SMC Networks XLH16 User manual

Doc. no.XL*****-OMJ0005-C

PRODUCT NAME

High Vacuum L Type Valve

MODEL / Series / Product Number

XLH Series

Contents

Safety Instructions - - - - - - - - - - - - - - - - - - - - - - - - - - - - 2

1. Product Specific Precautions 1 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 4

(Precautions on Design, Selection, Mounting, Piping, Wiring, Maintenance)

2. Product Specific Precautions 2 - - - - - - - - - - - - - - - - - - - - - - - - - - - - 6

(Maintenance parts)

3. Specifications - - - - - - - - - - - - - - - - - - - - - - - - - - - - 7

4. Construction and Outer dimensions - - - - - - - - - - - - -- - - -- - - - - - - - - - - - 9

5. Period and scope of warranty - - - - - - - - - - - - - - - - - - - - - - - - - - - - 10

6. Parts replacement procedure - - - - - - - - - - - - - - - - - - - - - - - - - - - - 11

XL*****-OMJ0005-C

Safety Instructions

These safety instructions are intended to prevent hazardous situations and/or equipment damage.

These instructions indicate the level of potential hazard with the labels of “Caution,” “Warning” or

“Danger.”

They are all important notes for safety and must be followed in addition to International Standards

(ISO/IEC)*1), and other safety regulations.

*1) ISO 4414: Pneumatic fluid power -- General rules relating to systems

ISO 4413: Hydraulic fluid power -- General rules relating to systems

IEC 60204-1: Safety of machinery -- Electrical equipment of machines (Part 1: General requirements)

ISO 10218-1992: Manipulating industrial robots -- Safety

Caution

Caution indicates a hazard with a low level of risk which, if not avoided, could result

in minor or moderate injury.

Warning

Warnig indicates a hazard with a medium level of risk which, if not avoided, could

result in death or serious injury.

Danger

Danger indicates a hazard with a high level of risk which, if not avoided, will result

in death or serious injury.

Warning

1. The compatibility of the product is the responsibility of the person who designs the

equipment or decides its specifications.

Since the product specified here is used under various operating conditions, its compatibility with specific

equipment must be decided by the person who designs the equipment or decides its specifications based on

necessary analysis and test results.

The expected performance and safety assurance of the equipment will be the responsibility of the person who

has determined its compatibility with the product.

This person should also continuously review all specifications of the product referring to its latest catalog

information, with a view to giving due consideration to any possibility of equipment failure when configuring the

equipment.

2. Only personnel with appropriate training should operate machinery and equipment.

The product specified here may become unsafe if handled incorrectly.

The assembly, operation and maintenance of machines or equipment including our products must be

performed by an operator who is appropriately trained and experienced.

3. Do not service or attempt to remove product and machinery/equipment until safety is

confirmed.

1.The inspection and maintenance of machinery/equipment should only be performed after measures to

prevent falling or runaway of the driven objects have been confirmed.

2.When the product is to be removed, confirm that the safety measures as mentioned above are implemented

and the power from any appropriate source is cut, and read and understand the specific product precautions

of all relevant products carefully.

3.Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction.

4. Contact SMC beforehand and take special consideration of safety measures if the product is

to be used in any of the following conditions.

1. Conditions and environments outside of the given specifications, or use outdoors or in a place exposed to

direct sunlight.

2. Installation on equipment in conjunction with atomic energy, railways, air navigation, space, shipping,

vehicles, military, medical treatment, combustion and recreation, or equipment in contact with food and

beverages, emergency stop circuits, clutch and brake circuits in press applications, safety equipment or

other applications unsuitable for the standard specifications described in the product catalog.

3. An application which could have negative effects on people, property, or animals requiring special safety

analysis.

4. Use in an interlock circuit, which requires the provision of double interlock for possible failure by using a

mechanical protective function, and periodical checks to confirm proper operation.

2 -

XL*****-OMJ0005-C

Safety Instructions

Caution

1.The product is provided for use in manufacturing industries.

The product herein described is basically provided for peaceful use in manufacturing industries.

If considering using the product in other industries, consult SMC beforehand and exchange

specifications or a contract if necessary.

If anything is unclear, contact your nearest sales branch.

Limited warranty and Disclaimer/Compliance Requirements

The product used is subject to the following “Limited warranty and Disclaimer” and “Compliance

Requirements”.

