
LCM 1010 Instruction Manual
5.1.2 Power ON/OFF Procedures
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5-2
5.1.3 Air Supply Valve ON/OFF Procedures
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5- 3
5.2 EMERGENCY STOP and Restart
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5-4
5.2.1 EMERGENCY STOP
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5-4
5.2.2 Restart
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& 5- 6
6 OPERATION
6.1 Starting Operation and Completing Opefation ...ч
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6-1
6.1.1 Starting Operation
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6-1
6.1.2 Completing Operation
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'1
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6-3
6.2 Insertion of Wor ; Related Items
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... 6- 4
6.2.1 Cover Opening/Closing Procedure
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6-6
6.2.2 Setting up Release Film (Unwinding side)
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6- 7
6.2.3 Removing Release Film (Winding side)
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6-8
6.2.4 How to Change Width of Release Film .......................................................................6-9
6.2.5 Release Film Winding Procedure
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6-10
6.2.6 Substrate Mounting Procedure.................................................................................. 6-12
6.2.7 Substrate Removing Procedure
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6-13
6.2.8 Resin Exchange Procedure (Charging Resin into the Cartridge)......................... 6-14
6.2.9 Resin Exchange Procedure (Mounting the Cartridge to the Machine)
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6-16
6.2.10 Resin Dispensing Volume Correcting Procedure
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6-19
6.2.11 IN/OUT Magazine Inserting / Removing Process
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6-21
6.3 Automatic Operation
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6-23
6.3.1 Outline of Automatic Operation
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6-23
6.3.2 Conditions for Starting Automatic Operation
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6-24
6.3.3 PROCESS AUTO Operation
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6-25
6.3.4 LINE AUTO Operation (Semiautomatic)
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6-26
6.4 Errors and Alarms
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glATL.
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6-28
6.4.1 Error and Alarm Displays
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6-28
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6.4.2 What to do when errors and alarms occur
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6-29
6.5 Resetting Immediate Stop
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6-30
7 DISPOSAL
7.1 Environment Protection
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7-1
7.2 Information Regarding Chemical Content 7- 2
TSWA