Pfeiffer Vacuum HiPace 700 User manual

OPERATING INSTRUCTIONS

Translation of the Original

HIPACE 700

Turbopump

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to

support you by its performance, its perfect operation and without interfering your individual

application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. With this

expertise, we have acquired a multitude of skills contributing to an efficient and secure

implementation of our product.

Knowing that our product must not interfere with your actual work, we are convinced that our

product offers you the solution that supports you in the effective and trouble-free execution of

your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

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Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Related documents 7

1.1.2 Product variants affected 7

1.2 Target group 7

1.3 Conventions 8

1.3.1 Instructions in the text 8

1.3.2 Pictographs 8

1.3.3 Stickers on the product 8

1.3.4 Abbreviations 9

2 Safety 10

2.1 General safety instructions 10

2.2 Safety instructions 10

2.3 Safety precautions 14

2.4 Limits of use of the product 14

2.5 Proper use 15

2.6 Foreseeable improper use 15

3 Product description 17

3.1 Function 17

3.1.1 Cooling 17

3.1.2 Rotor bearing 17

3.1.3 Drive 17

3.2 Shipment 18

3.3 Identifying the product 18

3.3.1 Product types 18

3.3.2 Product features 18

4 Transportation and Storage 19

4.1 Transport 19

4.2 Storage 19

5 Installation 20

5.1 Preparatory work 20

5.2 Connecting the high vacuum side 20

5.2.1 Designing the counter flange 20

5.2.2 Considering earthquake protection 21

5.2.3 Using a splinter shield or protective screen 22

5.2.4 Using the vibration compensator 22

5.2.5 Mounting orientations 22

5.2.6 Attaching ISO-K flange onto ISO-K 23

5.2.7 Attaching ISO-K flange to ISO-F 23

5.2.8 Attaching ISO-F flange to ISO-F 25

5.2.9 Attaching CF flange to CF-F 26

5.3 Connecting the fore-vacuum side 28

5.4 Cooling water connection 29

5.5 Connecting accessories 30

5.6 Connecting the electrical supply 31

5.6.1 Grounding the turbopump 31

5.6.2 Establishing the electric connection 32

6 Operation 34

6.1 Commissioning 34

6.2 Operating modes 35

6.2.1 Operation without operating unit 35

6.2.2 Operation via multi-function connection "remote" 35

Table of contents

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6.2.3 Operation via connection "E74" 35

6.2.4 Operation via Pfeiffer Vacuum display and control unit 35

6.2.5 Operation via field bus 36

6.3 Switching on the turbopump 36

6.4 Operation monitoring 36

6.4.1 Operating mode display via LED 36

6.4.2 Temperature monitoring 37

6.5 Switching off and venting 37

6.5.1 Switching off 37

6.5.2 Venting 38

7 Maintenance 39

7.1 General maintenance information 39

7.2 Maintenance intervals and responsibilities 39

7.3 Replacing the operating fluid reservoir 39

7.4 Replacing the electronic drive unit 41

7.5 Confirming the rotation speed specification 42

8 Decommissioning 43

8.1 Shutting down for longer periods 43

8.2 Recommissioning 43

8.3 Disposing of the vacuum pump 44

9 Malfunctions 45

10 Service solutions from Pfeiffer Vacuum 48

11 Spare parts HiPace 700 50

12 Accessories 51

12.1 Accessory information 51

12.2 Ordering accessories 51

13 Technical data and dimensions 53

13.1 General 53

13.2 Technical data 53

13.3 Dimensions 57

Declaration of conformity 59

Table of contents

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List of tables

Tbl. 1: Abbreviations used in this document 9

Tbl. 2: Permissible ambient conditions 15

Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps 18

Tbl. 4: Turbopump features 18

Tbl. 5: Requirements for the dimensioning of the customers high vacuum connec-

tion

Tbl. 6: Reduction of the pumping speed when using a splinter shield or protective

