Edwards IGx User manual

A546–00–880

Issue E Original

Instruction Manual

iGX Dry Pumping Systems

Description Item Number

iGX100L 200 V – 230 V 50/60 Hz A546-10-958

iGX100L 380 V – 460 V 50/60 Hz A546-10-959

iGX100L 200 V – 230 V 50/60 Hz SS A548-10-958

iGX100L 380 V – 460 V 50/60 Hz SS A548-10-959

iGX600L 200 V – 230 V 50/60 Hz A546-30-958

iGX600L 380 V – 460 V 50/60 Hz A546-30-959

iGX600L 200 V – 230 V 50/60 Hz SS A548-30-958

iGX600L 380 V – 460 V 50/60 Hz SS A548-30-959

iGX100N 200 V – 230 V 50/60 Hz A546-11-958

iGX100N 380 V – 460 V 50/60 Hz A546-11-959

iGX100N 200 V – 230 V 50/60 Hz SS A548-11-958

iGX600N 200 V – 230 V 50/60 Hz A546-31-958

iGX600N 380 V – 460 V 50/60 Hz A546-31-959

Description Item Number

iGX1000N 200 V – 230 V 50 Hz A546-81-958

iGX1000N 380 V – 460 V 50 Hz A546-81-959

iGX1000N 200 V – 230 V 50/60 Hz SS A548-81-958

iGX1000N 200 V - 230 V 50/60 Hz SS A543-81-958

iGX100M 200 V – 230 V 50/60 Hz A546-12-958

iGX100M 380 V – 460 V 50/60 Hz A546-12-959

iGX100M 200 V – 230 V 50/60 Hz SS A548-12-958

iGX100MTi 200 V – 230 V 50/60 Hz A546-48-958

iGX100MTi 380 V – 460 V 50/60 Hz A546-48-959

iGX100MTi 200 V – 230 V 50/60 Hz SS A548-48-958

iGX100MTi 200 V – 230 V 50/60 Hz SS A543-48-958

iGX600M 200 V – 230 V 50/60 Hz A546-32-958

iGX600M 380 V – 460 V 50/60 Hz A546-32-959

iGX600M 200 V – 230 V 50/60 Hz SS A548-32-958

iGX600M 200 V – 230 V 50/60 Hz SS A543-32-958

This product has been manufactured under a quality system certified to ISO9001:2008

Declaration of Conformity

We, Edwards Limited,

Crawley Business Quarter,

Manor Royal,

Crawley,

West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised

to assemble the technical file, that the product(s)

iGX100L 200-230V 50/60Hz A546-10-958 iGX1000N 200-230V 50/60Hz A546-81-958

iGX100L 380-460V 50/60Hz A546-10-959 iGX1000N 380-460V 50/60Hz A546-81-959

iGX100L 200-230V 50/60Hz SS A548-10-958 iGX1000N 200-230V 50/60Hz SS A548-81-958

iGX100 380-460V 50/60Hz SS A548-10-959 iGX100M 200-230V 50/60Hz A546-12-958

iGX600L 200-230V 50/60Hz A546-30-958 iGX100M 380-460V 50/60Hz A546-12-959

iGX600L 380-460V 50/60Hz A546-30-959 iGX100M 200-230V 50/60Hz SS A548-12-958

iGX600L 200-230V 50/60Hz SS A548-30-958 iGX100MTi 200-230V 50/60Hz A546-48-958

iGX600L 200-230V 50/60Hz SS A548-30-959 iGX100MTi 380-460V 50/60Hz A546-48-959

iGX100N 200-230V 50/60Hz A546-11-958 iGX100MTi 200-230V 50/60Hz SS A548-48-958

iGX100N 380-460V 50/60Hz A546-11-959 iGX600M 200-230V 50/60Hz A546-32-958

iGX100N 200-230V 50/60Hz SS A548-11-958 iGX600M 380-460V 50/60Hz A546-32-958

iGX600N 200-230V 50/60Hz A546-31-958 iGX600M 200-230V 50/60Hz SS A548-32-958

iGX600N 380-460V 50/60Hz A546-31-959

to which this declaration relates is in conformity with the following standard(s) or other

normative document(s)

EN1012-2:1996, A1: 2009 Compressors and Vacuum Pumps. Safety Requirements.

VacuumPumps

EN61010-1: 2010 Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. General Requirements

EN 61326-1: 2006 Electrical equipment for measurement, control and laboratory

Use. EMC requirements. General requirements.

