SMC Networks XLS Series User manual

Doc.no XL*****-OMI0013-B

PRODUCT NAME

High Vacuum L Type Valve

MODEL / Series / Product Number

XLS Series

- 1 - XL*****-OMI0013-B

Contents

Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 2

1. Precautions on handling 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4

(Precautions on Design, Selection, Mounting, Piping, Maintenance)

2. Precautions on handling 2 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 5

(Maintenance parts)

3. Specifications - - - - - - - - - - - - - - - - - - - - - - - - - - - - 7

4. Construction / Operatio - - - - - - - - - - - - -- - - -- - - - - - - - - - - - 8

5. Dimensions - - - - - - - - - - - - - -- - - -- - - - - - - - - - - 9

6. Period and Scope of Warranty - - - - - - - - - - - - - - - - - - - - - - - - - - - - 10

7. Parts Replacement Procedure - - - - - - - - - - - - - - - - - - - - - - - - - - - - 11

- 2 - XL*****-OMI0013-B

Safety Instructions

These safety instructions are intended to prevent hazardous situations and/or equipment damage.

These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or “Danger.”

They are all important notes for safety and must be followed in addition to International Standards

(ISO/IEC)*1) , and other safety regulations.

*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems.

ISO 4413: Hydraulic fluid power -- General rules relating to systems.

IEC 60204-1: Safety of machinery -- Electrical equipment of machines .(Part 1: General requirements)

ISO 10218-1992: Manipulating industrial robots -Safety.

etc.

Caution

Caution indicates a hazard with a low level of risk which, if not avoided, could result

in minor or moderate injury.

Warning

Warning indicates a hazard with a medium level of risk which, if not avoided, could

result in death or serious injury.

Danger

Danger indicates a hazard with a high level of risk which, if not avoided, will result

in death or serious injury.

Warning

1. The compatibility of the product is the responsibility of the person who designs the equipment or

decides its specifications.

Since the product specified here is used under various operating conditions, its compatibility with specific

equipment must be decided by the person who designs the equipment or decides its specifications based on

necessary analysis and test results.

The expected performance and safety assurance of the equipment will be the responsibility of the person who

has determined its compatibility with the product.

This person should also continuously review all specifications of the product referring to its latest catalog

information, with a view to giving due consideration to any possibility of equipment failure when configuring the

equipment.

2. Only personnel with appropriate training should operate machinery and equipment.

The product specified here may become unsafe if handled incorrectly.

The assembly, operation and maintenance of machines or equipment including our products must be

performed by an operator who is appropriately trained and experienced.

3. Do not service or attempt to remove product and machinery/equipment until safety is confirmed.

1.The inspection and maintenance of machinery/equipment should only be performed after measures to

prevent falling or runaway of the driven objects have been confirmed.

2.When the product is to be removed, confirm that the safety measures as mentioned above are implemented

and the power from any appropriate source is cut, and read and understand the specific product precautions

of all relevant products carefully.

3. Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.

4. Contact SMC beforehand and take special consideration of safety measures if the product is to

be used in any of the following conditions.

1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to

direct sunlight.

2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,

vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and

beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or

other applications unsuitable for the standard specifications described in the product catalog.

3. An application which could have negative effects on people, property, or animals requiring special safety

analysis.

4.Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a

mechanical protective function, and periodical checks to confirm proper operation.

- 3 - XL*****-OMI0013-B

Safety Instructions

Caution

1.The product is provided for use in manufacturing industries.

The product herein described is basically provided for peaceful use in manufacturing industries.

If considering using the product in other industries, consult SMC beforehand and exchange specifications

or a contract if necessary.

If anything is unclear, contact your nearest sales branch.

Limited warranty and Disclaimer/Compliance Requirements

The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance

Requirements”.

Read and accept them before using the product.

Limited warranty and Disclaimer

1.The warranty period of the product is 1 year in service or 1.5 years after the product is

delivered,whichever is first.2)

Also, the product may have specified durability, running distance or replacement parts. Please

consult your nearest sales branch.

2. For any failure or damage reported within the warranty period which is clearly our responsibility,

a replacement product or necessary parts will be provided.

This limited warranty applies only to our product independently, and not to any other damage

incurred due to the failure of the product.

3. Prior to using SMC products, please read and understand the warranty terms and disclaimers

noted in the specified catalog for the particular products.

2) Vacuum pads are excluded from this 1 year warranty.

A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

Also, even within the warranty period, the wear of a product due to the use of the vacuum

pad or failure due to the deterioration of rubber material are not covered by the limited

warranty.

