Ulvac MBS-053 User manual

No．1000800-2-01-２

Instruction Manual

For

Mechanical Booster Vacuum Pump

Model

MBS-053

MBS-053-01

Request to Users

When perform installation of the pump and operation, please read this

manual by all means.

Please keep this manual to be able to refer anytime.

Manual contents have a case to modify without advance notice to realize a

performance gain.

Original instructions

ULVAC KIKO, Inc.

Contents

0．Introduction ・・・・・・・・・・ 01

0.1 Before using the MBS-053/MBS-053-01 ・・・・・・・・・・ 01

0.2 Safety symbols ・・・・・・・・・・ 03

0.3 Cautions for safety ・・・・・・・・・・ 05

1．For Safe Operation ・・・・・・・・・・ 1

1.1 Hazards peculiar to the pump and safety measures ・・・・・・・・・・ 1

1.1.1 Danger

Leakage of hazardous gases and substances ・・・・・・・・・・ 1

1.1.2 Warning Electric shock ・・・・・・・・・・ 2

1.1.3 Caution High temperature ・・・・・・・・・・ 2

1.1.4 Warning Explosion ・・・・・・・・・・ 4

1.2 Safety Data Sheet (SDS) ・・・・・・・・・・ 4

2．Specification table ・・・・・・・・・・ 5

2.1 Specification ・・・・・・・・・・ 5

2.2 Dimensional drawing (for MBS-053/MBS-053-01) ・・・・・・・・・・ 6

3．Design of vacuum pumping system ・・・・・・・・・・ 7

3.1 Pumping system ・・・・・・・・・・ 7

3.2 Fore pump ・・・・・・・・・・ 9

3.3 Ultimate pressure ・・・・・・・・・・ 9

3.4 Pumping speed ・・・・・・・・・・ 9

4．Installation ・・・・・・・・・・ 10

4.1 Installation of a pump ・・・・・・・・・・ 10

4.2 Environmental conditions for storage , installation and operation ・・・・・ 10

4.3 Power supply voltage setting ・・・・・・・・・・ 11

4.4 Electric wiring ・・・・・・・・・・ 12

a-1) Unplug-preventive hardware(option) ・・・・・・・・・・ 13

a-2) How to install unplug-preventive hardware ・・・・・・・・・・ 14

4.5 Fluctuation in the power voltage and frequency ・・・・・・・・・・ 15

4.6 Oil charge ・・・・・・・・・・ 16

5．Operation ・・・・・・・・・・ 17

5.1 Structure of pump ・・・・・・・・・・ 17

5.2 Cautions for operation ・・・・・・・・・・ 18

5.3 Start of operation ・・・・・・・・・・ 18

5.4 Stopping the operation ・・・・・・・・・・ 18

5.5 Protection feature ・・・・・・・・・・ 20

5.6 External control and alarm output ・・・・・・・・・・ 21

6．Maintenance ・・・・・・・・・・ 22

6.1 Daily inspection ・・・・・・・・・・ 22

6.2 Long interval maintenance ・・・・・・・・・・ 22

6.3 Trouble check list ・・・・・・・・・・ 23

7．Support in trouble ・・・・・・・・・・ 25

8．Disposal ・・・・・・・・・・ 25

Warranty

Safety Data Sheet (SDS)

Pump Usage Check Sheet (Use this sheet for requesting an overhaul.)

Contact address of sales and service departments

Figures and Tables

Fig.1 Dimensional drawing of MBS-053/MBS-053-01

mechanical booster vacuum pump ・・・・・・・・・・ 6

Fig.2 Driver Box Interior ・・・・・・・・・・ 6

Fig.3 Basic piping diagram to the vacuum chamber ・・・・・・・・・・ 8

Fig.4 Compression ratio property ・・・・・・・・・・ 9

Fig.5 Pumping speed curve ・・・・・・・・・・ 9

Fig.6 Driver circuit box position ・・・・・・・・・・ 11

Fig.7 Driver circuit box interior ・・・・・・・・・・ 11

Fig.8 Circuit protector wiring diagram ・・・・・・・・・・ 12

Fig.9 An Inlet (EN60320) ・・・・・・・・・・ 13

Fig.10 Change region of the voltage and frequency ・・・・・・・・・・ 15

Fig.11 Oil plug, oil level gauge position ・・・・・・・・・・ 16

Fig.12 Oil level gauge ・・・・・・・・・・ 16

Fig.13 Structure of pump ・・・・・・・・・・ 17

Fig.14 External control connector pin assignment ・・・・・・・・・・ 21

Fig.15 Alarm signal origination side circuitry ・・・・・・・・・・ 21

Table.1 Specification ・・・・・・・・・・ 5

Table.2 Power cable selection standards ・・・・・・・・・・ 12

Table.3 Protection feature ・・・・・・・・・・ 20

Table.4 External control connector ・・・・・・・・・・ 21

Table.5 Daily inspections ・・・・・・・・・・ 22

Table.6 Change parts long-term maintenance ・・・・・・・・・・ 22

Table.7 Trouble check list ・・・・・・・・・・ 23

－01－

0. Introduction

0.1 Before using the MBS-053/MBS-053-01

Thank you for purchase of mechanical booster vacuum pump model

MBS -053/MBS-053-01.

