Brooks VDM300 Owner's manual
Installation and Operation Manual
X-DPT-EtherCAT-VDM300-eng
Part Number: 541B217AAG
March, 2019Brooks®EtherCAT®VDM
Supplemental Manual for
Brooks®EtherCAT®VDM300
DI Water Vapor Delivery Module
Brooks®VDM300 Series
with EtherCAT®Communications
Installation and Operation Manual
X-DPT-EtherCAT-VDM300-eng
Part Number: 541B217AAG
March, 2019
Brooks®EtherCAT®VDM
ESD (Electrostatic Discharge)
CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed
during the removal, installation or other handling of internal circuit boards or devices.
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,
removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before
installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components
that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these
devices. Damaged components, even though they appear to function properly, exhibit early failure.
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly
installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to
and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
•To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
•Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover
for local sales office contact information. Save this instruction manual for future reference.
WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed
this warning can result in serious personal injury and / or damage to the equipment.
•If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
•Follow all warnings, cautions and instructions marked on and supplied with the product.
WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can
result in serious personal injury and / or damage to the equipment.
•Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.
Connect all products to the proper electrical and pressure sources.
•Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet
and outlet connections. If no leaks are present, bring the system up to the operating pressure.
•Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use
replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe
operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
•Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when
maintenance is being performed by qualified persons.
WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely
drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).
•The Specifications Section of this manual contains instructions related to the PED directive.
•Products described in this manual are in compliance with EN directive 2014/34/EU.
•All Brooks Instrument Flowmeters fall under fluid group 1.
•Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.
•Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic
Compatibility (EMC directive 2014/30/EU).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to an earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.
The shield should be terminated to an earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
European Pressure Equipment Directive (PED)
European Electromagnetic Compatibility (EMC)
Essential Instructions
Read before proceeding!
Installation and Operation Manual
X-DPT-EtherCAT-VDM300-eng
Part Number: 541B217AAG
March, 2019Brooks®EtherCAT®VDM
Dear Customer,
We recommend that you read this manual in its entirety as this will enable efcient and proper use of the
EtherCAT® VDM300. Should you require any additional information concerning the EtherCAT VDM300, please
feel free to contact your local Brooks Sales and Service Ofce; see back cover for contact information, or visit us
on the web at www.BrooksInstrument.com. We appreciate this opportunity to service your uid measurement and
control requirements, and trust that we will be able to provide you with further assistance in the future.
Yours sincerely,
Brooks Instrument
Installation and Operation Manual
X-DPT-EtherCAT-VDM300-eng
Part Number: 541B217AAG
March, 2019
Brooks®EtherCAT®VDM
ESD (Electrostatic Discharge)
CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must
be observed during the removal, installation or other handling of internal circuit boards or devices.
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed, removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before installation.
Removed boards must immediately be placed in protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components that
utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these devices. Damaged
components, even though they appear to function properly, exhibit early failure.
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly
installed, operated and maintained to ensure they continue to operate within their normal specications. The following instructions must be adhered to
and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
• To ensure proper performance, use qualied personnel to install, operate, update, program and maintain the product.
• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back
cover for local sales ofce contact information. Save this instruction manual for future reference.
WARNING: Do not operate this instrument in excess of the specications listed in the Instruction and Operation Manual. Failure to heed
this warning can result in serious personal injury and / or damage to the equipment.
• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarication.
• Follow all warnings, cautions and instructions marked on and supplied with the product.
WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed
this warning can result in serious personal injury and / or damage to the equipment.
• Install your equipment as specied in the installation instructions of the appropriate instruction manual and per applicable local and national codes.
Connect all products to the proper electrical and pressure sources.
• Operation: (1) Slowly initiate ow into the system. Open process valves slowly to avoid ow surges. (2) Check for leaks around the ow meter inlet
and outlet connections. If no leaks are present, bring the system up to the operating pressure.
• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualied people
use replacement parts specied by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe
operation of your process at risk. Look-alike substitutions may result in re, electrical hazards or improper operation.
• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when
maintenance is being performed by qualied persons.
WARNING: For liquid ow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must
be completely drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment
Directive (PED).
• The Specications Section of this manual contains instructions related to the PED directive.
• Products described in this manual are in compliance with EN directive 2014/34/EU.
• All Brooks Instrument Flowmeters fall under uid group 1.
• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.
The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic
Compatibility (EMC directive 2014/30/EU).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks Instrument supplies high quality cable(s) which meets the specications for CE certication.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen
clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to an earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certication.