screen

Tbl. 7: Requirements on the cooling water composition 29

Tbl. 8: Requirements on the cooling water connection 29

Tbl. 9: Pre-set accessory connections to electronic drive unit TC 400 31

Tbl. 10: Factory setting of the electronic drive unit when delivered 34

Tbl. 11: Behavior and meaning of the LEDs on the electronic drive unit 37

Tbl. 12: Factory settings for delayed venting in turbopumps 38

Tbl. 13: Characteristic nominal rotation speeds of the turbopumps 42

Tbl. 14: Troubleshooting turbopumps 47

Tbl. 15: Available spare parts 50

Tbl. 16: Accessories 52

Tbl. 17: Conversion table: Pressure units 53

Tbl. 18: Conversion table: Units for gas throughput 53

Tbl. 19: Technical data for HiPace 700 | 48 V 55

Tbl. 20: Technical data for HiPace 700 | 24 V 57

List of tables

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List of figures

Fig. 1: Position of the labels on the product 9

Fig. 2: HiPace 700 design 17

Fig. 3: Example: Safety connections 22

Fig. 4: Recommended alignment when using oil-sealed backing pumps 23

Fig. 5: Flange connection ISO-K to ISO-F, bracket screws 23

Fig. 6: Flange connection ISO-K to ISO-F, hexagon head screw and tapped hole 24

Fig. 7: Flange connection ISO-K to ISO-F, stud screw and tapped hole 24

Fig. 8: Flange connection ISO-K to ISO-F, stud screw and through hole 25

Fig. 9: Flange connection ISO-F, hexagon head screw and tapped hole 25

Fig. 10: Flange connection ISO-F, stud screw and tapped hole 25

Fig. 11: Flange connection ISO-F, stud screw and through hole 26

Fig. 12: Flange connection CF-F, hexagon head screw and through hole 26

Fig. 13: Flange connection CF-F, stud screw and tapped hole 27

Fig. 14: Flange connection CF-F, stud screw and through hole 27

Fig. 15: Example of fore-vacuum connection on HiPace 700 28

Fig. 16: Connecting the cooling water supply 30

Fig. 17: Example: Connecting the grounding cable 31

Fig. 18: Connecting the electronic drive unit to a power supply pack 32

Fig. 19: Changing the operating fluid reservoir 40

Fig. 20: Installing and removing the electronic drive unit TC 400 42

Fig. 21: Spare parts HiPace 700 50

Fig. 22: HiPace 700 | TC 400 | DN 160 ISO-K 57

Fig. 23: HiPace 700 | TC 400 | DN 160 CF-F 57

Fig. 24: HiPace 700 | TC 400 | DN 160 ISO-F 58

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

These operating instructions are for customers of Pfeiffer Vacuum. They describe the function of the

designated product and provide the most important information for safe usage of the product. The de-

scriptions comply with applicable directives. All information provided in these operating instructions refer

to the current development status of the product. The documentation remains valid as long as the cus-

tomer does not modify the product in any way.

1.1.1 Related documents

Document Number

Operating instructions, Electronic drive unit TC 400. standard PT 0203 BN

Operating instructions, Electronic drive unit TC 400 PB, profibus PT 0244 BN

Operating instructions, Electronic drive unit TC 400 E74, according to

Semi E74

PT 0302 BN

Operating instructions, Electronic drive unit TC 400 DN, DeviceNet PT 0352 BN

Operating instructions, Electronic drive unit TC 400 EC, EtherCat PT 0452 BN

Declaration of conformity A component of these in-

structions

Current documents are available from the Pfeiffer Vacuum Download Center.

1.1.2 Product variants affected

●HiPace 700, DN 160 ISO-K, TC 400, 24 V DC

●HiPace 700, DN 160 ISO-K, TC 400, 48 V DC

●HiPace 700, DN 160 CF-F, TC 400, 24 V DC

●HiPace 700, DN 160 CF-F, TC 400, 48 V DC

●HiPace 700, DN 160 ISO-F, TC 400, 24 V DC

●HiPace 700, DN 160 ISO-F, TC 400, 48 V DC

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transporation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

About this manual

7/60

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

Note

Tip

1.3.3 Stickers on the product

This section describes all the stickers on the product along with their meaning.

C US

T V Rheinland

Oil

S/N

Mod.

HiPace 700 H

PM P05 750

- - - - - - - -

P/N

n, f

Mass Made in Germany 2018/03

PM 143 452 -T

49200 1/min, 820 Hz

17.4 kg

D-35614 Asslar

Rating plate (figure similar)

The rating plate is located on the lower part of the turbopump.

Rating plate

The rating plate of the electronic drive unit is located on its out-

side next to the LEDs

Operating instructions note

This sticker indicates that this operating instructions must be

read before performing any tasks.

Protection class

This sticker describes protection class 1 for the product. The

positioning indicates the position for the ground connection.

warranty seal

Closure seal

The product is sealed ex-factory. Damaging or removing a clo-

sure seal results in loss of the warranty.

About this manual

8/60

Fig. 1: Position of the labels on the product

1 Operating instructions note 3 Information regarding ground connection

2 Closure seal 4 Rating plate of the turbopump

1.3.4 Abbreviations

Abbreviation Meaning in this document

CF Flange: Metal-sealed connector in accordance with ISO 3669

dDiameter value (in mm)

DC Direct current

DCU Display Control Unit (Pfeiffer Vacuum display and control unit).

DN Nominal diameter as size description

fRotation speed value of a vacuum pump (frequency, in rpm or Hz)

HHigh compression

HPU Handheld Programming Unit. Aid for control and monitoring of pump parameters

HV High vacuum flange, high vacuum side

ISO Flange: Connector in accordance with ISO 1609 and ISO 2861

LED Illuminating diode

PE Earthed conductor (protective earth)

[P:xxx] Electronic drive unit control parameters. Printed in bold as three-digit number in

square brackets. Frequently displayed in conjunction with a short description.

Example: [P:312] software version

remote 26-pole D-Sub connecting socket on the turbopump electronic drive unit

S1 S1 switch on power supply pack

WAF Width across flats

TTemperature (in °C)

TC Turbopump electronic drive unit (turbo controller)

TPS Voltage supply (turbo power supply)

VV Fore-vacuum flange, fore-vacuum connection

Tbl. 1: Abbreviations used in this document

About this manual

9/60

2 Safety

2.1 General safety instructions

This document includes the following four risk levels and one information level.

DANGER

Imminent danger

Indicates a hazardous situation which, if not avoided, will result in death or serious injury.

►Instructions on avoiding the hazardous situation

WARNING

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in death or serious injury.

►Instructions on avoiding the hazardous situation

CAUTION

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in minor or moderate injury.

►Instructions on avoiding the hazardous situation

NOTICE

Danger of property damage

Notice is used to address practices not related to physical injury.

►Instructions on avoiding property damage

Notes, tips or examples indicate important information on the product or on this document.

2.2 Safety instructions

All safety instructions in this document are based on the results of the risk assessment carried out in

accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-

ble, all life cycle phases of the product were taken into account.

Risks during transport

WARNING

Danger of serious injury due to falling objects

Due to falling objects there is a risk of injuries to limbs through to broken bones.

►Take particular care and pay special attention when transporting products manually.

►Do not stack the products.

►Wear protective equipment, e.g. safety shoes.

Safety

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