Pfeiffer Vacuum TC1200 User manual

OPERATING INSTRUCTIONS

Translation of the Original

TC 1200

Electronic drive unit

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to

support you by its performance, its perfect operation and without interfering your individual

application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. With this

expertise, we have acquired a multitude of skills contributing to an efficient and secure

implementation of our product.

Knowing that our product must not interfere with your actual work, we are convinced that our

product offers you the solution that supports you in the effective and trouble-free execution of

your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/52

Table of contents

1 About this manual 7

1.1 Validity 7

1.2 Applicable documents 7

1.3 Target group 7

1.4 Conventions 7

1.4.1 Instructions in the text 7

1.4.2 Pictographs 7

1.4.3 Stickers on the product 8

1.4.4 Abbreviations 8

2 Safety 9

2.1 General safety instructions 9

2.2 Safety instructions 9

2.3 Safety precautions 10

2.4 Limits of use of the product 11

2.5 Proper use 11

2.6 Foreseeable misuse 12

3 Product description 13

3.1 Identifying the product 13

3.2 Product features 13

3.3 Function 13

3.4 Scope of delivery 13

3.5 Connections 14

4 Installation 15

4.1 Connection diagram 15

4.2 "remote" connection 17

4.3 Connection "RS-485" 18

4.4 Mains power supply 18

5 Interfaces 20

5.1 Interface RS-485 20

5.2 Pfeiffer Vacuum protocol for RS-485 interface 21

5.2.1 Telegram frame 21

5.2.2 Telegram description 21

5.2.3 Telegram example 1 22

5.2.4 Telegram example 2 22

5.2.5 Data types 22

6 Parameter set 24

6.1 General 24

6.2 Control commands 24

6.3 Status requests 27

6.4 Set value settings 28

6.5 Additional parameter for the DCU 29

7 Operation 31

7.1 Configuring the connections with the Pfeiffer Vacuum parameter set 31

7.1.1 Configuring the "remote" connection 31

7.1.2 Configuring the accessory connections 32

7.1.3 Select interfaces 33

7.2 Operating modes 33

7.2.1 Gas type-dependent operation 33

7.2.2 Set value power consumption 34

7.2.3 Run-up time 34

7.2.4 Rotation speed switch points 34

Table of contents

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7.2.5 Rotation speed setting mode 36

7.2.6 Standby 36

7.2.7 Confirming the speed specification 36

7.2.8 Backing pump operating modes 37

7.2.9 Backing pump standby mode 38

7.2.10Operation with accessories 38

7.2.11Venting modes 39

7.3 Operation via "remote" connection 39

7.3.1 +24 V DC output/pin 1 39

7.3.2 Inputs 39

7.3.3 Outputs 41

7.3.4 Relay contacts (invertible) 41

7.3.5 RS-485 42

7.4 Switching on the turbopump 42

7.5 Switching off the turbopump 42

7.6 Operation monitoring 43

7.6.1 Operating mode display via LED 43

7.6.2 Temperature monitoring 43

8 Malfunctions 44

8.1 General 44

8.2 Error codes 44

8.3 Warning and error messages when operating with DCU 47

9 Service solutions from Pfeiffer Vacuum 48

Declaration of conformity 50

Table of contents

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List of tables

Tbl. 1: Stickers on the product 8

Tbl. 2: Abbreviations used in this document 8

Tbl. 3: Permissible ambient conditions 11

Tbl. 4: Features of the device variant 13

Tbl. 5: Drive power depending on the supplied mains voltage 13

Tbl. 6: Connection description of the electronic drive unit 14

Tbl. 7: Terminal lay-out of 26-pin "remote" connection 17

Tbl. 8: Terminal layout of the RS-485 connecting socket M12 18

Tbl. 9: Terminal lay-out of the power supply connector 19

Tbl. 10: Features of the RS-485 interface 20

Tbl. 11: Terminal layout of the RS-485 connecting socket M12 20

Tbl. 12: Explanation and meaning of the parameters 24

Tbl. 13: Control commands 27

Tbl. 14: Status requests 28

Tbl. 15: Set value settings 29

Tbl. 16: Parameter for DCU functions 30

Tbl. 17: Digital outputs and relays 31

Tbl. 18: Digital inputs 32

Tbl. 19: Analog output 32

Tbl. 20: Analog input 32

Tbl. 21: Accessory connections 33

Tbl. 22: Parameter [P:060] 33

Tbl. 23: Characteristic nominal rotation speeds of the turbopumps 37

Tbl. 24: Backing pump operating modes 37

Tbl. 25: DI1 (release venting) / Pin 2 39

Tbl. 26: DI motor pump/pin 3 40

Tbl. 27: DI pumping station / Pin 4 40

Tbl. 28: DI standby/pin 5 40

Tbl. 29: DI2 (heater)/pin 6 40

Tbl. 30: DI3 (sealing gas)/pin 10 40

Tbl. 31: DI malfunction acknowledgment/pin 13 40

Tbl. 32: DI remote priority/pin 14 41

Tbl. 33: RS-485 interface, features 42

Tbl. 34: Behavior and meaning of the LEDs on the electronic drive unit 43

Tbl. 35: Error messages of the electronic drive unit 46

Tbl. 36: Warning messages of the electronic drive unit 47

Tbl. 37: Warning and error messages when using a DCU 47

List of tables

5/52

List of figures

Fig. 1: TC 1200 connection panel 13

Fig. 2: Diagram and assignments of the connection panel 16

Fig. 3: Connecting RS-485 devices 18

Fig. 4: Networking of several electronic drive units in RS-485 Bus 21

Fig. 5: Schematic diagram of power characteristics, example of heavy gases

[P:027] = 0

Fig. 6: Rotation speed switch point 1 active 35

Fig. 7: Rotation speed switch points 1 & 2 active, [P:701] > [P:719] 35

Fig. 8: Rotation speed switch points 1 & 2 active, [P:701] < [P:719] 35

Fig. 9: Speed actuator operation 41

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

These operating instructions are for customers of Pfeiffer Vacuum. They describe the function of the

designated product and provide the most important information for safe usage of the product. The de-

scriptions comply with applicable directives. All information provided in these operating instructions refer

to the current development status of the product. The documentation remains valid as long as the cus-

tomer does not modify the product in any way.

