EBARA EV-A Series User manual

PM10U EBARA CORPORATION

EV-A Series

DRY VACUUM PUMP

APPLICABLE TYPE

EV-A06

INSTRUCTION MANUAL

P.3

PM10U EBARA CORPORATION

HANDLING OF MANUAL

This instruction manual describes installation, operation, and maintenance about the EV-A Series Dry

Vacuum Pump.

Be sure to read this instruction manual to operate correctly before installing and operating it.

In particular, take care about the precautions for safety to the following warning words.

DANGER

This indicates the existence of imminent hazard, which if the equipment is operated without

respect to its contents, will result in death or a serious injury of the operator.

WARNING

This indicates the existence of potential hazard, which if the equipment is operated without

respect to its contents, will result in death or a serious injury of the operator.

CAUTION

This indicates the existence of potential hazard, which if the equipment is operated without

respect to its contents, may result in slight injury or less serious injury of the operator.

CONFIRMATION

This indicates the existence of possibility, which if the equipment is operated without respect to

its contents, may result in equipment damage.

The following symbols may appear on the EV-A Series Dry Vacuum Pump.

Warning ―refer to manual

Warning ― risk of electric shock

Warning ― hot surface

P.4

PM10U EBARA CORPORATION

This instruction manual describes important matters related to pump operation. Keep the manual in an

easy-to-see place so that it may be available whenever required.

＜Definitions of term＞

Definitions of term are as follows.

Solvent: IPA, Organic solvent such as Ethanol and etc.

Condensable gas: Water vapor or mixed gas with solvent.

Clean gas exhaust: Inert gas such as nitrogen, atmosphere (exhaust dry types of gas)

*These are one of the examples

*Regardless of the solvent kind and its amount, contact one of our sales offices before you start

operation. When you pump flammable chemical, including solvent stated above, always

introduce N2 through gas ballast system.

*To vacuum solvent and condensable gas, read P.17 3.3 Gas Ballast Mechanism and P.39 6.3

About The Gas Ballast Mechanism beforehand to handle correctly.

P.5

PM10U EBARA CORPORATION

WARRANTY OF THE DRY PUMP

Any failure attributable to our responsibility which is due to a defect of design, material, manufacturing, and

occurs within one year from the date of commencing operation by user or 18months from shipment by

EBARA, whichever comes first, shall be repaired or replaced free of charge.

This warranty shall be applicable only to the case where the equipment has been correctly operated in

accordance with this instruction manual and other instructions. Additionally warranty period by different

usage is set forth hereunder. Any defectives or damages that fall into the case stipulated below as

“Exemption of the warranty” shall be out of warranty.

Warranty period by different usage. (Applied to new purchase only. Product is warranted for the period

listed below from shipping date from factory)

Two (2) years warranty: Pumping clean gasses such as dry air and inert gases (N2, etc).

One (1) year warranty: Pumping condensable gases such as water vapor and solvent mixed gas.

(Prior meeting is required when pumping solvent)

Exemption of the warranty.

* Failure due to improper handling, operation or storage.

* Failure caused by the usage of special gas like acid, alkaline, corrosive gas, or the usage possibly

contains solid or may cause solidification and condensation.

* Failure due to negligence of necessary maintenance.

* Failure due to use of maintenance/replacement parts other than those made by manufacturer.

* Failure due to repair and modification by and party other than manufacturer and manufacturer’s approved

dealers.

* Failure due to fire, flood, earthquake, lightning and other force majeure.

This “Warranty” limitedly warrants to the repair and replacement of the affected portion of the product, and

does not warrant to the defect and damage collaterally occurs therewith.

Also This “Warranty” shall not be applicable to wearing and maintenance parts.

In case any failure or fault occurs, please contact one of our offices listed in the back.

P.6

PM10U EBARA CORPORATION

APPLICATION OF THE VACUUM PUMP

* This vacuum pump is intended to get a vacuum source for vacuum exhaust, maintenance of vacuum

condition, and a clean usage as a vacuum source for general industry. However, the above is not

applicable to the case where using this vacuum pump has been judged to be usable for a use other

than these by a previous arrangement with the user before purchase.

* When the use is going to change the process for using this vacuum pump or divert this pump to

another use, please consult our business offices listed in the back. It may be necessary to change

the specifications of the pump and peripheral units.

* Using this vacuum pump to the process where existing radiation is prohibited.

DANGER

Don’t use it to exhaust the combustible gas or the dangerous fumes for the human body, etc.

