LEYBOLD TURBOVAC 151 User manual

TURBOVAC

Turbomolecular pumps with external frequency converter

TURBOVAC 151, 151 C

TURBOVAC 361, 361 C

TURBOVAC 600 C

TURBOVAC 1000 C

TURBOVAC 1100 C

and pumps modified by Leybold

Incorporation Declaration & Operating Instructions

GA05118_002_C1

Contents

GA05118_002_C1 - 11/2017 - © Leybold

Page

0 Important Safety Information 5

0.1 Mechanical hazards 5

0.2 Electrical hazards 6

0.3 Thermal hazards 7

0.4 Hazards caused by materials and substances 7

0.5 Danger of ignition 8

0.6 Dangers in connection with safety-related

measures and precautions 8

0.7 Risk of damaging the pump 8

1 Description 9

1.1 Design 9

1.2 Standard equipment 9

1.4 Ordering data 13

1.5 Accessories 13

2 Transport and storing 15

3 Installation 16

3.1 Conforming utilization 16

3.1.1 Non-conforming utilization 16

3.2 Operating environment 18

3.3 Fitting accessories 18

3.4 Attach the pump to the vacuum chamber 19

3.5 Forevacuum connection 25

3.6 Connect the cooling 26

3.7 Connecting the purge gas and venting device 29

3.8 Connecting the frequency converter 30

4 Operation 32

4.1 Media compatibility / purge gas 32

4.2 Start-up 32

4.3 Switching on 33

4.4 Shutting down 34

4.5 Venting 35

4.6 Bakeout 36

4.7 Removing the pump from the system 36

Contents

GA05118_002_C1 - 11/2017 - © Leybold

5 Maintenance 37

5.1 Cleaning 37

5.2 Leybold Service 37

6 Troubleshooting 38

7 Waste Disposal 40

EU Declaration of Conformity 41

EC Declaration of Incorporation 42

Original installation and operating instructions.

Safety Information

GA05118_002_C1 - 11/2017 - © Leybold

Obligation to Provide Information

Before installing and commissioning the pump, carefully read these

Operating Instructions and follow the information so as to ensure optimum

and safe working right from the start.

The Leybold TURBOVAC has been designed for safe and efficient operation

when used properly and in accordance with these Operating Instructions. It is

the responsibility of the user to carefully read and strictly observe all safety

precautions described in this section and throughout the Operating

Instructions. The pump must only be operated in the proper condition and

under the conditions described in the Operating Instructions. It must be oper-

ated and maintained by trained personnel only. Consult local, state, and

national agencies regarding specific requirements and regulations. Address

any further safety, operation and/or maintenance questions to our nearest

office.

DANGER indicates an imminently hazardous situation which, if not avoid-

ed, will result in death or serious injury.

WARNING indicates a potentially hazardous situation which, if not

avoided, could result in death or serious injury.

CAUTION indicates a potentially hazardous situation which, if not avoided,

could result in minor or moderate injury.

NOTICE is used to notify users of installation, operation, programming or

maintenance information that is important, but not hazard related.

We reserve the right to alter the design or any data given in these Operating

Instructions. The illustrations are not binding.

Retain the Operating Instructions for further use.

NOTICE

DANGER

WARNING

CAUTION

NOTICE

Safety Information

GA05118_002_C1 - 11/2017 - © Leybold

0 Important Safety Information

0.1 Mechanical hazards

1 Avoid exposing any part of the human body to the vacuum.

2 The pressure in the pump must not exceed 1.4 bar (absolute).

3 The pump is intended for generating a vacuum only. If there is a risk of

an overpressure within the system and the pump, then the pump must

be protected against this, by way of an overpressure safety valve, for

example.

4 Vent the pump only up to atmospheric pressure.

5 When using the pump with a purge gas valve, protect the purge gas

supply such that in the event of a malfunction no overpressure can

occur within the system.

6 The pump must be firmly mounted to the vacuum chamber. If the

mounting is not sturdy enough, pump blockage could cause the pump

to break loose; internal pump components could be thrown in all

directions. Never operate the pump (in bench testing, for example)

without proper flanging to the vacuum chamber. Observe the informa-

tion in Section 3.4.

7 We recommend to change the rotor after 80,000 hours of operation at

the latest. Owing to high rotor speeds and high temperatures, the ser-

vice life of the rotor is limited and is also much dependent on the type

of operation and the particular application. Please consult us regarding

maintenance specifically matching the requirements of your applica-

tion.

