EBARA ESA70W User manual

EBARA Corporation

ESA70_STD_2_E_Rev.0

INSTRUCTION MANUAL

MULTI-STAGE DRY VACUUM PUMP

MODEL ESA70W

MODEL ESA70WN

STANDARD MODEL

200V（50Hz）、200-220V（60Hz）

Caution:

Please read and understand this INSTRUCTION MANUAL thoroughly

before using this equipment.

Be sure to keep this INSTRUCION MANUAL on hand for future

reference

To Facility and Tool Manufactures:

Be sure to distribute this INSTRUCTION MANUAL to all end-user

personnel actually operation this equipment.

※「Model ООО」in this INSTRUCTION MANUAL is our model code

ISSUED BY PRECISION MACHINERY GROUP

EBARA Corporation

Do not reproduce or reprint any portion of this manual without permission.

Manufacturer reserves the right to discontinue or change any specifications or

designs without notice and without incurring obligations.

Model OOO in this catalog is our model code.

(i)

EBARA Corporation

Environmental Basic Policies

It is our responsibility, as people of the earth, to protect nature's irreplaceable

treasures and to pass them on to future generations.

As we undertake our business activities, we will establish environmental

management systems and implement ongoing improvements and reviews, while

striving to promote harmony between technology and nature, prevent

environmental pollution, and improve the overall results of our environmental

management activities. We are aware that environmental protection and

management activities are the responsibility of all managers and employees of the

Corporation, and each person will demonstrate this awareness when carrying out

his or her duties.

We will widely publicize these basic policies to regional societies and the general

public and work to make Ebara's position on the environment clear to society in

general.

(ii)

EBARA Corporation

Safety Information

It is essential that those operating this pump should have the knowledge to identify and avoid

hazardous conditions associated with the pump.

Improper or rash operation may cause dangerous accidents and serious injuries.

Before installation and operation, the operator should first have a good knowledge of the

pump construction, operation procedure, and its hazards.

The operator should read through this instruction manual and other documents issued by

EBARA in detail.

If you have any questions on pump operation, safety, or maintenance, please does not

hesitate to contact EBARA directly. Refer to Global network for contact address.

Three terms designating the level of hazard are used in this manual.

DANGER Indicates an imminently hazardous situation that, if not avoided, will

result in death or serious injury.

WARNING Indicates a potentially hazardous situation that, if not avoided, could

result in death or serious injury.

CAUTION Indicates an imminently hazardous situation that, if not avoided, may

result in minor or moderate injury. This term may also be used as a

warning for situations liable to damage equipment

(iii)

EBARA Corporation

Important Prior Warnings

DANGER Keep out from under the pump when lifted.

Only qualified personnel shall unload and lift the pump.

Keep pump at horizontal position when lifted.

Do not lift the pump without eyebolt spacer.

WARNING Be careful not to overturn the pump when pushing and pulling it

sideways, because the pump is narrow in comparison to its height.

WARNING Only a qualified electrician should perform electrical works,

observing all national and local electrical regulations.

WARNING Interrupt Earth Leakage Breaker (ELB) before starting on Cut and lock out power

before beginning wiring and or maintenance work.

Do not switch on the power supply to the pump until work is completed and pump

and piping are returned to safe operating condition.

WARNING Supply N2 gas to the exhaust piping when necessary to dilute the flammable or

toxic gas down to a safe concentration.

WARNING Purge with sufficient N2 gas before removing and cleaning the vacuum and

exhaust piping.

Do not let inflammable, toxic or dangerous materials disperse and guard against

contact with the human body.

Always work in a location with an escape route in an emergency.

WARNING Do not use the pump for another process without a previous overhaul. Gases or

reaction products remaining in the pump will react and lead to accidents with the

formation of large amounts of byproducts.

WARNING Pump oil may be contaminated with process byproducts. Treat it as a hazardous

waste. See Table 3.1 for oil quantities.

(iv)

EBARA Corporation

WARNING Exhaust from pumps handling process gases should be connected to an

appropriate exhaust abatement system that is equipped with discharge quality

monitors to provide warnings and shut down the process gas flow if gas

concentrations exceed allowable limits.

WARNING Check for gas leaks after installing and maintaining the piping.