Compliance Requirements

1. The use of SMC products with production equipment for the manufacture of weapons of mass

destruction(WMD) or any other weapon is strictly prohibited.

2. The exports of SMC products or technology from one country to another are govemed by the

relevant security laws and regulation of the countries involved in the transaction. Prior to the

shipment of a SMC product to another country, assure that all local rules goveming that export

are known and followed.

The product is provided for use in manufacturing industries.

The product herein described is basically provided for peaceful use in manufacturing industries.

If considering using the product in other industries, consult SMC beforehand and exchange

specifications or a contract if necessary.

契約などを行ってください｡

The product is provided for use in manufacturing industries.

The product herein described is basically provided for peaceful use in manufacturing industries.

If considering using the product in other industries, consult SMC beforehand and exchange

specifications or a contract if necessary.

契約などを行ってください｡

- 4 - XL*****-OMI0013-B

1. Product Specific Precautions 1

Precautions 1 Be sure to read before handling.

Design

Warning

●All models

1. The body material is A6063, the bellows is SUS316L, and other metal material is SUS304.

The seal material for vacuum environment is FKM. The armature assembly for vacuum

uses fluorine type resin (PFA). Use fluids those are compatible with using materials after

confirming. A valve for vacuum environment uses vacuum grease (fluorine type

grease:Y-VAC3).

2. If no control power is provided, apply starting voltage only for 0.15 to 0.2s. After that,

be sure to apply holding voltage (25% of starting voltage). If this operation is neglected,

it will cause coil burning and fire.

3. When starting voltage is applied, large current runs. Therefore, select a circuit

component after checking the current on the specifications.

4. Be sure to place a fuse or an earth leakage breaker for a power supplying circuit.

5. Leakage current from a circuit should be 70mA or less. If the voltage between coil

terminals becomes DC1V or more, the valve will not be closed.

6. Fluctuation of each voltage should be +/- 10% or less.

Selection

Caution

●All models

1. Use within the limits of the operating pressure range.

Mounting

Caution

● All models

1. In high humidity environments, keep the valve packed until the time of installation.

2. Perform piping so that excessive force is not applied to the flange sections. When there is

vibration from heavy objects or attachments, etc., fix piping so that vibration will not apply

torque directly to the flange section.

Piping

Caution

1. Before mounting, clean the surface of the flange seal and the O-ring with ethanol, etc.

2. There is an indentation of 0.1 to 0.2mm designed to protect the flange seal surface.

Be careful when handling the product to prevent any damage to the seal surface .

3. If a control power supply is provided, DC specification has polarity. Follow the

indication shown on the end of lead wire.

4. A wire for wiring should be 0.5 to 1.25mm2or more as reference.

5. Give enough curvature to the lead wire not to have excessive force when it is fixed.

6. Fluid containing foreign matters and oil will cause malfunction and sealing failure.

Remove such things from the fluid.

- 5 - XL*****-OMI0013-B

Maintenance

Warning

If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve

should be disassembled, cleaned and re-assembled by an operator who has sufficient

knowledge and experience (e.g. a specialist).

Caution

1.When removing deposits from the valve, take care not to damage any part of the valve.

2.Replace the core assembly and the armature assembly when the end of its service.

Refer to Chapter 6, “Period and Scope of Warranty” (P. 10) for details regarding endurance

cycles.

3.If potential damages are suspected prior to the end of the service life, perform maintenance

earlier than noted.

4.SMC specified parts should be used for service. Refer to the Construction / Maintenance

parts table.

5.When removing the external seal, take care not to damage the sealing surfaces. When

installing the external seal, be sure that the O-ring is not twisted. (Refer to Chapter 7, “Parts

Replacement Procedure” (P. 11 to 12) for details.)

- 6 - XL*****-OMI0013-B

2. Product Specific Precautions 2

Precautions 2 Be sure to read before handling

Maintenance Parts

Caution

SMC specified parts should be used for maintenance service.

Maintenance can be done without removing a pipe. Remove the four hexagon socket head

cap screws on the top of the cover. When the sealant is replaced, be careful not to give a

flawon the sealing face such as a body.

When they are assembled again, the work can be done easily and accurately with the

armature assemblyabsorbed to the core assembly. Check the operation and leakage after

assembling.

Service parts See “Construction Drawing” for the construction number.

Construction

no.

