Mindman MF01 Series User manual

Digital Flow Sensor

MF01 series

INSTRUCTION

MANUAL

201012

DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )

MF01 Contents

Product features..................................................................................................................................................................... 1

Application..................................................................................................................................................................................3

Thermal mass ow sensor principles.................................................................................................................4

Order example..........................................................................................................................................................................4

Specications...........................................................................................................................................................................5

Output type .................................................................................................................................................................................7

Pressure loss characteristics.....................................................................................................................................8

Installation instructions................................................................................................................................................... 9

● Piping ..................................................................................................................................................................................................9

● Mounting bracket.................................................................................................................................................................................9

● Wiring diagrams ................................................................................................................................................................................10

● Dimensions........................................................................................................................................................................................ 11

● Mounting accessories........................................................................................................................................................................12

How to use.................................................................................................................................................................................13

● Names and functions of individual parts ...........................................................................................................................................13

● Internal structure ...............................................................................................................................................................................14

● Functions instructions........................................................................................................................................................................15

Functions setting mode .................................................................................................................................................................15

Measurement mode ......................................................................................................................................................................16

● Operation setting instructions............................................................................................................................................................17

[F-01] OUT1 setting selection .......................................................................................................................................................17

[F-02] OUT2 setting selection .......................................................................................................................................................18

[F-03] LCD display color selection ................................................................................................................................................19

[F-04] Response time selection.....................................................................................................................................................19

[F-05] Display refresh time selection............................................................................................................................................. 20

[F-06] Unit selection ......................................................................................................................................................................20

[F-07] Flow reference standard selection...................................................................................................................................... 20

[F-08] Display rotation ...................................................................................................................................................................20

[F-09] Accumulated value hold selection.......................................................................................................................................21

[F-10] Flow sensor display mode selection ...................................................................................................................................21

[F-91] Power-save mode selection................................................................................................................................................ 22

[F-92] External input selection.......................................................................................................................................................22

[F-93] Modbus RTU setting ...........................................................................................................................................................23

[F-94] Fine adjustment setting.......................................................................................................................................................24

[F-95] Forced output function ........................................................................................................................................................24

[F-99] Reset to the default setting .................................................................................................................................................25

Instantaneous ow zero adjustment function ................................................................................................................................25

Reset accumulated ow function ..................................................................................................................................................25

Peak value display ........................................................................................................................................................................25

Bottom value display .....................................................................................................................................................................26

Key lock / Unlock mode.................................................................................................................................................................26

Modbus RTU instruction...............................................................................................................................................26

Error code instruction.....................................................................................................................................................28

Caution for safety................................................................................................................................................................ 29

Flow

Indicator accuracy ± 3% F.S.

Repeatability ± 1% F.S.

Digital display Switch output Analog output Accumulated pulse output

Instantaneous ow value

Accumulated ow value

NPN output

PNP output

Voltage output 1~5V

Current output 4~20 mA 50 ms pulse output

DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )

MF01 Product features

Cost Control

User-friendly

High Performance

Multiple output function

High Precision

DRY AIR, N2

RS-485 MODBUS

CONTROL

30.0

OUT1 OUT2

L/min

DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )

MF01 Product features

Screen Invertible

Display can be vertically

inverted. To set and watch

monitor easily.

Accumulated ow rate

display at a glance

Accumulated ow rate display

Flow rate (L/min)

MF01-005

MF01-010

MF01-050

MF01-100

MF01-500

MF01-101

MF01-201

Wide range of ow rates

0 0.5 1 5 10 50 100 200

30.0

OUT1 OUT2

L/min

8205

Screen invertible

DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )

MF01 Application

Application

Paint and coating ow monitoring

Air ow and pressure management of paint and

coating processes.

Application

Laser welding monitoring

Precision management of shielding gas,

ow rate and pressure.

30.0

L/min

30.0

L/min

DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )

MF01 Application

Application

Suction operation

Detect the suction state of micro-

electronic parts by ow rate.

Application

Leakage detect

Container with gas and inspect

whether it leaks.

Application

Electronic part installation

Control the tension of gold wire for

bonding electronic parts.

Application

Air consumption

monitoring

Monitor air consumption of devices.

MF01 – 005 – 010 – R6

MP – A26

MODEL

OPTION PARTS

PORT SIZE OUTPUT SPEC.

FLOW RATE

RANGE

R6: ø6 mm, for ow rate range

005, 010, 050, 100, 500.

R8: ø8 mm, for ow rate range

101, 201.

