.
THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,
EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.
11-98 117082-P1
117082-P1
Rev D, 1/98
MKS Type 653B
Exhaust Throttle Valve
Copyright © 1998 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Printed in the United States of America
Baratron®is a registered trademark of MKS Instruments, Inc., Andover, MA
Chemraz®is a registered trademark of Greene, Tweed & Co., Inc., Kulpsville, PA
Viton®and Kalrez®are registered trademarks of DuPont Dow Elastomers, Inc., Wilmington, DE
Parker®is a registered trademark of Parker Seals, Lexington, KY
Please Note:
MKS Instruments provides these documents as the latest version for the revision indicated.
The material is subject to change without notice, and should be verified if used in a critical
application.
Table of Contents
iii
Table of Contents
Valve Safety Information ....................................................................................................... 1
Symbols Used in This Instruction Manual.................................................................. 1
Symbols Found on the Unit ....................................................................................... 2
Safety Procedures and Precautions............................................................................. 3
Chapter One: General Information......................................................................................... 5
Introduction............................................................................................................... 5
How This Manual is Organized.................................................................................. 6
Customer Support...................................................................................................... 6
Chapter Two: Installation......................................................................................................7
How To Unpack the Type 653 Unit ........................................................................... 7
Unpacking Checklist ..................................................................................... 7
Environmental Requirements..................................................................................... 8
Setup ......................................................................................................................... 8
Choosing A Pressure Controller .................................................................... 9
Flange Types ............................................................................................................. 9
ASA Series Flanges....................................................................................... 10
CF Series Flanges.......................................................................................... 11
ISO-NW Series Flanges................................................................................. 12
JIS Series Flanges ......................................................................................... 13
KF Series Flanges ......................................................................................... 14
Interface Cables ......................................................................................................... 15
Generic Shielded Cable Description .............................................................. 16
Interface Connector.................................................................................................... 17
Chapter Three: Operation ...................................................................................................... 19
Theory of Operation................................................................................................... 19
General Operation Information................................................................................... 20
Chapter Four: Maintenance ................................................................................................... 21
General Information................................................................................................... 21
Table of Contents
iv
Safety Precautions .........................................................................................21
Cleaning the Valve.....................................................................................................22
Appendix A: Product Specifications.......................................................................................23
General Specifications................................................................................................23
Appendix B: ASA Series Flange Specifications.....................................................................25
Appendix C: ISO-NW Series Flange Specifications...............................................................27
Appendix D: CF Series Flange Specifications........................................................................29
Appendix E: JIS Series Flange Specifications........................................................................31
Index ......................................................................................................................................33
List of Fi
g
ures and Tables
v
List of Figures and Tables
Figures
Figure 1: Outline Dimensions of the Motor Driver Assembly................................................ 9
Figure 2: Outline Dimensions of an ASA Series Flange......................................................... 10
Figure 3: Outline Dimensions of a CF Series Flange ............................................................. 11
Figure 4: Outline Dimensions of an ISO-NW Series Flange .................................................. 12
Figure 5: Outline Dimensions of a JIS Series Flange............................................................. 13
Figure 6: Outline Dimensions of a KF Series Flange............................................................. 14
Tables
Table 1: Definition of Symbols Found on the Unit .....................................................................2
Table 2: Size Options for ASA Series Flanges..........................................................................10
Table 3: Size Options for CF Series Flanges.............................................................................11
Table 4: Size Options for ISO-NW Series Flanges....................................................................12
Table 5: Size Options for JIS Series Flanges.............................................................................13
Table 6: Size Options for KF Series Flanges.............................................................................14
Table 7: Interface Cables..........................................................................................................15
Table 8: Interface Connector Pinout .........................................................................................17
List of Figures and Tables
vi
Valve Safety Information S
y
mbols Used in This Instruction Manual
1
Valve Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning The WARNING sign denotes a hazard to personnel. It calls
attention to a procedure, practice, condition, or the like,
which, if not correctly performed or adhered to, could result
in injury to personnel.
Caution The CAUTION sign denotes a hazard to equipment. It calls
attention to an operating procedure, practice, or the like, which, if
not correctly performed or adhered to, could result in damage to or
destruction of all or part of the product.
Note The NOTE sign denotes important information. It calls attention to a
procedure, practice, condition, or the like, which is essential to highlight.
Symbols Found on the Unit Valve Safet
y
Information
2
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No.5007 Off (Supply)
IEC 417, No.5008 Earth (
g
round)
IEC 417, No.5017
Protective earth
(
g
round)
IEC 417, No.5019
Frame or chassis
IEC 417, No.5020 Equipotentiality
IEC 417, No.5021 Direct current
IEC 417, No.5031 Alternatin
g
current
IEC 417, No.5032
Both direct and
alternatin
g
current
IEC 417, No.5033-a Class ll equipment
IEC 417, No.5172-a
Three phase
alternatin
g
current
IEC 617-2 No.020206
Caution, refer to
accompanyin
g
documents
ISO 3864, No.B.3.1
Caution, risk of
electric shock
ISO 3864, No.B.3.6 Caution, hot surface
IEC 417, No.5041
Table 1: Definition of Symbols Found on the Unit
Table of contents
Other MKS Controllers manuals
Popular Controllers manuals by other brands
Digiplex
Digiplex DGP-848 Programming guide
YASKAWA
YASKAWA SGM series user manual
Sinope
Sinope Calypso RM3500ZB installation guide
Isimet
Isimet DLA Series Style 2 Installation, Operations, Start-up and Maintenance Instructions
LSIS
LSIS sv-ip5a user manual
Rockwell Automation
Rockwell Automation 1769-L31 installation instructions
