Ulvac UTM300B User manual

SK00-2200-AI-144-01(263-43163A)

INSTRUCTION MANUAL

TURBO MOLECULAR PUMP

Model

UTM300B

ULVAC, Inc.

Components Division

http://www.ulvac.co.jp/

Before using this product, be sure to read this operation

manual. Keep this manual with care to use at any time.

Introduction

Thank you for choosing the Turbo Molecular Pump.

Please read the instruction manual carefully before using turbo molecular pump, and save the

instruction manual for future reference.

Copyrights and Disclaimers

This document is copyrighted by ULVAC,Inc. Please refrain from reproducing or

copying part or all of this document without permission from ULVAC.

In an effort to improve the product, this document may be revised in the future without notice.

Every effort has been made to prepare an accurate and complete manual, but if an error or

omission should be discovered, revisions might not be possible immediately.

ULVAC does not take responsibility for any effects that may result from the use of this manual.

Precautions for Safe Operation

The instruction manual's nomenclature for warnings and precautions complies with

the following safety warning symbols.

Indicates a potentially hazardous situation which, if not avoided, could

result in serious injuly or possibly death.

Indicates a potentially hazardous situation which, if not avoided, may

result in minor to moderate injuly or equipment damage.

Emphasizes additional information that is provided to ensure the proper

use of this product.

Turbo molecular pump repair and/or power supply repair can be very hazardous.

Only trained technicians who are authorized by ULVAC may do service of

products.

Neither overhaul nor modify the pump proper and the controller without admission.

Doing so would impair safety of the pump proper.

Decisions on system compatibility should be made by the system designer or the person

deciding the specifications after conducting tests as necessary. The responsibility for

guaranteeing the expected performance and safety of the system lies with the person who

decides system compatibility.

WARNING

CAUTION

NOTICE

WARNING

iii

Do not operate the turbo molecular pump until safety is confirmed.

・The rotor assembly of the turbo molecular pump rotates at high speed. Large rapid shutdown

torque should be generated when abnormality occurs in the pump by any chance. Incidental

accident will cause the pump to drop out and to make a catastrophe if the pump is fixed by

insufficient method.

・Fix the pump to host equipment according to 5.1.2.2. The method to fix the pump is different

depending on the pump model and the size of inlet flange of the pump.

・Host equipment should be fixed to the floor so as not to move. Host equipment should be

designed to have enough margins in strength, in preparation for an emergency accident.

Do not remove or do maintenance the turbo molecular pump, before safety has been

confirmed.

・Please take an adequate safety precaution based on the result of risk assessment of

explosion, fire, corrosion, and toxicity, etc. that depends on process gasses.

・Please execute the maintenance task of the turbo molecular pump after shutting power off by

following proper procedure and confirming that the rotor has stopped completely

After having operated the turbo molecular pump for evacuation of corrosive gas, keep the

pump internal as vacuumed even after shutdown. Inflow of water content in the air to the pump

internal would cause rapid erosion trouble of the pump internals.

Ensure that no oil mist or hazardous substances are present in process line as safe ducting

procedure when turbo molecular pump is installed to host equipment.

WARNING

Avoid to install the pump at the following places.

(1) Place where the pump is inevitably exposed to significant vibration and impact.

(2) Unstable place.

(3) Place where the pump is inevitably exposed to magnetic field and radioactive ray.

The pump proper is a precision machine. Be careful not to apply abnormal vibration, shock /

impact to it during transportation. This pump is not an explosion-proof product. This pump is not

intended to be used in a potentially explosive atmosphere. Do not use flammable gas and

explosive gas.

The standard power input voltage is 24 VDC ± 5 %. Connection to the incorrect input voltage

can cause damage to the equipment.

CAUTION

The following "CAUTIONS" are to prevent operation anomalies.

○ Operating Precautions

(1) Do not interrupt the electrical power operating the turbo molecular pump while the turbo

molecular pump is in operation.

(2) Protect the pump from any and all types of impact during operation. Impacts can also be

transmitted via the flange, so be careful of impacts near the pump as well.

(3) Do not operate any equipment (i.e. drill motor, welding machine, etc.) that produces

electro-magnetic pollution, noise, etc., in the immediate proximity of an operating turbo

molecular pumping system.

(4) This turbo molecular pump is not approved for use in applications exhausting process gas

containing gallium (Ga, e.g., triethyl gallium, etc.) except for the pumps corresponded to

use of gallium.

