MKS Cirrus2 User manual
Cirrus2
Hardware Manual
Cirrus2 Hardware Manual - SP101017.100
June 2011
MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
2
As part of our continuous product improvement policy, we are always pleased to receive your comments and suggestions
about how we should develop our product range. We believe that the manual is an important part of the product and
would welcome your feedback, particularly relating to any omissions or inaccuracies you may discover.
You can send your comments to:-
MKS Instruments UK Ltd - Spectra Products
Cowley Way
Weston Road
Crewe
Cheshire
CW1 6AG
U.K.
+44 (0)1270 250150 Tel. International
+44 (0)1270 251939 Fax. International
Email: [email protected]
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All other brand or product names are trademarks or registered trademarks of their respective companies and as such are fully
recognised
MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
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Table of Contents
Overview 6
1. Specifications 7
Mechanical 7
Cirrus2 7
Analyser 7
Electrical 7
Power Inlet 7
Fuses 7
Environmental 7
Temperature range 7
Safety 8
Connectors 8
Warning labels 8
Ventilation 9
Additional Installation Maintenance and Operating Instructions 10
A) INSTALLATION 10
B) OPERATION 10
C) MAINTENANCE 10
2. Connections and Indicators 11
Front Panel 11
Power 11
Turbo at Speed 11
Capillary Heater 11
System Heater 11
Emission 12
Coms 12
Rear Panel 13
RGA Coms 13
Power 13
Analogue I/O Connector 14
Digital I/O Connector 15
Interfacing Notes 16
Exhaust Purge IN/OUT 17
Flushing the pump exhaust 17
Exhaust the pump only 17
3. Installation 18
Connecting to the Ethernet Port 18
Overview 18
Directly connecting to the Cirrus2 20
Assigning a static IP Address 23
4. Operation 26
Powering up 26
Starting the Quad 27
Baking 27
Temperature Settings 28
Capillary Heater 28
Shutting Down 28
MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
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5. Maintenance 29
Overview 29
Quadrupole Ion Source 29
Capillary Inlet 29
Orifice Disk 29
Pumping System 29
Removing the cover 30
Internal Components 31
Capillary Inlet 32
Replacing the Orifice Disk 33
Orifice Disk Tools 35
Tool Guide 35
Removal Tool 35
Insertion Tool 36
Fitting the Tool Guide 36
Removing the Orifice Disk 36
Fitting a new Orifice Disk 37
Reassembly 39
Analyser Maintenance 41
Ohmmeter analyser checks 41
Checking filaments 42
Removing the filaments 43
Fitting filaments 45
Ion Source cleaning 46
Cleaning while fitted to the analyser 46
Remove for cleaning 47
Refitting the ion source 49
6. Exploded Views 50
Analyser pin-outs 50
7. Spare Parts 51
Filaments 51
Ion source 51
Support Contact Numbers 52
MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
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MKS Instruments UK Ltd
3 – 4 Cowley Way
Crewe
Cheshire
CW16AG
United Kingdom
EC Declaration of Conformity
MKS Instruments UK Ltd declares that the:
Cirrus2 bench top RGA package
Is in accordance with the following directives:
I hereby declare that the equipment named above has been designed to comply with the relevant sections of the above
referenced specifications. The unit complies with all essential requirements of the Directives.
Signed:
J.M.Higgins
General Manager
7th June 2011
2004/108/EEC Electromagnetic Compatibility Directive
EN 61326-1:2006 Electrical equipment for measurement, control & laboratory use.
2006/95/EC Low Voltage Directive
EN 61010-1:2006 Safety requirements for electrical equipment for measurement, control & laboratory use.
MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
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Overview
The Cirrus2 is a purpose built bench top quadrupole mass spec for gas monitoring at atmospheric pressure.
Incorporating the latest Cirrus2 hardware, the Cirrus2 has been designed to meet all the traditional requirements for a
bench top RGA sensor, but offers data collection speeds in the milliseconds, even over the full dynamic range -
unachievable with previous technologies.
Analogue and digital interfaces are provided for integrated systems and future technologies.
The Cirrus2 is designed to be operated in several ways:
From a host computer – an IBM compatible PC or MAC running the MKS Process Eye Professional or EasyView
software package.