This pump is only for vacuum pumping, and may malfunction or cause accidents if

not handled appropriately. Please use instruction manuals after attention enough

for check / maintenance / security sides after a reading well.

Personnel Handling the Equipment

The handling of this product has you read this instruction manual, and a

person understood enough shall perform attention in the security, the

specifications of this pump and a matter about operation method.

Read the Manual Thoroughly

This product please uses instruction manuals after a reading before use

definitely well. Please read the [to have you use it safely] [instructions in the

security] in particular by all means.

Keep This Manual in a Safe Place

Please keep the instruction manual carefully. Please keep it by all means in

the place that used one can read after having read.

Copying This Manual Is Prohibited

No part of this instruction manual may be copied for use by a third party

without our permission.

Statutory Requirements for Disposal

Follow state law and local government regulations for disposal of the pump.

－02－

Safety During Repair

When it is asked us for repair, please inform the use situation of having

hazardous substance or not in particular for the safe management of the

repair worker.

The use situation declines repair in the case of lack of foresight.

Confirmation at the time of the unpacking

Although the pump is delivered with great care, check the following after

unpacking.

(1) The delivered pump is in accordance with your request.

(2) The specified accessories (enough pump oil to use the pump once; optional

equipment) have been provided.

A normal accessory is vacuum-pump oil and a connector of power supply

voltage change use and a power cable is an option parts.

(3) No parts have been damaged in transportation.

(4) Neither screws nor nuts have become loose nor were lost in transportation.

If there are any problems, contact the company from which you purchased the

pump or the sales department of the manufacturer.

－03－

0.2 Safety symbols

In this instruction manual and on warning labels attached to the pump, the

following symbols are used so that matters which must be strictly adhered to can

be readily understood.

These symbols are divided as shown below.

Danger

When mishandled, there is an imminent danger of the operator suffering a

fatal accident or serious injury.

Warning

When mishandled, there is a possibility of the operator suffering a fatal

accident or serious injury.

Caution

When mishandled, there is a possibility of the operator suffering an injury

(light or medium injury) or of damage occurring to property.

Note

When mishandled, there is a possibility of the pump being damaged or

malfunctioning.

High temperature Caution

Some parts of the pump may reach temperatures of 90°C or more during

operation. Touching such components may result in burns.

－04－

Electric Shock Caution

The Inlet pipe of the pump

The Outlet pipe of the pump

Always switch off the main power supply before installing electrical wiring or

performing any electrical work on the pump. Failure to do so may result in

electric shock.

－05－

0.3 Cautions for safety

Never allow people other than repair engineers to disassemble or repair the

pump. Failure to do so may result in ignition or malfunction, leading to

injury or electric shock.

Connect the earth wire correctly. It is recommended that a dedicated earth

leakage breaker should be installed. If the earth wire is not connected, there

is a possibility of electric shock occurring in the case of a malfunction or

electrical leakage.

There is a risk of explosion. Never block the outlet or operate the pump with

equipment mounted at the outlet side which blocks the passage of gas.

Otherwise, the internal pump pressure increases causing the pump to

explode, the oil level gauge to protrude or the motor to be overloaded.

This pump is not resistant to pressure. The internal pump pressure is

limited to 0.03 MPa (gauge pressure).

The Vacuum Pump Unit is device a built-in device. Do not install it without

adequate protection against heat hazard. The surface temperature of the

vacuum Pump Unit can exceed 90 degrees in case it is operated under high

pressure (atmospheric to 10kPa).

It gets an electric shock touching the motor energizing part. Please work

after pulling out the power plug without fail when wires electricity is

connected, it checks, and it transfers it.

Do not run with opening a cover of the driver box. It causes electric shock

and the ignition.

Do not use the pump in an explosive atmosphere. Failure to do so will

result in injury or fire.

Warning

－06－

At the time of shipping, set electric voltage by request in an order. Do not

run by 200-240V line source as 100-120V system connection. Power supply

circuit is damaged when you install wrong power supply voltage selection

connector and in addition of ignition might. In order to operate with

200-240V class, the changeover connector in the terminal box must be

changed into 200-240V class as shown in fig.4.3“Changing the voltage

class.”

Never touch the rotating section of the motor, shaft or coupling while the

pump is in operation. Failure to do so will result in injury.

Never place combustible materials around the motor or pump. There is a

risk of fire.

Also, do not place objects which block ventilation around the motor.

Abnormal heat generation may result in burns or fire.

Do not touch the motor while the pump is in operation or when the pump is

still hot immediately after it stops. Touching it will result in burns.

Arrange wires correctly in accordance with the “Electrical Equipment

Technical Standard” and “Wiring Regulations.” Incorrect wiring may result

in fire.

If the pump ceases operation or malfunctions, turn off the power switch

immediately to prevent accidents, and ask the company from which you

purchased the pump or the manufacturer for inspection and repair.

Do not operate the pump without adding pump oil. If it is operated in an

oil-less condition, the pump will be damaged.

Note

Caution

Warning

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