The shield should be terminated to an earth ground.
European Pressure Equipment Directive (PED)
European Electromagnetic Compatibility (EMC)
Essential Instructions
Read before proceeding!
Installation and Operation Manual
X-DPT-EtherCAT-VDM300-eng
Part Number: 541B217AAG
March, 2019Brooks®EtherCAT®VDM
Paragraph Page
Number Number
Section 1 General Information
1.1 Introduction.................................................................................................1-1
1.2 Denition of Terms...................................................................................... 1-1
1.3 Numbers .....................................................................................................1-2
Section 2 Quick Start
2 Quick Start .................................................................................................2-1
2.1 Master Hardware .......................................................................................2-1
2.2 Physical Interface ......................................................................................2-2
2.2.1 LEDs..........................................................................................................2-4
Section 3 Slave Conguration
3 Slave Conguration.....................................................................................3-1
3.1 Introduction.................................................................................................3-1
3.2 Process Data Object (PDO) Mapping......................................................... 3-1
3.2.1 RxPDO Mapping.........................................................................................3-2
3.2.2 TxPDO Mapping .........................................................................................3-2
3.3 Communication Specic Data .................................................................... 3-3
3.4 SDP Device Type Specic Data ................................................................. 3-4
3.4.1 Input Data ...................................................................................................3-4
3.4.2 Output Data ................................................................................................3-5
3.4.3 Conguration Data......................................................................................3-5
3.4.4 Information Data .........................................................................................3-6
3.5 Semi Device Prole Area............................................................................ 3-7
3.6 Value Range Setting................................................................................... 3-7
3.7 Manufacturer Specic Device Data ............................................................ 3-8
3.8 SDP and CDP Device Specic Inputs ........................................................ 3-9
3.9 SDP and CDP Device Specic Information Data........................................ 3-9
3.10 SDP and CDP Command Objects ............................................................. 3-10
Section 4 Appendix
4 Exceptions Implementation...................................................................................4-1
Warranty, Local Sales/Service Contact Information ....................................Back Cover
Installation and Operation Manual
X-DPT-EtherCAT-VDM300-eng
Part Number: 541B217AAG
March, 2019
Brooks®EtherCAT®VDM
Figure Figure
Number Number
2-1 VDM300 Device Bottom Panel.................................................................... 2-2
2-2 15-Pin D-sub Male Connector Pin Layout ................................................... 2-2
Table Table
Number Number
2-1 Pin Labeling of 15-Pin D-sub Connector .................................................... 2-3
2-1a Error Logic for Devices Without Low Level Alarm Conguration
(Model Code: VDM3W3000AxAxNx xxx)......................................................................... 2-3
2-1b Error Logic for Devices With Low Level Alarm Conguration
(Model Code: VDM 3W3000AxAxLxxxx) ......................................................................... 2-3
2-2 RUN LED Specication .............................................................................. 2-4
2-3 LA LED Specication..................................................................................2-4
3-1 Object Dictionary Structure ........................................................................ 3-1
3-2 Default RxPDO........................................................................................... 3-2
3-3 Default TxPDO ........................................................................................... 3-2
3-4 Communication Specic Data .................................................................... 3-3
3-5 Input Data................................................................................................... 3-4
3-6 Output Data ................................................................................................ 3-5
3-7 Conguration Data ..................................................................................... 3-5
3-8 Information Data......................................................................................... 3-6
3-9 Semi Device Prole .................................................................................... 3-7
3-10 Value Range Setting................................................................................... 3-7
3-11 Manufacturer Specic Device Output Data ................................................ 3-8
3-12 Manufacturer Specic Device Input Data ................................................... 3-9
3-13 SDP and CDP Device Specic Inputs ........................................................ 3-9
3-14 SDP and CDP Device Specic Information Data ....................................... 3-9
3-15 SDP and CDP Command Objects............................................................. 3-10
4-1 Objects for Reporting and Controlling Exceptions...................................... 4-2
4-2 Device Errors..............................................................................................4-3
4-3 Manufacturer Errors ...................................................................................4-3
4-4 Manufacturer Warnings .............................................................................. 4-4
Installation and Operation Manual
X-DPT-EtherCAT-VDM300-eng
Part Number: 541B217AAG
March, 2019Brooks®EtherCAT®VDM
1 General Information
1.1 Introduction
EtherCAT®is an Ethernet based communication system and is known for its high cycle time
and cost efcient cabling and master application solutions. Brooks Instrument now introduces
the EtherCAT interface on its VDM300 Series platform.
This manual is a supplement to the Brooks VDM300 Series installation and operation manual.
