Ulvac CRYO-U Series User manual

D/N.MA06X10E, 2019MY15 ULVAC CRYOGENICS INCORPORATED

CRYOPUMP

CRYO-U® SERIES

Instruction Manual

CRYO - U®6H

CRYO - U®8H

CRYO - U®8HSP

CRYO - U®8H–U

CRYO - U®8HL

CRYO - U®10H

CRYO - U®10HL

CRYO - U®10PU

Export Control Policy

Vacuum pumps that pump nitrogen gas at pumping speed of 15000L/s or

more fall under row 2(35) of appended table 1 of Japan’s

Export Trade

Control Order, which is based on international export control regimes.

Also, when applying a refrigerator system to a cryocooler for optical

sensors, the cryocooler falls under row 10(2) of appended table 1 of Japan’s

Export Trade Control Order as well.

Customers must follow all related rules and regulations such as Foreign

Exchange and Foreign Trade Act and take appropriate

procedures when

exporting or re-exporting those products.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-1

Introduction

Thank you for choosing our products. This instruction manual gives

information and precautions on handling, installation, operation, and

maintenance of the product.

This product is intended for use by qualified personnel who recognize shock

hazards and are familiar with the safety precautions required to avoid possible

injury. To ensure proper use of this product, read this instruction manual

carefully and keep this manual close at hand so that you can use for reference

during operation.

If you purchased our other products and/or optional devices with this product,

read relevant instruction manuals carefully.

1. About the personnel who are involved in handling our products

All personnel involved in handling our products should take a general safety

education and training that is officially accepted in the country where our product

is used. The personnel are also required to have specialized knowledge/skills and

qualification on the electricity, the machinery, the cargo handling, and the vacuum.

Especially, the personnel should be familiar with handling a cryopump in order to

use it safely. Since we offer a training session (which is subject to fees) as needed

for people who use cryopumps for the first time, please do not hesitate to contact

our Service Engineering Division to join the training session.

2. Warranty

2.1 Gratis warranty period and Warranty coverage

【Gratis warranty period】

Note that an installation period of less than one year after installation in your

company or your customer’s premises or a period of less than 18 months (counted

from the date of production) after shipment from our company, which is shorter, is

selected.

【Coverage】

(1) Failure diagnosis

As a general rule, diagnosis of failure should be done on site by customer.

However, ULVAC CRYOGENICS or our service network can perform this service

for an agreed fee upon the customer’s request. There will be no charge if the cause

F-2 ULVAC CRYOGENICS INCORPORATED

of the breakdown is found to be a fault of ULVAC CRYOGENICS.

(2) Damage during transportation

When damage by delivery/transportation is admitted, the product will be

repaired free of charge within the range of the guarantee expressed in the sales

contract.

(3) Breakdown repairs

There will be a charge for breakdown repairs, replacements and on-site visits

for the following seven conditions. In those cases the cost shall be your own

expense even though the product is within the warranty period.

①Breakdowns due to improper storage or handling, careless accident, software

or hardware design by the customer.

②Breakdowns due to modifications of the product without consent of the

manufacturer.

③Breakdowns due to maintenance of the product without authentic parts or

breakdowns resulting from using the product outside the specified

specifications of the product.

④Breakdowns due to contamination or corrosion caused by user’s use

conditions.

⑤Breakdowns due to natural disasters (such as fire, earthquake, flood,

lightning, salt damage, and so on) , environmental pollution, irregular voltage,

and /or usage of undesignated power source.

⑥Breakdowns that are outside the terms of warranty.

⑦Consumables and/or replacement service.

Since the above services are limited to within Japan, diagnosis of failures, etc are

not performed abroad. If you desire the after service abroad, please contact

ULVAC CRYOGENICS and consult us for details in advance.

2.2 Exclusion of opportunity loss from warranty liability

Regardless of the gratis warranty term, compensation to opportunity losses

incurred to your company or your customers by failures of ULVAC CRYOGENICS

products and compensation for damages to products other than ULVAC

CRYOGENICS products and other services are not covered under warranty.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-3

2.3 Repair period after production is discontinued

ULVAC CRYOGENICS shall accept product repairs for seven years after

production of the product is discontinued.

3. Service Form

After the products are delivered, please fill out the following information in the

blanks. If you have any questions or technical problems, please feel free to contact

the nearest Customer Support Center or headquarters. Please refer to “Service

Network”.

Cryopump／Super trap Model ：

Cryopump／Super trap Serial No. ：

Refrigerator Model ：

Refrigerator Serial No. ：

Compressor Model ：

Compressor Serial No. ：

Temperature controller／Thermal display Model ：

Temperature controller／Thermal display Serial No. ：

Option Part Model ：

Optional Part Serial No. ：

4. Notes for repair and maintenance requests

We may decline your request for the repair or the maintenance of our products if

you refuse to give us information about the presence of the hazardous substance

and/or contaminant.