UL61010A: 2002 Safety requirements for electrical equipment for measurement,

Control and laboratory use – Part 1: General requirements

SEMI S2-0703 Environmental Health and Safety Guideline for semiconductor

Manufacturing Equipment.

and fulfils all the relevant provisions of

2006/42/EC Machinery Directive

2006/95/EC Low Voltage Directive

2004/108/EC Electromagnetic Compatibility (EMC) Directive

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

Mr Mark Hope, Global Technical Support Manage

Date and Place

P200-01-960 Issue C

21.10.2013, Burgess Hill

P601-00-700

IssueD

Product Information for China

Equipment types:

iH Vacuum Pump Range GX Vacuum Pump Range DiHxK Vacuum Pump Range

iF Vacuum Pump Range iHxK Vacuum Pump Range DiFxK Vacuum Pump Range

iGX Vacuum Pump Range iFxK Vacuum Pump Range EPX Vacuum Pump Range

iPX Vacuum Pump Range iQ/QDP/QMB Vacuum Pump Ranges iL Vacuum Pump Range

Product Label Overshipper Label Pallet Marking

2020

CBCB NWNW

Indicates toxic or hazardous substance contained

in at least one of the homogeneous materials used

for this part is above the limit requirement in

SJ/T11363-2006.

Environmental Protection Use Period is 20 years.

Recyclable Cardboard Recyclable Natural Wood

Materials Content Declaration & Environmental Protection Use Period

The Chinese regulatory requirement on the Control of Pollution Caused by Electronic Information Products No. 39

(also known as ‘China RoHS’) mandates that manufacturers of certain categories of electronic products sold in

China after 1st March 2007 –

Mark the product and packaging

Define the Product’s Environment Protection Use Period (EPUP)

Provide a Materials Content Declaration.

Environmental Protection Use Period (EPUP)

This is the period in years during which the toxic or hazardous substances or elements contained in this product

will not leak or mutate under normal operating conditions so that the use of such electronic information products

will not result in any severe environmental pollution, any bodily injury or damage to any assets.

The Environmental Protection Use Period is 20 years for this product.

For the purposes of EPUP, normal operating conditions are considered to be use in accordance with the product’s

instruction manual.

Materials Content Declaration

Toxic or Hazardous Substances and Elements

Part name Lead

(Pb) Mercury

(Hg) Cadmium

(Cd)

Hexavalent

Chromium

(Cr VI)

Polybrominated

biphenyls (PBB)

Polybrominated

diphenyl ethers

(PBDE)

Cartridge O O X XOO

Enclosure O OXXOO

Electronics and

Controls XOXXOO

Cooling system O OXXOO

Purge system O OXXOO

O: Indicates that this toxic or hazardous substance contained in all of the homogeneous materials for this

part is below the limit requirement in SJ/T11363-2006.

X: Indicates that this toxic or hazardous substance contained in at least one of the homogeneous materials

used for this part is above the limit requirement in SJ/T11363-2006.

Note 1. Table applies to all product types listed above.

This page has been intentionally left blank.

Edwards and the Edwards logo are trade marks of Edwards Limited.

Contents

A546–00–880 Issue E

Contents

Section Page

1 Introduction .......................................................................................1

1.1 Scope and definitions ................................................................................................... 1

1.2 Applications ............................................................................................................... 2

1.3 The iGXL system ......................................................................................................... 2

1.4 Priority of control ........................................................................................................ 4

1.5 Active utility control .................................................................................................... 5

2 Technical Data ....................................................................................7

2.1 General technical data .................................................................................................. 7

2.2 Electrical Data ........................................................................................................... 8

2.3 Loading .................................................................................................................... 8

2.4 Connections ............................................................................................................... 9

2.5 General Data ............................................................................................................10

3 Installation ....................................................................................... 11

3.1 Locate the dry pumping system ......................................................................................12

3.2 Lubrication ...............................................................................................................13

3.3 Connect the iGX system to the vacuum/exhaust system and interstage connection (if fitted) ............13

3.4 Connect to the factory extraction system (optional) .............................................................14

3.5 Connect the nitrogen supply (if provided) ..........................................................................14

3.5.1 Flammable/pyrophoric materials ....................................................................................14

3.5.2 Gas Purges ...............................................................................................................15

3.6 Leak-test the iGX system ..............................................................................................15

3.7 Connect the electrical supply .........................................................................................16

3.8 Connect an additional RF earth (ground) (optional) ..............................................................18

3.9 Connect to the emergency stop circuit .............................................................................18

3.10 Connect the cooling water hoses .....................................................................................19

3.11 Accessories ...............................................................................................................19

3.12 Commission the iGX system ...........................................................................................20

3.13 Install additional safety equipment ..................................................................................22

4 Operation ........................................................................................ 23

4.1 Start-up ..................................................................................................................23

4.2 Status indicators ........................................................................................................24

4.3 Manual shut-down ......................................................................................................24