Description

XLS-16-□□

XLS-16-P□□

XLS-25-□□

XLS-25-P□□

(2)

Coil

assembly

XLS16-20-*G,C,D,T

XLS16-20-P*G

XLS25-20-*G,C,D,T

XLS25-20-P*G

(6)

Core

assembly

XLS16-30-1

XLS25-30-1

(4)

Armature

assembly

XLS16-30-2

XLS25-30-2

(3-1)

Core O-ring

AS568-018V

(3-2)

Bonnet

O-ring

AS568-025V

AS568-030V

Note) Enter voltage no *

* mean the symbol showing an electrical entry.

- 7 - XL*****-OMI0013-B

3. Specifications

Table 1 Valve specifications

Table 2 Power/ Current With rated voltage applied

Model

XLS-16

XLS-25

XLS-16-P*G

XLS-25-P*G

Flange (valve) size

Actuating type

Normally closed (N.C.)

Fluid

Vacuum of inert gas

Operating temperature oC

5 to 40

Exhausting direction

Free

Operating pressure Pa

1×10-6 (absolute pressure) to 0.1MPa (G)

Conductance l/s Note 1

Leakage

Pa･m3/s

Internal

1.3 x 10-8

at ambient temperatures , excluding gas permeation

External

1.3 x 10-11

at ambient temperatures , excluding gas permeation

Main material

Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304,

SUS405 equivalent, Seal: FKM and resin (PFA) Note 2

Surface treatment for body

Outside: hard anodized Inside: basis material

Control power supply

Not provided

Provided

Operating power voltage

(starting/ holding) V

DC24/6, DC48/12, DC100/24

DC24, AC100, AC200

Allowable voltage fluctuation %

+/- 10

Electrical entry

Type G, C, D, and T

Type G

Type of coil isolation

Type B

Max. operating frequency

10 cycle times/ min.

Weight kg

0.4

0.7

1.0

Note 1 The conductance is “molecular flow” measured with an elbow pipe which has the same

dimension with each flange.

Note 2 The valve for vacuum has vacuum grease (fluorine type: Y-VAC3).

Model

Starting

Holding

Power(W)

Current(A)

Power(W)

Current(A)

XLS-16-

*G/C/D/T , P5G

1.5

4.8

0.38

P1G

50Hz

30.5

0.47

14.8

0.35

60Hz

0.27

P2G

50Hz

0.24

4.9

0.11

60Hz

2.3

0.10

XLS-25-

*G/C/D/T , P5G

2.0

5.3

0.5

P1G

50Hz

0.62

0.46

60Hz

13.5

0.36

P2G

50Hz

0.35

6.7

0.15

60Hz

3.0

0.12

- 8 - XL*****-OMI0013-B

4. Construction / Operation

Armature assembly includes (7), (8), and (9).

4-1 XLS-**-** (without control power supply)

Valve (9) opens when the coil assembly

is carrying starting voltage for approx.

0.15 to 0.2s.

The valve keeps opening with voltage by

25% of the starting voltage (see right).

Do not apply the starting voltage for

0.3s or more. It will cause coil burning.

When energizing to the coil assembly is

stopped, valve (9) closes.

Ex.) For DC24. DC6 V specification,

The time to apply starting voltage is same

for all voltage.

4-2 XLS-**-P*G (with control power supply)

Valve (9) opens when the coil assembly is applied the rated voltage.

Valve (9) closes when the coil assembly is stopped being energized.

As this product has pressure balanced construction, the exhausting direction is free.

0.15～0.2 s

DC 6V±10%

DC24V±10%

3-2

3-1

Retainer

Coil assembly

(maintenance service part)

Core assembly

(maintenance service part)

Armature assembly

(maintenance service part)

Cover

Core O-ring external seal

(maintenance service part)

Bonnet O-ring external seal

(maintenance service part)

Spring

Bellows

Valve

Body

Control power supply

Time s

Holding

Starting

- 9 - XL*****-OMI0013-B

5.Dimensions

Model

XLS-16-*G

104

113

25.5

XLS-16-*C

XLS-16-*D

XLS-16-*T

129

XLS-25-*G

128.5

138.5

25.5

XLS-25-*C

121.5

XLS-25-*D

120.5

XLS-25-*T

121.5

154.5

XLS-16-P*G

113

66.5

XLS-25-P*G

121.5

138.5

25.5

89.5

J M 290±10

φE

φG

J K

G1/2

270±10

K±2J

G1/2

OPERATION

INPUT

□□□V

K J

26 41

72530±10

グロメット( G ) コンジット( C ) ターミナル( T )

φ6～9

G1/2

DIN形ターミナル( D )

XLS-**-** (制御電源無)

XLS-**-P*G (制御電源付)

XLS-**-P*G

(with control power supply)

XLS-**-**

(without control power supply)

DIN terminal (D)

Grommet (G)

Conduit (C)

Terminal (T)

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