Gas leaks will result in the discharge of harmful and dangerous substances and

in abnormal reactions due to the ingress of air into the pump. When checking for

gas leaks by pressurization, please pressurize by less than 0.05 MPa into the

purge port and do check.

WARNING Do not alter the pump member nor change any parts without EBARA’s consent or

approval.

WARNING The pump casing and exhaust piping become extremely hot during operation and

remain hot for some time after stopping.

Be sure that pump and exhaust piping do not come in contact with humans or

inflammable substances.

Do not remove pump enclosure panels during operation

WARNING Check Safety Interlock functions periodically (every 6 months) to confirm correct

operation.

CAUTION Disposal of process by-products shall be strictly in accordance with all local and

national environmental and safety regulations

CAUTION Disposal of Printed circuit board containing lithium battery shall be strictly in

accordance with all applicable local and national environmental regulations.

WARNING In designing the dry pumps, Ebara does not assume risks caused by hazardous

chemical reactions resulted from simultaneous injection or mixture of multiple

process gases in the pumps, and the pump is not equipped with a protection

against the dangers from such pump usage. The tool suppliers and users must

pay attention not to simultaneously inject or mix those gases.

WARNING Do not perform a withstand voltage test.Failure to comply could

result in damage to the sensitive devices.

(v)

EBARA Corporation

CAUTION Never operate the pump without pump cover for safety.

(vi)

EBARA Corporation

The following safety warning labels are attached to pump covers.

1. High temperature warning

2. Hazardous voltage warning

3. Hazardous materials warning

4. Electric charge mark

5. Hazardous weight danger

6. High temperature eyebolt warning

1. High temperature warning

Hot surface may burn or cause injury.

Allow the piping and casing to cool before servicing.

2. Hazardous voltage warning

Hazardous Voltage may shock, burn, or cause death.

Turn power off and lockout before servicing.

WARNING 警告

Hot Surfaces

Will burn skin on contact.

Allow piping and casing to cool

Before servicing

高温部あり。接触すると火傷をする危険があります。

配管・ケーシングが冷えてからメンテナンスをして下さい。

C-7110-312-0001

WARNING 警告

Hazardous Voltage

Contact will cause injury or death by

electrical shock. Disconnect

line power before servicing.

危険電圧部あり。接触すると重傷または死亡の

危険があります。電源供給を止めてブレーカを切った状態で

メンテナンスをして下さい。

C-7110-313-0001

(vii)

EBARA Corporation

3. Hazardous materials warning

In case of hazardous materials are handled. Run the pump only with

N2 gas purge before servicing. Take adequate measures against

dangerous reaction and contact with human body.

4. Electric charge mark

5. Hazardous weight danger

Heavy weight may cause severe injury or death due to overturning

or falling pump. Keep out from under the lifted pump.

Raise all adjuster-feet fully when moving.

WARNING 警告

Hazardous Materials

Exposure to air may cause spontaneous fire or explosion.

Inhalation or skin absorption will cause severe injury or

death by poisoning.

Purge thoroughly with nitrogen for at least 30 minutes

before servicing. Use personal protective equipment

riate to the materials to

revent ex

osure.

危険物質あり。

危険反応・人体への接触により重傷または死亡の危険があります。Ｎ２パージのみで３０分以上

空運転を行なってから、危険物質のＭＳＤＳに従ってメンテナンスをして下さい。

C-7110-314-0001

危険

Heavy Object

Can cause impact injury through falling or tipping.

Use appropriate, properly rigged lifting equipment and keep from

under suspended pump. Raise all adjuster feet fully when moving.

重量物。落下及び転倒により重傷または死亡の危険があります。

吊り上げたポンプの下に入らないで下さい。

移動時は全アジャスタフットを上限まであげて下さい。

C-7110-316-0001

(viii)

EBARA Corporation

6. High temperature eyebolt warning

Hot surface may burn or cause injury.

Allow the eyebolt to cool before servicing.

WARNING 警告

Hot Surfaces.

Will Cause burn. Do not touch eyebolts

during pump running for some time after stops.

高温部あり。火傷のおそれがあります。

ポンプ運転中及び停止後しばらくの間はアイボルト部に

触れないで下さい。

C-7110-317-0001

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