Pfeiffer Vacuum CCR 371 User manual
BG 5139 BEN / A (2012-11)
A PASSION FOR PERFECTION
CCR 371 … CCR 375
Ceramic Capacitance Gauge
Operating Instructions
2BG 5139 BEN / A (2012-11)
Product Identification
In all communications with Pfeiffer Vacuum, please specify the
information given on the product nameplate. For convenient re-
ference copy that information into the space provided below.
Pfeiffer Vacuum, D-35614 Asslar
Typ:
Range:
No:
F-No:
V W; LPS
BG 5139 BEN / A (2012-11) 3
Validity
This document applies to products with the following part num-
bers:
Type Part number Flange Torr Pascal mbar
PT R28 100 ½" Rohr
PT R28 101 DN 16 ISO-KF
PT R28 102 DN 16 CF-R
CCR 371
PT R28 103 8 VCR®
10-1
…
1000 (F.S.)
1.33×101
…
133'322 (F.S.)
1.33×10-1
…
1333 (F.S.)
PT R28 110 ½" Rohr
PT R28 111 DN 16 ISO-KF
PT R28 112 DN 16 CF-R
CCR 372
PT R28 113 8 VCR®
10-2
…
100 (F.S.)
1.33×100
…
13'332.2 (F.S.)
10-2
…
133 (F.S.)
PT R28 120 ½" Rohr
PT R28 121 DN 16 ISO-KF
PT R28 122 DN 16 CF-R
CCR 373
PT R28 123 8 VCR®
10-3
…
10 (F.S.)
1.33×10-1
…
1'333.22 (F.S.)
10-3
…
13.3 (F.S.)
PT R28 130 ½" Rohr
PT R28 131 DN 16 ISO-KF
PT R28 132 DN 16 CF-R
CCR 374
PT R28 133 8 VCR®
10-4
…
1 (F.S.)
1.33×10-2
…
133.322 (F.S.)
10-4
…
1.3 (F.S.)
PT R28 140 ½" Rohr
PT R28 141 DN 16 ISO-KF
PT R28 142 DN 16 CF-R
CCR 375
PT R28 143 8 VCR®
10-5
…
0.1 (F.S.)
1.33×10-3
…
13.3322 (F.S.)
10-5
…
0.13 (F.S.)
The part number (No) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this
document correspond to CCR 37X gauges with the
DN 16 ISO-KF vacuum connection. They apply to other vacuum
connections by analogy.
We reserve the right to make technical changes without prior
notice.
All dimensions in mm.
4BG 5139 BEN / A (2012-11)
Intended Use
The temperature controlled Capacitance Diaphragm Gauges of
the CCR 37X series are intended for absolute pressure
measurement of gases in their respective pressure ranges
(→3).
Functional Principle
A ceramic diaphragm is deflected by pressure. The deflection is
measured capacitively and converted into an analog linear out-
put signal by the digital electronics.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating the
sensor to a constant temperature of 45°C which results in a com-
pensation of changes in the ambient conditions and a reduced
deposition of process products and by-products in process appli-
cations.
Trademark
VCR®Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× gauge CCR 37X in clean room packaging
1× pin for adjusting settings via buttons
1× Calibration Test Report
1× Operating Instructions German
1× Operating Instructions English
BG 5139 BEN / A (2012-11) 5
Contents
Product Identification 2
Validity 3
Intended Use 4
Functional Principle 4
Trademark 4
Patents 4
Scope of Delivery 4
1Safety 6
1.1 Symbols Used 6
1.2 Personnel Qualifications 6
1.3 General Safety Instructions 7
1.4 Liability and Warranty 7
2Technical Data 8
3Installation 13
3.1 Vacuum Connection 13
3.2 Power Connection 16
4Operation 19
4.1 Status Indication 19
4.2 Zeroing the Gauge 20
4.3 Switching Functions 25
4.4 Activating the Factory Setting (Factory Reset) 28
5Deinstallation 29
6Maintenance, Repair 30
7Returning the Product 31
8Disposal 32
Conversion Table 33
ETL Certification 33
EC Declaration of Conformity 34
For cross-references within this document, the symbol (→XY)
is used.
6BG 5139 BEN / A (2012-11)
1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.
WARNING
Information on preventing extensive equipment and environ-
mental damage.