Read and accept them before using the product.

Limited warranty and Disclaimer

1. The warranty period of the product is 1 year in service or 1.5 years

after the product is

delivered,whichever is first.*2)

Also, the product may have specified durability, running distance or replacement parts. Please consult

your nearest sales branch.

2.For any failure or damage reported within the warranty period whi

ch is clearly our responsibility, a

replacement product or necessary parts will be provided.

This limited warranty applies only to our product independently, and not to any other damage incurred

due to the failure of the product.

3.Prior to using SMC products, please read and understand the warranty terms and disclaimers noted in

the specified catalog for the particular products.

*2) Vacuum pads are excluded from this 1 year warranty.

A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

Also, even within the warranty period, the wear of a product due to the use of the vacuum pad or

failure due to the deterioration of rubber material are not covered by the limited warranty.

Compliance Requirements

.The use of SMC products with production equipment for the manufacture of weapons of mass

destruction(WMD) or any other weapon is strictly prohibited.

2.The exports of SMC products or technology from one country to another are govemed by the relevant

secur

ity laws and regulation of the countries involved in the transaction. Prior to the shipment of a

SMC product to another country, assure that all local rules goveming that export are known and

followed.

3 -

XL*****-OMJ0005-C

1. Product Specific Precautions 1

Common Precautions 1 Be sure to read before handling.

Design

Warning

●All models

1.The body material is A6063,the bellows is SUS316L, and other metal seal material is SUS304.

The sealing material of the vacuum part is FKM as standard, but this can be changed to other

materials (refer to “How to Order”). Confirm whether the fluid to be used is compatible with the

materials before use.

●With heater (thermister)

1.When using a model with a heater, a mechanism to prevent overheating should be

installed.

Selection

●High temperature type

1. If using gases that cause alarge amount of deposits, heat the valve body to prevent deposits in

the valve.

Mounting

● All models

1. In high humidity environments, keep the valve packed until the time of installation.

2. Perform piping so that excessive force is not applied to the flange sections. When there is

vibration from heavy objects or attachments, etc., fix piping so that vibration will not apply

torque directly to the flange section.

3. Vibration resistance allows for normal operation of up to 30m/s2(45 to 250Hz).

Be advised that continuous vibration may cause a decline in durability.

Arrange piping to avoid excessive vibration or impacts.

●High temperature type (temperature specification /H4 H5)

1. In models with a heater (thermistor), take care not to damage the insulation components of the

lead wires and connector section.

2. The set temperature for models with a heater should be established without any drafts or heat

insulation. It will change depending on conditions such as heat insulation measures and the

heating of other piping. Fine adjustment is not possible.

3. When installing heater accessories or mounting a heater, check insulation resistance at the

actual operating temperature. A current leakage breaker or fuse should be installed.

4. When a valve is to be heated, only the body section should be heated, excluding the handle

section.

5. In models with a heater, when the heater is in operation, the entire valve becomes hot. Be

careful not to touch it with bare hands, as burns will result.

6. The heater temperature will initially decrease several % after the heating starts and then

gradually becomes stable. (The heater temperature may decrease approximately 5 to 10%

due to individual differences.)

Caution

4 -

XL*****-OMJ0005-C

1. Before mounting, clean the surface of the flange seal and the O-ring with ethanol, etc.

2. There is an indentation of 0.1 to 0.2mm in order to protect the flange seal surface, and it

should be handled so that the seal surface is not damaged in any way.

If the fluid or reaction product (deposit) may cause the valve to become unsafe, the valve

should be disassembled, cleaned and re-assembled by an operator who has sufficient

knowledge and experience (e.g. a specialist).

1.When removing deposits from the valve, take care not to damage any part of it.

2.Replace the handle assembly when the valve is approaching the end of its service life.

*For the endurance cycles, refer to Chapter 5, “Period and Scope of Warranty” (P. 9).

3.If damage is suspected prior to the end of the service life, perform early maintenance.

4.SMC specified parts should be used for service. Refer to the Construction / Maintenance

parts table.

5.When removing the valve seal and external seal, take care not to damage the sealing

surfaces. When installing the valve seal and external seal, be sure that the O-ring is not

twisted. (Refer to Chapter 6, “Parts Replacement Procedure” (P. 10 to 11) for details.)