Also, please be aware that we do not accept liability for damages by the

contaminant, which might be caused during transportation to our office or the

nearest customer support center. To avoid such accident, please pay careful

attention to packing of the product

5．In case of breakdown and accident

When breakdown or accident occurs, we may ask for keeping the product on site

as it is or retrieving the product to investigate its cause. Also we may ask for

reporting the detailed process and/or the operating condition. When unidentified

malfunction was generated, please contact our Service Engineering Division or

F-4 ULVAC CRYOGENICS INCORPORATED

the nearest customer support center with reference to the chapter of Service

Network. We ask for cooperation about the above.

6．General Precautions

(1) It is strictly prohibited to duplicate, open, and transfer this instruction

manual or any of its parts to a third person without written permission from

ULVAC CRYOGENICS.

(2) Information in this document might be revised without a previous notice for

the specification change and the improvement of the product.

(3) If you have any questions or comments on this document, please do not

hesitate to contact us. The phone numbers of local customer support centers

are listed at the end of this manual.

MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED F-5

Safety Considerations

Our products have been designed to provide extremely safe and dependable operation

when properly used. Following safety precautions must be observed during normal

operation and when servicing them.

CAUTION

WARNING

A warning describes safety hazards or unsafe practices

which could result in severe injury or loss of life.

Acaution describes safety hazards or unsafe practices which

could result in personal injury or equipment damage.

Toxic gas or chemicals used.

There is a risk of severe injury upon contact.

Corrosive chemicals used.

There is a risk of severe injury upon contact.

Flammable gas used.

There is a danger of fire or burn injury.

Explosive gas used.

There is a risk of fire or explosion.

Hazardous voltage .

Electric shock may cause severe injury or loss of life.

Hot heating part present.

There is a risk of burn injury.

F-6 ULVAC CRYOGENICS INCORPORATED

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CRYO-U®Cryopump Instruction Manual

TABLE OF CONTENTS

Safety Instructions･･････････････････････････････････････････ S-1

Disposal Consideration･･････････････････････････････････････ IW-1

SECTION 1 Cryopump Description

1.1 The General･･････････････････････････････････････････ 1-1

1.2 Specifications･････････････････････････････････････････ 1-2

1.3 Environmental Requirements･･････････････････････････ 1-3

SECTION 2 Inspection

2.1 Shipping List･･････････････････････････････････････････2-1

2.2 First Inspection of Cryopump･･･････････････････････････ 2-2

SECTION 3 Quick Installation･･･････････････････････････････････ 3-1

SECTION 4 Installation

4.1 Auxiliary Equipments Required･････････････････････････4-1

4.2 Mounting the Cryopump to the Vacuum System･･････････ 4-3

4.3 Connecting Roughing Pump････････････････････････････ 4-5

4.4 Connecting Purge Gas Line･････････････････････････････4-5

4.5 Connecting Exhaust Pipe･･･････････････････････････････4-6

4.6 Connecting Cooling Water Pipe･････････････････････････ 4-7

4.7 Connecting the Cryopump to the Compressor Unit

(Connecting Flexible Hoses)････････････････････････････ 4-7

4.8 Connecting Remote Wiring･････････････････････････････ 4-8

4.9 Connecting Electrical Cables･･････････････････････････ 4-8

SECTION 5 Operation

5.1 Prior to Startup･･･････････････････････････････････････ 5-1

5.2 Rough Pumping･･･････････････････････････････････････ 5-1

5.3 Pressure Buildup Test･･････････････････････････････････5-2

5.4 Startup and Cooldown･････････････････････････････････ 5-2

5.5 Normal Operation･････････････････････････････････････ 5-3

5.6 Crossover･････････････････････････････････････････････ 5-4

ULVAC CRYOGENICS INCORPORATED Ⅰ

Table of Contents

ⅡULVAC CRYOGENICS INCORPORATED

5.7 Shutdown Procedures･･････････････････････････････････ 5-6

5.8 Handling of Hazardous Materials･･･････････････････････ 5-6

SECTION 6 Regeneration

6.1 The General･･･････････････････････････････････････････6-1

6.2 Regeneration Time････････････････････････････････････ 6-2

6.3 Warm-up Method･･････････････････････････････････････ 6-2

6.4 Regeneration Flow Chart･･･････････････････････････････6-4

SECTION 7 Disconnecting and Storage

7.1 Disconnecting Flexible Hose････････････････････････････7-1

7.2 Storage･･･････････････････････････････････････････････7-2

SECTION 8 Maintenance

8.1 Scheduled and Unscheduled Maintenance･･･････････････ 8-1

8.2 Consumables･･････････････････････････････････････････ 8-3

8.3 Cleaning the Cryopump････････････････････････････････ 8-4

8.4 Charging Helium Gas･･････････････････････････････････ 8-5

8.5 Helium Circuit Decontamination････････････････････････8-8

APPENDICES

A Troubleshooting････････････････････････････････････････ A-1

B Flexible Hose･･････････････････････････････････････････ B-1

C Conversion of Thermometer Readings････････････････････ C-1

D Principle of Cryopump Operation････････････････････････ D-1

E Principle of Refrigerator Operation･･････････････････････ E-1

F Dew Condensation･････････････････････････････････････ F-1

Service Network･･･････････････････････････････････････････････CS-1

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