F1C: Rc1/8", with internal threads,

for ow rate range

005, 010, 050, 100, 500

F4C: Rc1/4", with internal threads,

for ow rate range 101, 201

010: 2 NPN output +

Analog output 1 ~ 5 V

011: 2 NPN output +

Analog output 4 ~ 20 mA

02 : 2 NPN output + RS485

030: 2 PNP output +

Analog output 1 ~ 5 V

031: 2 PNP output +

Analog output 4 ~ 20 mA

04 : 2 PNP output + RS485

005: 500 (ml/min)

010: 1000 (ml/min)

050: 5 (l/min)

100: 10 (l/min)

500: 50 (l/min)

101: 100 (l/min)

201: 200 (l/min)

Thermal mass wo sensor principles

Order example

Mounting accessories

Symmetric

temperature prole

(a) No ow

In the absence of ow, the heat

from the heater spreads evenly

left and right, so the temperature

distribution is like (a).

(b) Small ow

When ow begins, the inlet side

is cooled by the ow, the outlet

side is warmed by the heat of the

inlet side of the heater, and the

temperature distribution is like (b).

When the ow increases, it

becomes a distribution like (C).

Since the temperature distribution

before and after the heater is

proportional to the ow rate, the

ow rate can be determined from

the ratio.

Temperature

Sensor 1

Temperature

Sensor 1

Temperature

Sensor 1

Temperature

Sensor 2

Temperature

Sensor 2

Temperature

Sensor 2

Heating

Element

Heating

Element

Heating

Element

Skewed

temperature prole

Small Flow

Skewed

temperature prole

Large Flow

MODEL

DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )

MF01 Thermal mass ow sensor principles / Order example

A26: Mounting bracket (BT-26)

B4: Panel adapter (PA-G)

C4: Panel adapter + Front protective lid (PA-H)

A26 B4 C4

DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )

MF01 Specications

Model 005 010 050 100 500 101 201

Fluid Dry air, N2, Non-corrosive / Non-ammable gas

Measured ow rate range 0 ~ 500 mL/min 0 ~ 1000 mL/min 0 ~ 5 L/min 0 ~ 10 L/min 0 ~ 50 L/min 0 ~ 100 L/min 0 ~ 200 L/min

Flow direction Unidirection

Display

Display 4 digital (Flow) × 8 digital (Accumulated ow), 7 segment LCD display ( Red / Green / Orange )

Instant ow

rate

Display range 0 ~ 525 mL/min 0 ~ 1050 mL/min 0 ~ 5.25 L/min 0 ~ 10.50 L/min 0 ~ 52.5 L/min 0 ~ 105.0 L/min 0 ~ 210 L/min

Min. setting

scale

LPM 1 mL/min 0.01 L/min 0.1 L/min 1 L/min

CFM *1 0.01 ft3/min 0.1 ft3/min 1 ft3/min

Accumulated

Flow

Display range 99999999 mL 999999.99 L 9999999.9 L 99999999 L

Min. Setting Scale *1 1 mL 0.01 L 0.1 L 1 L

0.01 ft30.1 ft31 ft3

Accuracy

Guaranteed range 2 ~ 100 % F.S.

Indicator accuracy ± 3 % F.S. ± 1 digit *2

Analog output accuracy ± 5 % F.S. *2

Repeatability ± 1 % F.S. ± 1 digit *3

Linearity ± 3 % F.S. *3

Temp. characteristic ± 2 % F.S. ( 15 ~ 35 °C ) ; ± 5 % F.S. ( 0 ~ 15°C, 35~ 50°C ) ( compare with *3 )

Pressure characteristic ± 5 % F.S. ± 1 digit *4

Switch output

2 NPN : open collector 2 outputs

Max. Load Current : 125 mA

Max. Supply Voltage : 28 V DC

Voltage Drop : ≤ 1.5 V

2 PNP : open collector 2 outputs

Max. Load Current : 125 mA

Max. Supply Voltage : 24 V DC

Voltage Drop : ≤ 1.5 V

Response time 800 ms ( 50 ms, 80 ms, 120 ms, 200 ms, 400 ms, 1500 ms selectable )

Output mode Hysteresis Mode, Window Comparator Mode, Accumulated Output, Accumulated Pulse Output

Hysteresis Adjustable

Output short circuit proterction Yes

Accumulated pulse output *1 5 mL/Pulse 10 mL/Pulse 0.05 L/Pulse 0.1 L/Pulse 0.5 L/Pulse 1 L/Pulse 2 L/Pulse

0.02 ft3/Pulse 0.04 ft3/Pulse 0.2 ft3/Pulse 0.4 ft3/Pulse 2 ft3/Pulse 4 ft3/Pulse 7 ft3/Pulse