P.7

PM10U EBARA CORPORATION

Contents

1. ITEMS RELATED TO SAFETY

1.1 Safety --------------- 8

1.2 Types of Warning Label -------------- 12

1.3 Warning Label Positions -------------- 13

2. PRODUCT CONFIRMATION -------------- 14

3. PRODUCT OVERVIEW

3.1 Pump Body -------------- 15

3.2 Electrical Equipment -------------- 15

3.3 Gas ballast mechanism -------------- 15

3.4 Product Specifications -------------- 16

3.5 External View -------------- 18

3.6 Pumping Performance -------------- 19

4. INSTALLATION OF THE PUMP

4.1 Installation -------------- 20

4.2 Piping -------------- 23

4.3 Electric Wiring -------------- 24

5. OPERATION PANEL

5.1 Operation Panel -------------- 29

5.2 How to Switch LED Display -------------- 31

6. OPERATION AND STOP

6.1 Preparations for Operation -------------- 33

6.2 Operation and Stop -------------- 33

6.3 About the Gas Ballast Mechanism -------------- 37

7. MAINTENANCE

7.1 Routine Maintenance -------------- 39

7.2 Inlet and Outlet Plumbing -------------- 40

7.3 Lubricant -------------- 40

7.4 Overhaul -------------- 42

7.5 Removal of the Pump -------------- 43

8. TROUBLESHOOTING

8.1 Primary Trouble -------------- 44

8.2 Pump Malfunction -------------- 45

9. SCRAPPING METHOD -------------- 46

10. PRECAUTIONS ON RETURN OF PRODUCT

10.1 Note -------------- 46

10.2 Returning Procedure -------------- 46

< Notice >

Return Notice Sheet

P.8

PM10U EBARA CORPORATION

1. ITEMS RELATED TO SAFETY

1.1 Safety

This instruction manual describes the following items related to safety.

Read this manual carefully before operating this product.

Safety precautions are also described in each related sections.

DANGER

Do not use this product for pumping harmful or flammable gas.

Turn off the main switch on the pump and disconnect power cable before servicing. Do not

supply power before completion of service work.

WARNING

Because the temperatures of the inlet and outlet pipes of the pump become high, arrange them

so that they may not come in contact with the human body and combustible materials.

Perform leak check after piping maintenance. Apply pressure form exhaust piping and

pressurize up to 0.05 MPa for pressure leak check.

Wiring work must be done by qualified workers.

This product is not equipped with earth leakage breaker (ELB) and emergency off switch (EMO).

Follow the local regulations when installing this product.

Be sure to perform grounding, otherwise an electric shock may be caused by electric leakage.

Pump remains hot during/after operation. Avoid direct skin contact otherwise it may cause burn.

Keep combustible materials away from the product. Do not attempt to service the product when

it is hot.

Do not remove packaging covers during operation.

P.9

PM10U EBARA CORPORATION

CAUTION

Do not step on the pump, otherwise falling or turnover may be caused. Do not place anything on

the pump as it may damage the product.

Do not lift the pump by your self. Lift the pump by hand with two (2) persons.

Do not use sling or the like to lift the pump as the handles are not designed to be used with slings.

Use high corrosion-resistant materials for pipes and parts used on both inlet port and outlet port

sides.

Pump starts operation as soon as power is supplied if pump run command presents.

Take safety precautions and make sure pump inlet and outlet are plumbed properly before

supplying power.

Use lubricant oil specified on P.18 (3.4. Product specification) section.

Do not overfill more than upper limit as it may damage the product.

Refill oil immediately when oil level is low as it may cause severe damages to the product.

P.10

PM10U EBARA CORPORATION

CONFIRMATION

Don't pile packed pumps and don't lay each pump on its side in any case; otherwise the damage

may be caused to the pumps.

Keep space, 100mm or more at front and rear side, 50mm or more at lateral side, to secure

good ventilation for cooling. Bad ventilation can cause pump overheat which results in

unpredicted pump failure.

Do not place the device which could be heat source at the front of pump, and consider that air

ventilation temperature around pump is kept at 15 to 30 degrees C. High-temperature ventilation

heats up pump and causes pump failure.

For Input signals (Pin No. 1-9, 2-10, 3-11, 4-12), apply a voltage of 24V DC on the pump

controller side. Don't apply a voltage on the equipment side; otherwise the controller may go

wrong.

Pump stops in emergency off state if STOP/RESET switch on the controller is pressed during

pump operation with driving connector under direct power input. To restart the pump, turn

power off (wait until LED light goes off) then turn it back on.

Pump stops in emergency off state if STOP/RESET switch on the controller is pressed during

pump operation under remote control. To restart the pump, deactivate pump run command (pin

No. 1-9) then apply the command again or press STOP/RESET switch.

In the states that “LOCAL/REMOTE Selection Switch” in the I/O connector (CN2) is open –

means Pin No.3-11 is open circuit -, external signal mode is not available. In this case,

handling by operation-panel is required.

Pump stops if the controller is removed during operation.

Frequent power supply to the inverter may shorten the inverter life. Remote operation

described in 6.2.3 section P.37 is recommended if frequent RUN/STOP is necessary.

This manual suits for next models

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