Piping

Caution

Maintenance

Warning

Caution

5 -

XL*****-OMJ0005-C

2. Product Specific Precautions 2

Common Precautions 2 Be sure to read before handling

Maintenance Parts

SMC specified parts should be used for service.

Refer to Chapter 5, “Construction and Dimensions" (P. 9) for the part indication numbers.

1.Replace the handle assembly when changing the sealant material. Due to the different materials

used, changing only the seal may prove inadequate.

Handle assembly/construction part number (1)

Temperature

specifications

Valve size

Standard(5

～

150 oC)

XLH16-30-1

XLH25-30-1

XLH40-30-1

XLH50-30-1

Note1) List the optional seal material symbol after the model number, except for the standard

seal material (FKM: compound No. 1349-80). e.g.) XLH16-30-1-XN1

Exterior seal, valve seal

Description

Constructions No. Material

Valve size

Exterior seal (3) Standard

AS568-025V

AS568-030V

AS568-035V

AS568-039V

Specific AS568-025 ** AS568-030 ** AS568-035 ** AS568-039 **

Valve seal (2) Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V

Specific

B2401-V15

B2401-V24

B2401-P42

AS568-227

Note1) List the optional seal material symbol after the model number, except for the

standard sealant material (FKM: compound no. 1349-80). e.g.) AS568-025-XN1

Note2) Refer to the Construction of each series for the construction numbers.

Note3) Due to the different materials used, changing only the seal may prove inadequate.

Additional symbols of the seal materials

Seal material EPDM Barrel

Perfluoro

Kalrez

Chemraz

VMQ FKM for

PLASMA ULTIC

ARMOR

Combination No.

2101-80

70W

4079

SS592

SS630

SSE38

1232-70

3310-75

UA4640

Symbol

-XN1

-XP1

-XQ1

-XR1

-XR2

-XR3

-XS1

-XT1

-XU1

Note1) Due to the different materials used, changing only the seal may prove inadequate.

Barrel Perfluoro

is a registered trademark of Matsumura Oil Co.,Ltd.

Kalrez

is a registered trademark of E.I. du Pont de Nemours and Company or

its affiliates.

Chemraz

is a registered trademark of Greene, Tweed Technologies,Inc.

ULTIC ARMOR

is a registered trademark of Nippon Valqia Industries, Ltd.

Caution

6 -

XL*****-OMJ0005-C

3. Specifications

3-1. Valve specifications

3-2. Heater specifications

Item XLH-25 XLH-40 XLH-50

Rated voltage of the heater 90 to 240 ACV

Heater assembly number - XLA25-60S-1 XLA25-60S-1

No. of heater assemblies - 1 pc. 1 pc.

Initial power /

Power

consumption (W)

100 VAC - 200/40 200/50

200 VAC - 800/40 800/50

Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2

No. of heater assemblies 1 pc. 1 pc. 1 pc.

Initial power /

Power

consumption (W)

100 VAC 200/40 400/70 400/80

200 VAC 800/40 1600/80 1600/80

Note 1) Initial power and power consumption are nominal values.

Note 2) Heaters are not available for size 16.

The heaters are PTC thermistor type design.

These thermistors self regulate their temperature

by switching the resistance at certain critical

temperatures, so a separate temperature

controller is unnecessary.

If the temperature of the PTC heaters fitted exceeds

200oC, then it may fail. The maximum operating

temperature for the valve is 150oC. If the heater

temperature is over 200oC or valve temperature is

over 150oC, please use thermostat to control the

Model

XLH-16

XLH-25

XLH-40

XLH-50

Flange (valve) size

Valve type

Manual type

Fluid

Vacuum of inert gas

Operating temperature oC

5 to 150

Operating pressure Pa

Atmospheric pressure to 1 x 10-6

Conductance l/s Note 1)

Leakage

Pa･m3/s

Internal

1.3 x 10-10 for the standard material (FKM)

at ambient temperatures , excluding gas permeation

External

1.3 x 10-11 for the standard material (FKM)

at ambient temperatures , excluding gas permeation

Flange type

KF (NW)

Main material

Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM

(standard sealing material)

Surface treatment for

body

Outside: hard anodized Inside: basis material

Pilot torque N

･

0.1 <

0.15 <

0.35 <

0.5 <

Handle revolutions

Weight kg

0.23

0.41

1.05

1.62

Note1) The conductance is “molecular flow” measured with an elbow pipe which has the same

dimension with each flange.