1.2 Applicable documents

TC 1200 Operating instructions

Declaration of conformity A component of these instructions

You can find this document in the Pfeiffer Vacuum Download Center.

1.3 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

1.4 Conventions

1.4.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.4.2 Pictographs

Pictographs used in the document indicate useful information.

About this manual

7/52

Note

Tip

1.4.3 Stickers on the product

This section describes all the stickers on the product along with their meaning.

Mod: TC 1200

Mod.-Nr.: PM C 01 810

Input: ~ 100-120V / ~200-240V±10%

10A, 50 - 60 Hz, 1500AIC

Output: 0 - 400V 5A, 0 - 630 Hz

Masse: 3kg

Made in Germany 2017/10

Ser.-Nr.:1234567

Rating plate

The rating plate is located on the side of the

electronic drive unit.

warranty seal

Closure seal

The product is sealed ex-factory. Damaging

or removing a closure seal results in loss of

the warranty.

Tbl. 1: Stickers on the product

1.4.4 Abbreviations

Abbreviation Meaning in this document

AI / AO Analog Input / Analog Output

AIC Ampere interrupting capacity

DCU Display Control Unit (Pfeiffer Vacuum display and control unit)

DI / DO Digital Input / Digital Output

fRotation speed value of a vacuum pump (frequency, in rpm or Hz)

HPU Handheld Programming Unit. Aid for control and monitoring pump parameters

IElectric amperage

LED Light emitting diode

[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in

square brackets. Frequently displayed in conjunction with a short description

Example: [P:312] software version

PElectrical power

PE Earthed conductor (protective earth)

RElectrical resistance

RS-485 Standard for a physical interface for asynchronous serial data transmission (Recom-

mended Standard)

tTime

TC Electronic drive unit (turbo controller)

TMS Temperature management system

UElectric voltage

Tbl. 2: Abbreviations used in this document

About this manual

8/52

2 Safety

2.1 General safety instructions

This document includes the following 4 risk levels and 1 information level.

DANGER

Imminent danger

Indicates a hazardous situation which, if not avoided, will result in death or serious injury.

►Instructions on avoiding the hazardous situation

WARNING

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in death or serious injury.

►Instructions on avoiding the hazardous situation

CAUTION

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in minor or moderate injury.

►Instructions on avoiding the hazardous situation

NOTICE

Danger of property damage

Notice is used to address practices not related to physical injury.

►Instructions on avoiding property damage

Notes, tips or examples indicate important information on the product or on this document.

2.2 Safety instructions

All safety instructions in this document are based on the results of the risk assessment carried out in

accordance with Low Voltage Directive 2014/35/EU. Where applicable, all life cycle phases of the prod-

uct were taken into account.

Risks during installation

DANGER

Danger to life from electric shock

When establishing the voltages that exceed the specified safety extra-low voltage (according to IEC

60449 and VDE 0100), the insulating measures will be destroyed. There is a danger to life from elec-

tric shock at the communication interfaces.

►Connect only suitable devices to the bus system.

Safety

9/52

DANGER

Danger to life from electric shock

Power supply packs that are not specified or are not approved will lead to severe injury to death.

►Make sure that the power supply pack meets the requirements for double isolation between

mains input voltage and output voltage, in accordance with IEC 61010 and IEC 60950.

►Make sure that the power supply pack meets the requirements in accordance with IEC 61010

and IEC 60950.

►Where possible, use original power supply packs or only power supply packs that correspond

with the applicable safety regulations.

WARNING

Danger to life from electric shock in the event of a fault

In the event of a fault, devices connected to the mains may be live. There is a danger to life from

electric shock when making contact with live components.

►Always keep the mains connection freely accessible so you can disconnect it at any time.

WARNING

Risk of danger to life through missing mains disconnection device

The vacuum pump and electronic drive unit are not equipped with a mains disconnection device

(mains switch).

►Install a mains disconnection device according to SEMI-S2.

►Install a circuit breaker with an interruption rating of at least 10,000 A.

WARNING

Risk of injury due to incorrect installation

Dangerous situations may arise from unsafe or incorrect installation.

►Do not carry out your own conversions or modifications on the unit.

►Ensure the integration into an Emergency Off safety circuit.

Risks in the event of malfunctions

WARNING

Risk of injury from parts moving after a power failure or troubleshooting

The "pumping station" function of the electronic drive unit will remain active after a power failure or if

errors occur that shut down the vacuum pump or the system. When power is restored or after ac-

knowledging a fault, the vacuum pump runs up automatically. There is a risk of injury to fingers and

hands if they enter the operating range of rotating parts.

►Always keep the mains connection freely accessible so you can disconnect it at any time.

►Remove present mating plugs or bridges from the electronic drive unit possibly before the mains

power returns, as these can cause an automatic run-up.

►Switch the pump off using the "Pumping station" function (parameter [P:010]).

2.3 Safety precautions

Duty to provide information on potential dangers

The product holder or user is obliged to make all operating personnel aware of dangers

posed by this product.

Every person who is involved in the installation, operation or maintenance of the product

must read, understand and adhere to the safety-related parts of this document.

Safety

10/52

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