It is assumed that the owner of this EtherCAT mass ow controller or meter is thoroughly
familiar with the theory and operation of this device. If not, it is recommended that the owner
read the installation and operation manual rst before continuing with this supplement.
This manual assumes basic knowledge and understanding of EtherCAT (its topology and its
method of logically accessing the data or parameters contained within the device). This manual
is not intended to be a replacement to the EtherCAT specications. It is recommended but not
required for the purposes of this manual, that the user obtains a copy of the EtherCAT
specications (www.ethercat.org).
This manual does not make any assumptions about any particular manufacturer of equipment
or custom software used by the user to communicate with the Brooks device, but assumes the
user has thorough understanding of such equipment and any conguration software.
Application Notes and FAQ’s are available at the Brooks Instrument web site
(www.BrooksInstrument.com).
1.2 Denition of Terms
Abbreviation Description
CDP Common Device Profile
CoE CAN Application Protocol over EtherCAT
ESC EtherCAT Slave Controller
ESI EtherCAT Slave Information (device
description in XML format)
ETG EtherCAT Technology Group
LA Link Active
MFC/MFM Mass Flow Controller/Mass Flow Meter
OD Object Dictionary
PDO Process Data Object
PreOp Pre-Operational
RO Read Only
RW Readable and Writable
RXPDO Receive PDO
SDP Specific Device Profile
SI Sub-Index
TXPDO Transmit PDO
WO Write Only
Installation and Operation Manual
X-DPT-EtherCAT-VDM300-eng
Part Number: 541B217AAG
March, 2019
Brooks®EtherCAT®VDM
1.3 Numbers
Numeric values used throughout this manual will be clearly denoted
as to the base numeric system it represents. All hexadecimal numbers
(base 16) will be prexed with a 0x, like 0xA4. All binary numbers
(base 2) will be sufxed with a b, like 1001b. All other numbers not
annotated this way will be assumed decimal (base 10).
Installation and Operation Manual
X-DPT-EtherCAT-VDM300-eng
Part Number: 541B217AAG
March, 2019Brooks®EtherCAT®VDM
2 Quick Start
This section assumes the owner of the device has a fully
operational and trouble-free communications network with
appropriate power supplies. This section also assumes that
an EtherCAT master application is connected to the network
capable of PDO and mailbox data communication. Both types
of data communication modes are supported by the Brooks
VDM300 EtherCAT device.
Brooks®VDM300Series conforms to the ETG.5003
Semiconductor Device Prole specication.
This specication consists of two parts:
Part 1: Common Device Prole
The Common Device Prole (CDP) species requirements
applicable to all devices described in the Specic Device
Proles. Furthermore, it describes features and functionalities
which shall be further dened in the Specic Device Proles.
Part 2xxx: Specic Device Proles
The Specic Device Prole (SDP) is based on Part 1 (CDP)
and denes the data structure of the specic devices.
The Brooks VDM300 Series implementation of the Semi
EtherCAT SDP conforms to the proposed specication for
ETG.5003.2121 which is under review by ETG.
For a complete specication of a device used in the semicon-
ductor manufacturing industry a SDP shall be read comple-
mentary with the CDP. Users may obtain a copy of the Ether-
CAT specications at (www.ethercat.org).
2.1 Master Hardware
Various companies provide EtherCAT master applications,
e.g. TwinCAT from Beckhoff, or offer EtherCAT master stacks
to develop a master application, e.g. Acontis. A PC can be
used to run most EtherCAT master applications but needs
dedicated Ethernet hardware to support the high cycle times
and kernel mode operation of the master application, see
(www.beckhoff.com).
Installation and Operation Manual
X-DPT-EtherCAT-VDM300-eng
Part Number: 541B217AAG
March, 2019
Brooks®EtherCAT®VDM
2.2 Physical Interface
The available physical interfaces on the EtherCAT device
are listed below. Refer to the VDM300 Series Installation
and Operation Manual for more details.
• 15 pin D-sub male connector for power and analog I/O,
indicated by “PWR INPUT/OUTPUT”
• Micro USB for RS485 diagnostic port indicated by ‘DIAG’,
refer to the VDM300 Series installation and operation manual
for more details Twin RJ4 ports, indicated by “EtherCAT IN
and OUT” Power Supply and Analog I/OPower needs to be
supplied via the 15 pin D-sub connector. This connector also
provides access to analog I/O signals, see Table 2-1
Figure 2-1 VDM300 Device Bottom Panel
Figure 2-2 15-Pin D-sub Male Connector Pin Layout
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