EBARA ESA200W User manual

PM40U EBARA CORPORATION

ESA200_CSN_2_E_Rev. 0

INSTRUCTION MANUAL

MULTI-STAGE DRY VACUUM PUMP

MODEL ESA200W

CE / SEMI / NRTL MODEL

200-220V(50/60Hz)

Caution:

Please read and understand this INSTRUCTION MANUAL

thoroughly before using this equipment.

Be sure to keep this INSTRUCION MANUAL on hand for future

reference

To Facility and Tool Manufactures:

Be sure to distribute this INSTRUCTION MANUAL to all end-user

personnel actually operation this equipment.

「Model ООО」 in this INSTRUCTION MANUAL is our model code

ISSUED BY PRECISION MACHINERY COMPANY

Do not reproduce or reprint any portion of this manual without permission.

Manufacturer reserves the right to discontinue or change any specifications

or designs without notice and without incurring obligations.

Model ○○○ in this catalog is our model code.

（i）

PM10U EBARA CORPORATION

Environmental Basic Policies

It is our responsibility, as people of the earth, to protect nature's irreplaceable treasures

and to pass them on to future generations.

As we undertake our business activities, we will establish environmental management

systems and implement ongoing improvements and reviews, while striving to promote

harmony between technology and nature, prevent environmental pollution, and improve

the overall results of our environmental management activities. We are aware that

environmental protection and management activities are the responsibility of all managers

and employees of the Corporation, and each person will demonstrate this awareness

when carrying out his or her duties.

We will widely publicize these basic policies to regional societies and the general public

and work to make Ebara's position on the environment clear to society in general.

（ii）

PM10U EBARA CORPORATION

Safety Information

It is essential that those operating this pump should have the knowledge to identify and avoid

hazardous conditions associated with the pump.

Inadequate or rash operation may cause dangerous and serious accidents.

Before installation and operation, the operator should first have a good knowledge of the

pump construction, operation procedure, and its hazards.

The operator should read through this instruction manual and other documents issued by

EBARA in detail.

If you have any questions on pump operation, safeties, and maintenance, please do not

hesitate to contact EBARA directly. Refer to Global network for contact address.

Three terms designating the level of hazard are used in this manual.

DANGER indicates an imminently hazardous situation which, if not avoided,

will result in death or serious injury.

WARNING indicates a potentially hazardous situation which, if not avoided,

could result in death or serious injury.

CAUTION indicates an imminently hazardous situation which, if not avoided,

may result in minor or moderate injury.

This term may also be used as a warning for situations liable to

damage to equipment.

（iii）

PM10U EBARA CORPORATION

Important Prior Warnings

DANGER Keep out from under the pump when lifted.

Only qualified personnel shall unload and lift the pump.

WARNING Be careful not to overturn the pump when pushing and pulling it

sideways, because the width of the pump is small to its height.

WARNING All electrical works must be performed by only a qualified

electrician.

All national and local electrical regulations must be observed.

WARNING Interrupt Circuit Breaker (CB) before starting on wiring

and maintenance work.

Do not switch on the power supply to the pump until work is

completed.

WARNING Supply N2 gas to the exhaust piping when necessary to dilute

the inflammable or toxic gas up to a safe concentration.

WARNING Purge with sufficient N2 gas before removing and washing the

vacuum and exhaust piping.

Do not let inflammable, toxic or dangerous materials

disperse and guard against contact with the human body.

Always work in a location with an escape route in an emergency.

WARNING Do not use the pump for another process without a previous

overhaul. Gases or reaction products remaining in the pump will

react and lead to accidents with the formation of large amounts of

products.

（iv）

PM10U EBARA CORPORATION

WARNING To avoid any hazard induced by toxicity, flammability and

explosiveness of the process gases used in the tool, be sure to

operate the tool according to the operations safety guidelines

supplied by tool suppliers.

Appendix 6 lists typical process gases used in a

semiconductor-processing tool. However, details concerning

the tool gases and other concerns specific to your tool should be

directed to the respective tool suppliers.

WARNING Check for gas leaks after installing and maintaining the piping.

Gas leaks will result in the discharge of harmful and dangerous

substances and in abnormal reactions due to the ingress of air

into the pump. When checking for gas leaks by pressurization,

please pressurize by less than 0.05 MPa into the purge port and

do check.

WARNING Do not alter the pump member nor change any parts without the

EBARA's consent or approval.

WARNING The pump casing and exhaust piping become extremely hot

during operation and for some time after stopping.

Be sure that pump and exhaust piping do not come in contact

with humans or inflammable substances.

Do not remove the pump cover during operation.

WARNING Check Safety Interlock functions periodically (every 6 months) to

confirm the interlocks will work correctly.

