EBARA A70W User manual

Doc. No. 7313-L4602B Rev. 3B

INSTRUCTION MANUAL

MULTI-STAGE DRY VACUUM PUMP

A70W (A70W-S, A70W-C)

A30W (A30W-S, A30W-C)

A25S (A25S-S)

A10S (A10S-S)

A07V (A07V-S)

Distribute this Instruction Manual to all end user

personnel operating the equipment.

ISSUED BY PRECISION MACHINERY GROUP

Do not reproduce or reprint any portion of this manual without permission.

Manufacturer reserves the right to discontinue or change any specifications or designs

without notice and without incurring obligations.

(i)

Record of Changes

Rev. Date Page Position Contents Reason

0 2-Jun-94 Newly issued

1 13-Jul-94 5

6-10

A07V Spec.

Outline Drawing

Fig. 3.4

Fig. 4.2

Fig. 4.6

Table 4.5

Pumping Speed

Water Sup./Rtn

Sys. Flow

Coupler

Ctrl. Wiring

Pin Assign.

Correction

Add NPT

Add Note

Add Drawing

Correction

Add note

2 14-Nov-96

ⅲ,ⅳ

ⅴ,ⅵ,ⅶ

35,36

44,45

Fig. 1,2,3,4,5

Drawing

3.3 List

Dig. 4.4

Table 4.6

Fig. 4.7

Table 6.1

6.3

7 (8)

Safety warning

labels

Warning label

Location

Detailed

specifications

Power Sup. Rec

Dipswitch

S.W setting

Typical check

items

Spare Parts

Pump Lifting

Service Net.

Add

Add List

Correction

Design Change

Add Table

Add List

Add Note

Add List

A 12-Dec-97 New release

per ECO 2905

3 20-May-99 21

44,45

5,6,18,

27,28,

Tab. 4.2

9. Service Network

-----

Suitable wire

Japan, Taiwan

(Add., Phone, Fax)

The Unit was

changed in terms

of Domestic

regulation for

Measurement low.

Correction

Change

-----

3A 27-Apr-01 ETI release of

EC Rev 3 per

ECO 5394.

3B June 2002 20

Thruout

Add UL grounding

note

Add LCD “hot

surface” note

Add appendices

Language Edit

Third-party

marking

Third-party

marking

SEMI S2

ECO 5771

EBARA Corporation

(ii)

Safety Information

Anyone operating this pump must have the knowledge to identify and avoid hazardous

conditions associated with the pump.

Rash actions or improper operation may cause dangerous accidents and serious injuries.

Before installation and operation, the operator first should have a thorough knowledge of the

pump’s construction, operating procedures, and hazards.

The operator should read this instruction manual and other documents issued by EBARA.

If you have any questions on pump operation, safety, or maintenance, please do not hesitate

to contact EBARA directly.

Three terms in this manual designate different levels of hazard:

DANGER indicates an imminently hazardous situation that, if not avoided, will

result in death or serious injury.

WARNING indicates a potentially hazardous situation that, if not avoided, could

result in death or serious injury.

CAUTION indicates an imminently hazardous situation that, if not avoided, may

result in minor or moderate injury.

This term may also indicate situations that might damage

equipment.

EBARA Corporation

(iii)

Important Precautions

DANGER Keep out from under the pump when it is elevated.

Only qualified personnel should unload and lift the pump.

WARNING Be careful not to overturn the pump when pushing or pulling it

sideways. The pump is narrow in comparison to its height.

WARNING Only a qualified electrician, observing all national and local

regulations, should perform electrical work.

WARNING Cut and lock out electrical power before beginning wiring or

maintenance work.

Do not switch on the power supply to the pump until work is

completed and pump and piping are back in safe operating

condition.

WARNING Supply N2gas to the exhaust piping when necessary to dilute

flammable or toxic gases down to a safe concentration.

WARNING Purge system with sufficient N2gas before removing and cleaning

the vacuum lines and exhaust piping.

Prevent dispersal of flammable, toxic or dangerous materials and

guard against their contact with the human body.

Work only in locations with an emergency escape route.

WARNING Do not convert the pump from one process to another without an

intervening overhaul. Gases or reaction products remaining in

the pump may react and lead to accidents or to the formation of

large amounts of byproduct.

WARNING Check Safety Interlock functions periodically (every 6 months) to

confirm correct operation. See Appendix 2 for a description of

these interlocks.

WARNING Connect exhaust from pumps handling process gases to an

appropriate exhaust abatement system that is equipped with

discharge quality monitors to provide warnings and to shut down

the process gas flow if concentrations exceed allowable limits.

WARNING Check for gas leaks after initial installation of the piping and after

reassembly following maintenance or, at least, annually. Gas

leaks can result in the discharge of harmful and dangerous

substances and in abnormal reactions due to the admission of air

into the pump. Replace o-rings as required to correct leaks.

See Appendix 4.

WARNING Do not modify the pump or any of its parts without EBARA's

approval.

EBARA Corporation

(iv)

WARNING Do not place the LCD controller on or near a surface with a

temperature exceeding 65ºC.

WARNING The pump casing and exhaust piping become extremely hot

during operation and remain hot for some time after stopping.

Keep pump and exhaust piping away from contact with personnel

and flammable substances.

Do not remove pump enclosure panels during operation.

CAUTION Disposal of process byproducts must be in strict accord with all

local and national environmental and safety regulations.

CAUTION Dispose of printed circuit boards containing lithium batteries in

strict accord with all applicable local and national environmental

regulations.

CAUTION The height of EBARA dry pumps may place the EMO button and

the LCD controller below the heights recommended in SEMI

S8-95. See Appendix 3.

The following safety warning labels appear on the pump covers:

High temperature warning

Hazardous voltage warning

Hazardous materials warning

Electric charge mark

Hazardous weight danger

High temperature warning

Hot surface may burn or cause injury.

Allow the piping and casing to cool before servicing.

EBARA Corporation

(v)

Hazardous voltage warning

Hazardous Voltage may shock, burn, or cause death.

Turn power off and lockout before servicing.

Hazardous materials warning

(Applies only when pumping hazardous materials)

Run the pump only with N2gas purge before servicing.

Take adequate measures against dangerous reaction and contact with human body.

Electric charge mark

EBARA Corporation

(vi)

Hazardous weight danger

Heavy weight may cause severe injury or death due to overturning or falling pump.

Keep out from under the lifted pump.

Raise all adjuster feet fully when moving.

EBARA Corporation

(vii)

EBARA Corporation

(viii)

EBARA Corporation

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