If the rotor is changed too late, it may be destroyed. Thus in the flange

mounts high forces and torque conditions can occur. The mounting

screws for the pump may be torn off. When using clamped flange

connections at the housing or with components above the housing,

sudden twisting of the entire pump can be experienced.

8 Turbopumps as described in the following operation manual contain a

high portion of kinetic energy due to their high rotational speed in

combination with the specific rotor mass. In case of a malfunction of

the system, for example rotor/stator contact or even a rotor crash, the

rotational energy is released.

9 To avoid the destruction of the equipment and to prevent injuries of the

operating staff the leading European manufacturers of vacuum pumps

strictly recommend to follow the installation instructions as given in this

manual.

WARNING

Safety Information

GA05118_002_C1 - 11/2017 - © Leybold

0.2 Electrical hazards

1 The electrical connection must only be provided by a trained person.

Please observe the national regulations in the country of use like EN

50110-1 for Europe, for example.

2 Lethal voltages are present at the mains connections. Before starting

with any maintenance and service work, de-energise (lockout/tagout)

the product first.

3 Unplug any connectors only when the mains voltage is switched off

and the pump does no longer turn.

4 Unauthorized device conversion and modifications are prohibited for

safety reasons.

5 Hazardous voltages are present within the frequency converter. When

coming into contact with these, death or severe injury can result. After

the pump has arrived at standstill, disconnect the frequency converter

from the mains power and prevent it against being switched on inad-

vertently (lockout/tagout) before opening it. Basically there is no reason

why the frequency converter should be opened. There are no user ser-

viceable parts inside.

6 When the connector cable is attached, the outputs at the frequency

converter are not free of voltage.

7 Lay connecting lines so that they cannot be damaged. Protect the

lines against humidity and contact with water. Avoid any heat stress on

the line due to unfavourable laying conditions.

8 Suitably support the connecting lines so that the pumps are not

exposed to any major mechanical stress.

9 Do not expose pump, frequency converter and the connections to

dripping water. Note the information on the IP type of protection.

10 When storing pump, frequency converter and connecting lines in a

humid atmosphere, these can suffer corrosion. Corrosion gives rise to

conductive deposits which in turn can cause short-circuits and reduce

the insulation levels of electrical components

11 Transport pump, frequency converter and connecting cables only in

their original packaging so as to avoid any mechanical damage which

in turn may reduce air gaps and creepage distances.

12 When applying external voltages above 42 V to the connection termi-

nals, observe the applicable VDE safety regulations!

13 Make the electrical connections only after pump and accessories (e.g.

air cooler) have been installed mechanically.

DANGER

Safety Information

GA05118_002_C1 - 11/2017 - © Leybold

0.3 Thermal hazards

1 Handle the equipment only while vented and cooled down.

2 During operation of the pump certain areas can get so hot (80 °C

max.) so that there is the risk of suffering burns. Protect hot parts

against being touched.

3 Note the warning information on the housing surface. If these warning

notices have been removed, covered or obstructed, include corre-

sponding additional warning notices.

0.4 Hazards caused by materials and substances

1 The pump is not suited for pumping of reactive or corrosive media.

If the rotor is attacked by process gases, it can suffer destruction.

Thus in the flange mounts high forces and torque conditions can

occur. The mounting screws for the pump may be torn off. When

using clamped flange connections at the housing or with components

above the housing, sudden twisting of the entire pump can be experi-

enced.

2 When pumping dusty media, use a dust filter.

3 If low concentration corrosive or reactive gases are being pumped,

then operate the pump with purge gas.

4 Please consult us as to which types of pump are required for specific

processes and applications.

5 The forevacuum line must be tight. Hazardous gases can escape at

leaks or the gases being pumped can react with air or humidity.

A leak search will always be required after having installed the pump

and after service work on the vacuum.

Upon delivery the pump has an integral leak rate of < 5 · 10-7 mbar·l/s.

When pumping toxic gases we recommend a leak search on a regular

basis.

6 If the pump has previously handled hazardous gases, implement the

proper precautionary measures before opening the intake or exhaust

connection.

Before opening the pump, purge it for a longer period of time with an

inert gas.

If necessary, use gloves, a respirator and/or protective clothing and

work under an exhaust hood. Firmly seal off the pump.

When shipping the contaminated pump for servicing, please also state

the type of hazard. For this you must use a form which we have pre-

pared for you.

7 Contaminated parts can be detrimental to health and environment.

Before beginning with any work, first find out whether any parts are

contaminated. Adhere to the relevant regulations and take the neces-

sary precautions when handling contaminated parts.