PC or MAC using a web browser such as Internet Explorer or Safari, or,
Integration into existing systems controlling through the use of the ASCII protocol command set.
This manual focuses on the Cirrus2hardware and should be used in conjunction with the relevant user interface manual
during installation.
Any required network communications cards should be installed and configured prior to installing the Cirrus2, or RGA
software if supplied.
MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
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1. Specifications
Mechanical
Cirrus2
Dimensions:
430mm wide x 670mm deep (plus 100mm for connections) x 420mm tall
Weight:
34.5 kg
Analyser
Triple mass filter, 1-6amu, 1-200amu or 1-300amu, Faraday and SEM detector
Electrical
Power Inlet
100 to 120 VAC rms 47- 63Hz @ 6.3A rms
200 to 240 VAC rms 47- 63Hz @ 3.15A rms
Installation category (over voltage category) II to IEC664
Insulation Class I to IEC536
Fuses
Located on rear panel
All fuses are 20mm x 5mm H.R.C ceramic, 250VAC, characteristic (T) and compliant with IEC127
Environmental
Temperature range
0 to 400C, 80%RH non-condensing, operating and storage
Pollution degree 2 to EN61010
Enclosure IP20 to EN60529
MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
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Safety
IP20 to EN60529
The protective earth conductor of the power cord must be connected to the power source protective earth terminal.
There are no operator replaceable parts within the Cirrus2 unit.
The Cirrus2 must be used only in the manner specified in this document.
Connectors
The connectors for external circuits are for use only with MKS equipment, or equipment which has no accessible
hazardous live parts.
The external circuits must comply with the requirements of EN61010-1 section 6.6.1.
Ports for connection of accessories do not carry hazardous potentials.
Do not position the Cirrus2 so that it is difficult to unplug the supply power cord.
Installation Category II comprises mains powered, local level appliances.
Warning labels
Risk of electric shock
Affixed to the rear panel refer to:
Hazardous internal voltages that are exposed when the cover is removed
Risk of danger or malfunction
Read all instructions carefully before use
The control unit and signal ports are designed for connection to MKS accessories via MKS supplied cables
There are no accessible hazardous voltages or currents on these ports, MKS must be consulted before any non-MKS
supplied cables or accessories are connected to these ports
MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
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Hot surface
Affixed internally refers to hot surfaces around the oven
Heavy object
This equipment weighs in excess of 18kg and should be lifted by at least two people.
To avoid muscle strain and or back injury, movers should employ lifting aids and the correct lifting techniques
Ventilation
Do not obstruct any of the outer cover ventilation openings.
Allow a minimum clearance of 50mm all round.
Do not exceed the maximum operating ambient temperature.
MKS Instruments UK Ltd
Cirrus2 Hardware Manual – SP101017.100 June 2011
10
Additional Installation Maintenance and Operating Instructions
In order to comply with European regulations, the following procedures must be followed:
A) INSTALLATION
1. The installation procedures given in the operating and technical manuals must be followed in addition to these
instructions.
2. The mains power cable must conform to local regulations and must have a protective earth (PE) conductor securely
connected to the power plug protective earth contact.
3. Cables attached to all other ancillary signal and control ports must have a length of less than 3 meters. If greater
length is required, MKS Instruments Ltd. must be contacted for technical guidance on possible EMC and safety issues.
4. The vacuum system on which the analyser/RF head is mounted must be earthed, to a protective earth, preferably to
the same protective earth as the control unit.
B) OPERATION
1. The equipment is not authorised for use as a critical component in a life support or safety critical system without the
express written approval of MKS Instruments Ltd.
2. All instructions given in the operating manual must be followed.
3. Adjustments are strictly limited to those accessible from the control panel and computer keyboard and only when
running software supplied by MKS Instruments Ltd.
C) MAINTENANCE
WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE
EQUIPMENT
1. Maintenance functions must only be carried out by competent persons.
2. During the warranty period, faulty equipment must be returned to MKS Instruments, Spectra Products Ltd., unless
special arrangements are made.
3. There are no user serviceable parts in the electronic equipment. Certain components are EMC and safety critical and
must not be substituted. Replacement parts are available from MKS Instruments UK Ltd.
4. Equipment enclosures embody certain special fastenings and bonding devices that affect EMC and safety
performance. These must be correctly re-fitted after servicing.
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