4.4 Automatic shut-down ..................................................................................................25

4.5 Unplanned shutdown and alarms .....................................................................................25

4.6 Emergency stop .........................................................................................................25

4.7 Restart the pump after an emergency stop or automatic shut-down ..........................................26

4.8 Single equipment monitor (SEM) .....................................................................................26

5 Maintenance ..................................................................................... 27

5.1 Safety and maintenance frequency ..................................................................................27

5.2 Relocate the system for maintenance ...............................................................................28

5.3 Draining the cooling water ............................................................................................29

5.4 Cleaning the pump ......................................................................................................30

6 Transportation, Storage and Disposal ....................................................... 31

6.1 Transportation ..........................................................................................................31

6.2 Storage ...................................................................................................................31

CG 01/14

A546–00–880 Issue E

Edwards and the Edwards logo are trade marks of Edwards Limited.

Contents

6.3 Disposal ...................................................................................................................31

7 Service, Spares and Accessories .............................................................. 33

7.1 Introduction .............................................................................................................33

7.2 Service ....................................................................................................................33

7.3 Ordering accessories ...................................................................................................34

For return of equipment, complete the HS Forms at the end of this manual.

Illustrations

Figure Page

1 iGX Applications chart .................................................................................................. 2

2 The controls/connectors ................................................................................................ 3

3 The rear status panel LED indicators ................................................................................. 4

4 The front panel controls ................................................................................................ 4

5 Priority of control ........................................................................................................ 5

6 Centre of gravity and levelling foot loads ........................................................................... 8

7 System arrangment to reduce effective footprint (if required) .................................................12

8 High and low volt coding pin arrangement .........................................................................17

9 Method for connecting phase wires ..................................................................................18

10 Connections to emergency stop circuit (systemable) .............................................................18

11 Installing 3/8" quick connect fittings (provided) ...................................................................20

12 Gas module access panel ..............................................................................................21

13 Flow tube (14 slm) ......................................................................................................21

14 Flow tube (4 slm) .......................................................................................................22

Edwards and the Edwards logo are trade marks of Edwards Limited.

Contents

A546–00–880 Issue E

Tables

Table Page

1 Technical data ........................................................................................................... 7

2 Technical data ........................................................................................................... 7

3 Electrical data ............................................................................................................ 8

4 Centre of gravity and levelling foot loads (Refer to Figure 6) .................................................... 8

5 iGX connector types ..................................................................................................... 9

6 Technical data ..........................................................................................................10

7 Safety sensors ...........................................................................................................25

8 Accessories ...............................................................................................................34

Associated publications

Publication title Publication number

Vacuum pump and vacuum system safety P400–40–100

Trademark credits

Fomblin®is a registered trademark of Ausimont SpA.

This page has been intentionally left blank.

A546–00–880 Issue E

Edwards and the Edwards logo are trade marks of Edwards Limited.

Introduction

A546–00–880 Issue E

1Introduction

1.1 Scope and definitions

This manual provides installation, operation and maintenance instructions for the Edwards iGX dry pumping systems.

The pump must be used as specified in this manual. Read this manual before installing and operating the pump.

Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be

obeyed. The use of WARNINGS and CAUTIONS is defined below.

CAUTION

Cautions are given where failure to observe the instruction could result in damage to the equipment, associated

equipment and process.

The units used throughout this manual conform to the SI international system of units of measurement

The following warning labels are on the pump:

WARNING

Warnings are given where failure to observe the instruction could result in injury or death to

people.

Warning – refer to accompanying

documentation. Warning – risk of electric shock.

Warning – hot surfaces. Warning – moving parts present.

Warning – heavy object. Warning - pressurised.

RF earth (ground). Protective earth (ground).

Warning - use protective equipment. Warning - Risk of explosion.

A546–00–880 Issue E

Edwards and the Edwards logo are trade marks of Edwards Limited.

Introduction

The pressurised and risk of explosion warnings only appear in this manual.

Material Safety Data Sheets for chemicals supplied by Edwards can be obtained by contacting Edwards.

1.2 Applications

If using the iGX system on an application for which it is not suitable (refer to Figure 1), the warranties may invalidate.

If in doubt, contact Edwards for advice as to the suitability of the iGX system for any particular application.

Figure 1 - iGX Applications chart

1.3 The iGXL system

Pumping a chemical that will attack the materials in contact with these process materials may, over time, result in

the internal contents of the pump becoming exposed to the external environment, which may constitute a safety

hazard. If in doubt, contact Edwards for advice as to the suitability of this pump for any particular application.

It is also a feature of this pump design that process gases are contained within the gearbox. This pump is not suitable

for use with flammable, hazardous, toxic or corrosive gases or material.

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