CAUTION

DANGER

Safety Information

GA05118_002_C1 - 11/2017 - © Leybold

0.5 Danger of ignition

1 During operation the pressure inside the turbomolecular pump is so

low that there is no danger of ignition (at pressures below about 100

mbar). A hazardous condition will be created if flammable mixtures

enter the hot pump at pressures above 100 mbar. During operation

the pump can reach temperatures as high as 120 °C internally, and at

parts of the outside surfaces 80 °C. Sparks could occur in case of

damage to the pump and these could ignite explosive mixtures.

Also note the safety information provided by the gas supplier.

0.6 Dangers in connection with safety-related

measures and precautions

1 The frequency converter is not equipped with its own emergency shut

down switch. Such a facility needs to be provided from the side of the

system.

0.7 Risk of damaging the pump

1 Never touch the rotor. Touching the rotor may cause injury and

damage the rotor bearing.

2 Foreign objects which enter the pump through the intake would cause

serious damage to the rotor. That’s why we recommend installing an

inlet screen. Damages caused during operation without the inlet screen

are excluded from warranty.

3 The contact surfaces of pump housing, vacuum system and centering

ring must be free of grease and dry so as to ensure sufficient stability

in case the rotor seizes.

4 Disconnect and connect the cable connections only while the pump is

turning no longer (green status LED off) and with the mains power

switched off (yellow power LED off). Otherwise there is the risk of dam-

aging the frequency converter.

5 Exposure of the pump to accelerating forces must be avoided or

reduced to such an extent that the rotor unit will not be excited by

vibrations. In the case of critical applications you must consult our

Applications Dept. first.

CAUTION

NOTICE

Description

GA05118_002_C1 - 11/2017 - © Leybold

1 Description

1.1 Design

The TURBOVAC models 151 to 1100 are turbomolecular pumps featuring

lifetime lubricated bearings. These units are engineered to pump vacuum

chambers down to pressures in the high-vacuum range. A TURBOTRONIK

or Turbo.Drive TD20 classic frequency converter and a forevacuum pump are

required for the operation of the TURBOVAC.

1.2 Standard equipment

The TURBOVAC is shipped in a sealed PE bag which also contains a desic-

cant. The maximum effective life of the desiccant is one year.

■For high-vacuum port with ISO-K flange:

Inlet screen, centering ring with FPM sealing ring; outer ring.

■For high-vacuum port with CF flange: Inlet screen.

■For high-vacuum port with ANSI flange: Inlet screen.

Forevacuum port: Centering ring with O-ring and clamping ring.

Both the purge gas port and the venting port are blanked off for shipping.

In addition the pivoted threaded fittings used to make the coolant connection

are included as standard equipment for the TURBOVAC 151, 361 and 600; if

needed, they can be used to replace the hose nipples installed at the factory.

The electronic frequency converter and the connector cables required for

operation are not included as standard equipment with the pump.

——————————

PE = Polyethylene

FPM = Fluoroelastomer, resistant to temperatures of up to 150°C (300 °F)

Description

GA05118_002_C1 - 11/2017 - © Leybold

TURBOVAC 151 /

151 C

TURBOVAC 361 / 361 C

High-vacuum port DN 100 ISO-K / 100 CF 100 ISO-K • 100 CF 160 ISO-K • 160 CF

Pumping speed

I · s-1

145

150

135

115

345

350

340

400

–

380

370

Max. gas throughput

mbar ·

I · s-1

1,5

1,3

2,5

Compression

1 · 109

2 · 104

8 · 102

1 · 109

6 · 104

3 · 103

1 · 109

6 · 104

3 · 103

Speed min-1 49 980 45 000 45 000

Ultimate pressure mbar < 1 · 10-10

Max. Inlet pressure (permanent)

with water cooling

mbar 5 · 10-2

Max. forevacuum pressure for N2mbar 5 · 10-1

Recommended forevacuum pump TRIVAC D 4 B bis D 16 B D 16 B bis D 25 B D 16 B bis D 25 B

Run-up time to 95% nominal speed min ≈ 2

Forevacuum port DN 25 KF

Purge gas / vent port DN 10 KF

Cooling water connection (hose nozzle) mm 10

Weight, approx. kg 8 12 12

Max. power consumption / at ultimate

pressure

VA 680 / 480

Max. ambient temperature at operation °C 55

Storing temperature °C – 10 bis + 60

Max. bakeout temperature at CF flange °C 100

Fig. 1.1 TURBOVAC 151 C; TURBOVAC 361 C similar

High-vacuum port

Forevacuum port

Electrical connection

Vent port

Connection for

water cooling Purge

gas port

This manual suits for next models

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