CAUTION Disposal of process by-products shall be strictly in accordance

with all local and national environmental and safety regulations.

CAUTION Disposal of Printed circuit board containing Lithium battery shall

be strictly in accordance with all local and national environmental

and applicable regulations.

（v）

PM10U EBARA CORPORATION

WARNING In designing the dry pumps, Ebara does not assume risks

caused by hazardous chemical reactions resulted from

simultaneous injection or mixture of multiple process gases in

the pumps, and the pump is not equipped with a protection

against the dangers from such pump usage. The tool

suppliers and users must pay attention not to simultaneously

inject or mix those gases.

WARNING Do not perform a withstand voltage test.

Failure to comply could result in damage to the sensitive

devices.

CAUTION Never operate the pump without pump cover for safety.

（vi）

PM10U EBARA CORPORATION

Following safety warning labels are attached to pump covers.

1. High temperature warning

2. Hazardous voltage warning

3. Hazardous materials warning

4. Hazardous voltage after EMO warning

5. Hazardous weight danger

6. High temperature eyebolt warning

7. Anti Earthquake fixture warning

1. High temperature warning

Hot surface may burn or cause injury.

Allow the piping and casing to cool before servicing.

2. Hazardous voltage warning

Hazardous Voltage may shock, burn, or cause death.

Turn power off and lockout before servicing.

WARNING 警告

Hazardous Voltage

Contact will cause injury or death by

electrical shock. Disconnect

line power before servicing.

危険電圧部あり。接触すると重傷または死亡の

危険があります。電源供給を止めてブレーカを切った状態で

メンテナンスをして下さい。

C-7110-313-0001

WARNING 警告

Hot Surfaces

Will burn skin on contact.

Allow piping and casing to cool

Before servicing

高温部あり。接触すると火傷をする危険があります。

配管・ケーシングが冷えてからメンテナンスをして下さい。

C-7110-312-0001

（vii）

PM10U EBARA CORPORATION

WARNING 警告

Hazardous Voltage

Contact will cause injury or death by

electrical shock. Disconnect

line

ower before servicin

危険電圧部あり。接触すると重傷または死亡の

危険があります。電源供給を止めてブレーカを切った状態で

メンテナンスをして下さい。

WARNING 警告

Hazardous Voltage

Contact will cause injury or death by

electrical shock. Connector CN-C

remains energized after EMO.

危険電圧部あり。接触すると重傷または死亡の

危険があります。コネクタCN-CはEMO作業後も

通電しています。　　　　　　　　　　　　　C-7110-410-0001

3. Hazardous materials warning

In case of hazardous materials are handled. Run the pump only with

N2 gas purge before servicing. Take adequate measures against

dangerous reaction and contact with human body.

4. Hazardous voltage after EMO warning

Contact will cause injury or death by electrical shock.

Connector CN-C remains energized after EMO.

WARNING 警告

Hazardous Materials

Exposure to air may cause spontaneous fire or explosion.

Inhalation or skin absorption will cause severe injury or

death by poisoning.

Purge thoroughly with nitrogen for at least 30 minutes

before servicing. Use personal protective equipment

riate to the materials to

revent ex

osure.

危険物質あり。

危険反応・人体への接触により重傷または死亡の危険があります。Ｎ２パージのみで３０分以上

空運転を行なってから、危険物質のＭＳＤＳに従ってメンテナンスをして下さい。

C-7110-314-0001

（viii）

PM10U EBARA CORPORATION

5. Hazardous weight danger

Heavy weight may cause severe injury or death due to overturning

or falling pump. Keep out from under the lifted pump.

Raise all adjuster-feet fully when moving.

6. High temperature eyebolt warning

Hot surface may burn or cause injury.

Allow the eyebolt to cool before servicing.

7. Anti earthquake fixture warning

To prevent fall down of the pump caused by earthquake,

Pump must be fixed on the floor with attached fixtures.

危険

Heavy Object

Can cause impact injury through falling or tipping.

Use appropriate, properly rigged lifting equipment and keep from

under suspended pump. Raise all adjuster feet fully when moving.

重量物。落下及び転倒により重傷または死亡の危険があります。

吊り上げたポンプの下に入らないで下さい。

移動時は全アジャスタフットを上限まであげて下さい。

C-7110-316-0001

WARNING 警告

Pump may fall down when earthquake.

Fix the pump with fixtures.

地震発生時にポンプが転倒する恐れがあります。

固定金具でポンプを床面等に固定して下さい。

C-7110-322-0001

警告

Hot Surfaces.

Will Cause burn. Do not touch eyebolts

during pump running for some time after stops.

高温部あり。火傷のおそれがあります。

ポンプ運転中及び停止後しばらくの間はアイボルト部に

触れないで下さい。

C-7110-317-0001

WARNING

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