(5) Plasmas may cause the pump rotor to discharge electrically thus damaging the electrical

components.

(6) When using the variable speed function to change the pump rotation rate, use a rotation

rate that does not cause resonance with other devices installed at the site.

(7) Be careful to prevent a rapid pressure rise or air rush during operation.

(8) Avoid repeating acceleration and deceleration in short term. Doing so can result in high

pump temperature.

Before touching the pump internals and the vacuum chamber, put a pair of nylon gloves without

fail. Avoid direct touch with them. Internal contamination of the vacuum chamber or the pump

would cause deterioration of adequate vacuuming performance.

When using a hydraulic rotary pump with vibration of wide amplitude, as a backing vacuum

pump, undertake proper anti-vibration measure. (As a guideline, control the vibration to 0.1G/50

Hz max at the outlet connection port of the turbo molecular pump.)

This pump is a precision pump. To protect the pump from torsion due to external piping load,

use a bellows joint or a flexible tube to either the pump inlet or outlet, without fail.

CAUTION

NOTICE

○Explanation of label

(1) HOT SURFACE Label

Risk of burn. Keep off from touching surface of the

pump as it is heated.

(2) Pump Securement Label

If the pump is not secured properly, it could

become detached and cause injury or damage to

surrounding equipment. Be sure to secure the

pump according to 5.1.2 "Installation of the Pump".

(3) Do Not Remove Label

Do not remove cover, or else it may cause

somechanges inside and it is failed.

(4) SECURITY seal

This label certificates that the product was made

or maintenanced by ULVAC or by ULVAC

authorized facility. In case "this label is removed"

or "there is a mark showing once this label has

been removed", ULVAC warranty shall not be

applied to the product.

(5) Name plate

(6) Direction of rotation Label

The direction of rotation of rotor inside the pump.

vii

○ Location of label

ラベル貼付位相

viii

○ Warranty Clauses

This product was shipped after strict company inspection. However, in case any failure

occurs under ULVAC’s responsibility, such as defect in manufacturing and damage during

transportation, buyer shall inform ULVAC, Inc. or the local ULVAC representatives. ULVAC

will repair or exchange it at free of charge.

○ Warrantable Items

(1) Turbo molecular pump UTM300B

○ Warranty period

(1) Domestic business in Japan: one year after shipping date from ULVAC.

(2) Direct export transaction: one year after date of B/L

○ Warrantee scope

(1) Scope and exclusion of warranty

The scope of warranty is limited to the Pump only. ULVAC will repair this pump free of

charge for a period of twelve (12) months from the date of delivery in case it failed due to

defects in design or manufacturing during pumping down of air or nitrogen gas.

Troubles caused by the following are excluded from warranty.

・ Troubles that occurred during pumping a gas other than air and nitrogen gas.

・ Troubles caused by consumable parts.

・ Troubles caused by different power supply from voltage and frequency specified when

ordering.

・ Because of acts of God or force majored such as earthquake, fire, flood, war, etc.

・ Because of operating conditions not given in this instruction manual

・ Because of modification, disassembly and repair not authorized by ULVAC

・ Used under special environment (strong electromagnetic field, radiation, high

temperature, high humidity, flammable gas ambience, corrosive gas ambience, dust,

etc)

・ Because of noise

・ Loss or damage attributed to secondary troubles and indemnification against

infringement on right

・ In case ULVAC concluded that troubles occurred because of condition which does not

meet use condition of this product.

○ Response procedure

(1) Domestic business in Japan:

ULVAC sends a replacement or Buyer returns the defective items to ULVAC, Inc. or to

the local ULVAC representatives for repair. If field service is required, Buyer shall ask

ULVAC, Inc. or the local ULVAC representatives.

(2) Direct export transaction:

ULVAC sends a replacement or Buyer return the defective items to ULVAC, Inc. or to

the local ULVAC representatives for repair. Return charge shall be paid by Buyer.

○ Others

(1) In case, special agreement or memorandum for specifications is made individually, it

comes in first.

(2) Buyer shall inform ULVAC when this product is exported out of Japan. In the meantime,

Buyer shall take necessary procedures according to Foreign Exchange and Foreign

Trade Law.

(3) As for the question and consultation, Buyer shall check the model and serial number and

ask the local representative or ULVAC, Inc.

http://www.ulvac.co.jp/eng/support/index.html

(4) The contents of this document is subject to change without notice in future.

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