Caution
Information on correct handling or use. Disregard can lead to
malfunctions or minor equipment damage.
Notice
<…> Labeling
1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the neces-
sary experience or who have been instructed by the end-user
of the product.
BG 5139 BEN / A (2012-11) 7
1.3 General Safety Instructions
•Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
•Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider the
safety instructions in this document.
•Before beginning to work, find out whether any vacuum com-
ponents are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contamin-
ated parts.
Communicate the safety instructions to all other users.
1.4 Liability and Warranty
Pfeiffer Vacuum assumes no liability and the warranty becomes
null and void if the end-user or third parties
•disregard the information in this document
•use the product in a non-conforming manner
•make any kind of interventions (modifications, alterations etc.)
on the product
•use the product with accessories not listed in the product
documentation.
The end-user assumes the responsibility in conjunction with the
process media used.
Gauge failures due to contamination or wear and tear are not
covered by the warranty.
8BG 5139 BEN / A (2012-11)
2 Technical Data
Measurement range →"Validity"
Accuracy 1) 0.15% of reading
Temperature effect on zero
PT R28 100 … PT R28 133
PT R28 140 … PT R28 143
0.0025% F.S./ °C
0.0050% F.S./ °C
Temperature effect on span 0.01% of reading / °C
Resolution 0.003% F.S.
Gas type dependence none
Output signal analog
(measuring signal)
Voltage range 0 … +10 V
Measuring range –5 … +10.24 V
(limited to +10.24 V)
Relationship voltage-pressure linear
Output impedance 0 Ω(short-circuit proof)
Loaded impedance >10 kΩ
Response time 2)
PT R28 100 … PT R28 133
PT R28 140 … PT R28 140
30 ms
130 ms
Gauge identification
Resistance Rident
Resistance 13.2 kΩrefer-
enced to supply common
Voltage ≤5 V
1) Non-linearity, hysteresis, repeatability in the calibrated range at
25 °C ambient operating temperature without temperature effects
after operation of 2 h.
2) Increase 10 … 90 % F.S.R.
BG 5139 BEN / A (2012-11) 9
Switching functions SP1, SP2
Setting range 0 … 99% F.S. (0 … 9.9 V)
Hysteresis 1% F.S.
Relay contact 30 VDC/ ≤0.5 ADC
floating (n.o.)
closed p ≤pSP (LED on)
open p ≥pSP (LED off)
Switching time ≤50 ms
Status relay
closed measurement mode
warning
open no supply voltage
warming up
error
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV) and limited power source
(LPS), Class 2. The connection to the gauge has to
be fused.
Supply voltage
at the gauge
+14 … +30 VDC or
±15 V (±5%)
Class 2 / LPS
Ripple ≤1 Vpp
Power consumption
while being heated
at operating temperature
≤12 W
≤8 W
The gauge is protected against reverse polarity of the supply
voltage and overload.
10 BG 5139 BEN / A (2012-11)
Power connection 15-pin D-Sub, male
Sensor cable 15-pin plus shielding
Cable length
Supply voltage 15 V
≤8 m (0.14 mm²/conductor)
≤15 m (0.25 mm²/conductor)
Supply voltage 24 V ≤43 m (0.14 mm²/conductor)
≤75 m (0.25 mm²/conductor)
Supply voltage 30 V ≤88 m (0.14 mm²/conductor)
≤135 m (0.25 mm²/conductor)
For longer cables, larger conductor cross-sections are required
(Rcable ≤1.0 Ω).
Grounding concept →"Power Connection"
Materials exposed to vacuum ceramics (Al2O3≥99.5%),
stainless steel AISI 316L
Internal volume ≤4.2 cm3
Admissible pressure (absolute)
1000 F.S.
1 / 10 / 100 F.S.
0.1 F.S.
300 kPa
200 kPa
130 kPa
Bursting pressure (absolute) 600 kPa
Admissible temperatures
Storage
Operation
Bakeout (not in operation)
–40 °C … +65 °C
+10 °C … +40 °C
≤110 °C at the flange
Relative humidity ≤80% at temperatures
≤+31 °C decreasing to 50%
at +40°C
Use indoors only, altitude up to
2000 m NN
Degree of protection IP 40
This manual suits for next models
24
Table of contents
Other Pfeiffer Vacuum Accessories manuals