Analog

output

Voltage output Voltage output range : 1 ~ 5 V ; Output impedance : 1 KΩ

Current output Current output range : 4 ~ 20 mA ; Load impedance : ≤ 300 Ω

Response time ≤ 100 ms

External input Non-voltage input, < 0.4 V, ≥ 30 ms

Communication interface RS-485 *5

Power supply voltage 12 ~ 24 V DC ± 10 %, Ripple ( P-P ) ≤ 10 %

Current consumption ≤ 50 mA

Environment

Working pressure range -0.09 ~ 0.8 MPa

Withstand pressure 1 MPa

Enclosure IP40

Working Fluid Temp. 0 ~ 50°C ( No condensation or freezing )

Ambient Temp. Range Operation : 0 ~ 50°C ; Storage : -10 ~ 60°C ( No condensation or freezing )

Ambient Humidity Range Operation / Storage : 35 ~ 85 % R.H. ( No condensation )

Insulation Resistance ≥ 50 MΩ ( 500 V DC, between case and lead wire )

Withstand Voltage 1000 V AC in 1-min ( between case and lead wire )

Vibration Total amplitude 1.5 mm or 10 G, 10 Hz ~ 55 Hz ~ 10 Hz scan for 1 minute, 2 hours each direction of X, Y and Z

Shock 100 m/s² ( 10 G ), 3 times each in direction of X, Y and Z

EMC IEC 61000-6-2, IEC 61000-6-4

Lead wire ø4 Oil-resistance cable (PVC) - 26 AWG ( 0.15 mm2 ) - 6 cores

Port

Size

R6, F1C

R8, F4C

Weight (with 2 meter lead wire) Approx. 109.3 g ( ø6 port ) ; Approx. 112.7 g ( ø8 port ); Approx. 118 g (Rc1/4 port); Approx. 128.5 g (Rc1/8 port)

*1. CFM ( ft3/min*10-2 ) and ft3*10-2.

*2. Condition: Inlet pressure: 300 kPa , Outlet pressure: 1 atmospheric pressure, 25 °C.

*3. Condition: Outlet pressure: 1 atmospheric pressure, 25 °C.

*4. -0.09 ~ 0.8 MPa, Outlet pressure: 1 atmospheric pressure, 25 °C.

*5. This function only available for Output Specication -02 and -04.

Specications

DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )

MF01 Output type

Normal open mode

● Hysteresis Mode

FH-1

(FH-2)

FH-1

(FH-2)

FH-1

(FH-2)

FH-1

(FH-2)

FL-1

(FL-2)

FL-1

(FL-2)

AdH1

AdL1

AdH2

AdL2

AdH1

AdL1

AdH2

AdL2

FL-1

(FL-2)

FL-1

(FL-2)

OFF

0 L 0 L Time

HysHys

50ms

HysHys

Time

OFF

FlowFlowFlow

● Window Comparator Mode

● Accumulated Output Mode ● Accumulated Output Mode

● Accumulated Pulse Output Mode

● Window Comparator Mode

● Hysteresis Mode

Normal close mode

NOTE

*1. In case hysteresis is set at less than or equal to 2 digits, switch output may chatter if input

detected uctuates near the set point.

*2. When using window comparator mode, the difference between two set points must be greater

than the xed hysteresis, otherwise will cause the switch output to malfunction.

Flow Range 500mL 1000mL 5L 10L 50L 100L 200L

Pulse Output Rate 5mL 10mL 0.05L 0.1L 0.5L 1L 2L

Time

DIGITAL FLOW SENSOR ( INSTRUCTION MANUAL )

MF01 Pressure loss characteristics

Pressure loss (kPa)

Flow rate (mL/min)

100 200 300 400 500

0.006

0.005

0.004

0.003

0.002

0.001

0.1 MPa

0.2

0.3

0.35

0.4

0.5

Pressure loss (kPa)

Flow rate (mL/min)

200 400 600 800 1000

0.018

0.015

0.012

0.009

0.006

0.003

0.1 MPa

0.2

0.3 / 0.35 / 0.4

0.5

Pressure loss (kPa)

Flow rate (L/min)

1 2 3 4 5

0.08

0.07

0.06

0.05

0.04

0.03

0.02

0.01

0.1 MPa

0.2

0.3

0.35

0.4

0.5

Pressure loss (kPa)

Flow rate (L/min)

10 20 30 40 50

0.1 MPa

0.2

0.3

0.35

0.4

0.5

Pressure loss (kPa)

Flow rate (L/min)

50 100 150 200

0.3 MPa

0.35

0.4

0.5

Pressure loss (kPa)

Flow rate (L/min)

2 4 6 8 10

0.25

0.20

0.15

0.10

0.05

0.1 MPa

0.2

0.3

0.35

0.4

0.5

Pressure loss (kPa)

Flow rate (L/min)

20 40 60 80 100

0.2 MPa

0.3

0.35

0.4

0.5

MF01-005 MF01-010

MF01-050

MF01-500

MF01-100

MF01-101

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