0 5 10 15 20 25 30

時間　(秒）

電流

Time (sec.)

Duration of the inrush current flow (as a guide)

200V

100V

Current

7 -

XL*****-OMJ0005-C

heaters to prevent overheating.

With PTC type heaters, there is an initial surge of current (inrush current) after the power is supplied.

These inrush current will reduce overtime. If multiple heater assemblies are used, the inrush current to

the heaters will be magnified and care should be taken. When multiple heater assemblies or valves

are used, do not apply power to the heater assemblies simultaneously. Keep approximately 30

seconds between applications of power to each heater assembly. This will allow for incremental

spacing to prevent harmful large initial surge.

8 -

XL*****-OMJ0005-C

4. Construction and Outer dimensions

Indicator

Bellows holder

(Material: SUS304)

Bellows

(Material: SUS316L)

Valve

(Material: SUS304)

Body

(Material: A6063)

Heater(option)

Handle Ass'y(Maintenance part)

(Including ②,⑤,⑥,⑦)

Exterior seal

(Maintenance part)

Valve seal

(Maintenance part)

φG

φH

φF

Model

Ａ

Ｂ

Ｃ

Ｄ

Ｅ

Ｆ

Ｇ

XLH-16

100.5

XLH-25

114

XLH-40

162.5

XLH-50

179.5

Unit: mm

9 -

XL*****-OMJ0005-C

This manual suits for next models

Table of contents

Other SMC Networks Control Unit manuals

SMC Networks

SMC Networks EX600-DX Series User manual

SMC Networks

SMC Networks VP500 Series User manual

SMC Networks

SMC Networks 56-VQC1000 Series Manual

SMC Networks

SMC Networks SY3000 SERIES Installation manual

SMC Networks

SMC Networks AXTS040 3 X2 Series User manual

SMC Networks

SMC Networks VR51 Manual

SMC Networks

SMC Networks SX3000 Series User manual

SMC Networks

SMC Networks EX260 Series User manual

SMC Networks

SMC Networks ASN2 Series User manual

SMC Networks

SMC Networks EXW1-RDX# Series User manual

SMC Networks

SMC Networks VQD1000 Series User manual

SMC Networks

SMC Networks CP96 Series User manual

SMC Networks

SMC Networks VM100-A Series User manual

SMC Networks

SMC Networks VQC2000 Manual

SMC Networks

SMC Networks EX260 Series User manual

SMC Networks

SMC Networks 300 Series User manual

SMC Networks

SMC Networks JSY1000-E Series User manual

SMC Networks

SMC Networks VT325 Series User manual

SMC Networks

SMC Networks VXP Series User manual

SMC Networks

SMC Networks EX250-SAS7 User manual

SMC Networks

SMC Networks XLD Series User manual

SMC Networks

SMC Networks XT323-4 User manual

SMC Networks

SMC Networks EX600-SMJ Series User manual

SMC Networks

SMC Networks LVP Series User manual

Popular Control Unit manuals by other brands

Festo

Festo Compact Performance CP-FB6-E Brief description

Elo TouchSystems

Elo TouchSystems DMS-SA19P-EXTME Quick installation guide

JS Automation

JS Automation MPC3034A user manual

JAUDT

JAUDT SW GII 6406 Series Translation of the original operating instructions

Spektrum

Spektrum Air Module System manual

BOC Edwards

BOC Edwards Q Series instruction manual

KHADAS

KHADAS BT Magic quick start

Etherma

Etherma eNEXHO-IL Assembly and operating instructions

PMFoundations

PMFoundations Attenuverter Assembly guide

GEA

GEA VARIVENT Operating instruction

Walther Systemtechnik

Walther Systemtechnik VMS-05 Assembly instructions

Altronix

Altronix LINQ8PD Installation and programming manual

Eaton

Eaton Powerware Series user guide

WAGO

WAGO 750-407/040-000 manual

Sony

Sony CCU-590 Operation manual

Graco

Graco 25D614 instructions

Task Force Tips

Task Force Tips YE-RF-900 Instructions for installation, safe operation and maintenance

Shini

Shini SPV-U Series manual