Agilent Technologies 9698205M016 User manual

IPS - Integrated

Pumping System

Model

9698205M016

Instruction Manual

87-901-012-01

10/2017

IPS - Integrated Pumping System / 887-901-012-01

Notices

No part of this manual may be

reproduced in any form or by any

means (including electronic storage

and retrieval or translation into a

foreign language) without prior

agreement and written consent from

Agilent Technologies, Inc. as governed

by United States and international

Manual Part Number

Publication Number: 87-901-012-01

Edition

Edition 10/2017

Printed in ITALY

Agilent Technologies Italia S.p.A.

Vacuum Products Division

Via F.lli Varian, 54

10040 Leinì (TO)

ITALY

Warranty

The material contained in this

document is provided “as is,” and is

subject to being changed, without

notice, in future editions. Further, to

the maximum extent permitted by

applicable law, Agilent disclaims all

warranties, either express or implied,

with regard to this manual and any

information contained herein,

including but not limited to the

implied warranties of merchantability

and fitness for a particular purpose.

Agilent shall not be liable for errors

or for incidental or consequential

damages in connection with the

furnishing, use, or performance of

this document or of any information

contained herein. Should Agilent and

the user have a separate written

agreement with warranty terms

covering the material in this

document that conflict with these

terms, the warranty terms in the

separate agreement shall control.

Technology Licenses

The hardware and/or software

described in this document are

furnished under a license and may be

used or copied only in accordance

with the terms of such license.

Restricted Rights Legend

If software is for use in the

performance of a U.S. Government

prime contract or subcontract,

Software is delivered and licensed as

“Commercial computer software” as

defined in DFAR 252.227-7014 (June

1995), or as a “commercial item” as

defined in FAR 2.101(a) or as

“Restricted computer software” as

defined in FAR 52.227-19 (June 1987)

or any equivalent agency regulation or

contract clause. Use, duplication or

disclosure of Software is subject to

Agilent Technologies’ standard

commercial license terms, and non-

DOD Departments and Agencies of the

U.S. Government will receive no

greater than Restricted Rights as

defined in FAR 52.227-19(c)(1-2) (June

1987). U.S. Government users will

receive no greater than Limited Rights

as defined in FAR 52.227-14 (June

1987) or DFAR 252.227-7015 (b)(2)

(November 1995), as applicable in any

technical data.

Trademarks

Windows and MS Windows are U.S.

registered trademarks of Microsoft

Corporation.

Safety Notices

A CAUTION notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

A WARNING notice denotes a

hazard. It calls attention to an

operating procedure, practice, or the

like that, if not correctly performed

or adhered to, could result in

personal injury or death. Do not

proceed beyond a WARNING notice

until the indicated conditions are

fully understood and met.

WARNING

CAUTION

IPS - Integrated Pumping System

IPS - Integrated Pumping System / 887-901-012-01 3/64

IPS - Integrated Pumping System

4/64 IPS - Integrated Pumping System / 887-901-012-01

Contents

IPS - Integrated Pumping System / 887-901-012-01 5/64

Contents

Installation Procedure 7

Safety Guideline for Turbomolecular Pumps 8

General Information 9

Storage 11

Preparation for Installation 12

Installation 14

Use 15

Operating Procedure 18

Maintenance 20

Disposal 21

Technical Information 23

Description of the Elekta Pumping System 25

Turbopump Description 27

System Venting Port 28

Controller Description 29

Analog I/O & RS232 Ports and Status LED 30

Turbomolecular Pump Speed Bar-Graph 31

Main Switch 32

Input Power Connector 33

Contents

6/64 IPS - Integrated Pumping System / 887-901-012-01

Rotary Vane Forepump Description 34

Oil Level Check Window 35

Oil Drain Port 36

Exhaust Filtered Port37

Inlet Screen Installation 38

Technical Specification 39

Elekta Pumping System Outline 40

Interconnections 41

RS 232 Communication Description 43

Window Protocol 45

Maintenance 55

Troubleshooting 57

Accessories Kit 58

IPS - Integrated Pumping System

7/64

Installation Procedure

Safety Guideline for Turbomolecular Pumps 8

General Information 9

Safety Symbols 10

Storage 11

Preparation for Installation 12

Installation 14

Use 15

Operating Procedure 18

Switching on and Use of Elekta Pumping System 18

Elekta Pumping System Switching off18

Emergency Stop 19

Maintenance 20

Disposal 21

Original Instructions

1 Installation Procedure

Safety Guideline for Turbomolecular Pumps

8/64 IPS - Integrated Pumping System / 887-901-012-01

Safety Guideline for Turbomolecular Pumps

Turbomolecular pumps as described in the following operating

manual contain a large amount of kinetic energy due to the high

rotational speed in combination with the specific mass of their

rotors.

In case of a malfunction of the system for example rotor/stator

contact or even a rotor crash the rotational energy may be released.

WARNING!

To avoid damage to equipment and to prevent injuries to operating personnel

the installation instructions as given in this manual should be strictly

followed!

Installation Procedure

General Information

IPS - Integrated Pumping System / 887-901-012-01 9/64

General Information

This equipment is destined for use by professionals. The user should

read this instruction manual and any other additional information

supplied by Agilent before operating the equipment. Agilent will not

be held responsible for any events occurring due to non-compliance,

even partial, with these instructions, improper use by untrained

persons, non-authorized interference with the equipment or any

action contrary to that provided for by specific national standards.

This manual uses the following standard protocol:

WARNING!

The warning messages are for attracting the attention of the operator to a

particular procedure or practice which, if not followed correctly, could lead

to serious injury.

CAUTION! The caution messages are displayed before procedures which, if not followed,

could cause damage to the equipment.

NOTE The notes contain important information taken from the text.

1 Installation Procedure

General Information

10/64 IPS - Integrated Pumping System / 887-901-012-01

Safety Symbols

SYMBOLS SYMBOLS DESCRIPTIONS

Access denied to active pacemaker’s holders.

The device is marked with this symbol t to

indicate that pacemaker holders must not come

in contact with the device itself.

Electric hazard.

The device is marked with this symbol when the

operator, due to the presence of an high voltage,

must refer to the user manual in order to protect

himself from electrical shock risks.

Magnetic field hazard.

The device is marked with this symbol to inform

the operator about the presence of a magnetic

field.

Hot surface hazard.

The device is marked with this symbol when the

operator must avoid the contact with potentially

hot surfaces which may cause burns.

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