Agilent Technologies HS-2 User manual

HS-2 Diffusion Pump

User Manual

2 HS-2 Diffusion Pump User Manual

Notices

Manual Part Number

699901150

Edition H.00, April 2021

No part of this manual may be

reproduced in any form or by any

means (including electronic storage

and retrieval or translation into a

foreign language) without prior

agreement and written consent from

Agilent Technologies, Inc. as governed

by United States and international

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

www.agilent.com

Instrument Manufacturing

Agilent Technologies LDA Malaysia

Sdn Bhd Bayan Lepas

Free Industrial Zone 11900 Bayan Lepas,

Penang Malaysia

Printed in Italy

Warranty

The material contained in this

document is provided “as is,” and is

subject to being changed, without

notice, in future editions. Further, to the

maximum extent permitted by

applicable law, Agilent disclaims all

warranties, either express or implied,

with regard to this manual and any

information contained herein, including

but not limited to the implied

warranties of merchantability and

fitness for a particular purpose. Agilent

shall not be liable for errors or for

incidental or consequential damages in

connection with the furnishing, use, or

performance of this document or of

any information contained herein.

Should Agilent and the user have a

separate written agreement with

warranty terms covering the material

in this document that conflict with

these terms, the warranty terms in the

separate agreement shall control.

Technology Licenses

The hardware and/or software

described in this document are

furnished under a license and may be

used or copied only in accordance with

the terms of such license.

Restricted Rights Legend

U.S. Government Restricted Rights.

Software and technical data rights

granted to the federal government

include only those rights customarily

provided to end user customers.

Agilent provides this customary

commercial license in Software and

technical data pursuant to FAR 12.211

(Technical Data) and 12.212

(Computer Software) and, for the

Department of Defense, DFARS

252.227-7015 (Technical Data -

Commercial Items) and DFARS

227.7202-3 (Rights in Commercial

Computer Software or Computer

Software Documentation).

Safety Notices

A CAUTION notice denotes a hazard. It

calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

A WARNING notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in personal injury or death.

Do not proceed beyond a WARNING

notice until the indicated conditions

are fully understood and met.

WARNING

CAUTION

Contents

HS-2 Diffusion Pump User Manual 3

Contents

About this manual 6

Validity 6

Definitions and terminology 7

Definition of Caution, Warning and Note 7

Warning Symbols 8

Safety 10

Proper use 10

Improper use 11

Disposal 12

Service 13

Diffusion Pump Hazards 14

Explosion 15

Pressurization Hazards 17

Dangerous Substances 18

High Temperatures 19

Cold Surfaces 19

Cold Coolant 19

High Voltages 20

Asphyxiation 20

Contents

4 HS-2 Diffusion Pump User Manual

Description of the HS-2 Diffusion Pump 21

Pump Operation 22

Installation 23

Pump Fluid Installation 25

Power Plug Installation 25

Maintenance 26

Changing Heater Element 26

Cleaning 26

Technical Specifications 27

Operating Specifications 30

Physical Specifications 31

Optional Components 32

Accessories and Spare Parts 33

Technical Information

HS-2 Diffusion Pump User Manual 5

1Technical Information

About this manual 6

Validity 6

Definitions and terminology 7

Definition of Caution, Warning and Note 7

Warning Symbols 8

Safety 10

Proper use 10

Improper use 11

Disposal 12

Service 13

Diffusion Pump Hazards 14

Explosion 15

Description of the HS-2 Diffusion Pump 19

Pump Operation 20

Installation 21

Pump Fluid Installation 23

Power Plug Installation 23

Maintenance 24

Changing Heater Element 24

Cleaning 24

Technical Specifications 25

Operating Specifications 28

Physical Specifications 29

Optional Components 30

Accessories and Spare Parts 31

Technical Information

6 HS-2 Diffusion Pump User Manual

About this manual

Validity

This manual lists the instructions for the users of the HS-2, with particular reference

to the notions relating to safety, operation and first level maintenance, limited to

maintenance operations for which the user is responsible.

The maintenance operations, illustrated in the specific sections, with specific

provisions relating to the higher level of maintenance (personnel specifically trained

for maintenance operations) must not be carried out by the user.

NOTE

1This manual contains useful information so that all personnel using the

HS-2 can operate it safely and guarantee perfect efficiency, for its entire life

span.

2Keep this manual, together with all the related publications, in an accessible

place known to all operators/maintenance personnel.

Technical Information

HS-2 Diffusion Pump User Manual 7

Definitions and terminology

Definition of Caution, Warning and Note

Some important references of this manual are highlighted and framed in

contrasting color.

WARNING

Warning messages draw the operator's attention to a specific procedure or

practice which, if not performed correctly, could result in serious personal

injury.

CAUTION

Caution messages are displayed before procedures which, if not observed, could

cause damage to the equipment.

NOTE

Notes are intended to call attention to important information and provide more

detail regarding specific steps.

Technical Information

8 HS-2 Diffusion Pump User Manual

Warning Symbols

The following is a list of symbols that appear in conjunction with warnings on the

HS-2. The hazard they describe is also shown.

A triangular symbol indicates a warning. The meanings of the symbols that may

appear alongside warnings in the documentation are as follows:

Dangerous voltages Hot surface Generic hazard

Presence of dangerous

substances Crushing hazard Cutting hazard

Wear protective gloves Wear personal protective

equipment

Wear accident-

prevention shoes

European Declaration of

Conformity Waste Electrical and Electronic Equipment

Technical Information

HS-2 Diffusion Pump User Manual 9

The following symbol may be used on warning labels attached to the instrument.

When you see this symbol, refer to the relevant operation or service manual for the

correct procedure referred to by that warning label.

The following symbols appear on the instrument for your information.

Corrosive substances

Explosive Material

Toxic Gases Asphyxiation

Wear face shield

Production date

Dangerous voltages

Hot surfaces

Generic hazard

CE certification

Wear safety helmet

RoHS China certification

Waste Electrical and Electronic Equipment

Technical Information

10 HS-2 Diffusion Pump User Manual

Safety

This section contains the information, prescribed by the Low Voltage Directive

2014/35/EU, which is essential for the compliance and observance of the safety

regulations both generally and in relation to the specific use of the product.

Failure to comply with these instructions and the other instructions contained in

this manual may render the safety conditions envisaged in the design phase

inefficient and cause accidents to those operating the product.

Agilent Technologies declines all responsibility for damage to the product or for the

physical safety of the operator or third parties deriving from the non-observance of

the safety rules indicated in the technical documentation.

Proper use

This manual contains important warnings and safety instructions to be observed in

order for the unit to work safely.

The product described in this manual is intended exclusively for the area of

application specified in the instructions. The manual also provides indications

regarding the essential requirements for the application and operation of the

product as well as the safety measures that can be adopted to guarantee regular

operation. Agilent Technologies does not provide any guarantee or assume any

responsibility for applications other than those described in this manual or in which

the essential requirements and safety measures are not respected.

The product must only be used by qualified personnel who are able to take the

necessary safety measures under conditions that do not cause damage or injury.

Any accessories and equipment used with the product must be supplied or

approved by Agilent Technologies.

Any adjustment or maintenance operation must be performed by a professional

technician informed about the risks.

Repairs on the product must be carried out exclusively by Agilent authorized

personnel.

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