Edwards STP-iXR1606 User manual

MT-79E-001-D

STP Series Turbomolecular Pumps

STP-iXR1606

(Issue 1-d)

Instruction Manual

Read through the Safety Precautions and

each section of this Manual carefully before

using the STP pump.

Keep this Manual in a place where you can

quickly access it at any time.

July

2014

Original Instructions

This product has been manufactured under a quality system registered to ISO9001

Declaration of Conformity

We,

Manufacture: Edwards Japan Limited

1078 1, Yoshihashi, Yachiyo shi, Chiba, 276 8523, Japan

EU Representative: Edwards Limited

Manor Royal, Crawley, West Sussex, RH10 9LW, UK

declare under our sole responsibility, as manufacturer and person within the EU authorised to

assemble the technical file, that the product(s)

Product Name: Turbomolecular pump

Model Number: STP iXR1606 series

Accessories Covered: Display Unit: iDT 001,

Communication Interface (Profibus, Device Net)

to which this declaration relates is in conformity with the following standard(s) or other normative

document(s)

EN12100:2010 Safety of machinery. General principles for design.

Risk assessment and risk reduction.

EN1012 2:1996, A1:2009 Compressors and Vacuum Pumps.

Safety Requirements. Vacuum Pumps

EN61010 1:2010 Safety Requirements for Electrical Equipment for Measurement,

Control and Laboratory Use. General Requirements

EN61326 1:2006 Electrical equipment for measurement, control and laboratory Use.

EMC requirements. General requirements

(Immunity: Industrial locations, Emission: Class A)

EN61000 6 2:2005 Electromagnetic compatibility (EMC). Generic standards.

Immunity for industrial environments

EN55011:2009, A1:2010 Industrial, scientific and medical equipment Radio frequency

disturbance characteristics (Group1, Class A)

EN50581:2012 Technical Documentation for the Assessment of Electrical and Electronic

Products with respect to the Restriction of Hazardous Substances

and fulfils all the relevant provisions of

2006/42/EC Machinery Directive

2006/95/EC Low Voltage Directive

2004/108/EC Electromagnetic Compatibility (EMC) Directive

2011/65/EU* Restriction of Certain Hazardous Substances (RoHS) Directive

* i.e. The product(s contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE; 0.01wt% for

cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive . The RoHS Directive does not

legally apply to industrial vacuum equipment until July 2019 (July 2017 for instruments .

Note: This declaration covers all product serial numbers from the date this Declaration was

signed onwards.

DOC

anufacture:

uji Kato, TMP Technical Senior Manager

Edwards Japan Limited

July. 2013,

Yachiyo

Date and Place

EU representative:

Ian Stones

Director of

Technology, Edwards Limited

August

. 20

, Burgess Hill

Date and Place

STP-iXR1606 Turbomolecular Pump

MT-79E-001-D

Page i

PAGE

CONTENTS

Section Title Page

1 INTRODUCTION 1

1.1 Scope and definitions 1

1.2 Applied standards 2

1.3 Limited warranty 3

1.3.1 Warranty period 3

1.3.2 Item warranted 3

1.3.3 Disclaimer 4

1.3.4 Spare parts 4

1.4 Precautions for safe operation of the STP pump 5

1.4.1 Usable gases 5

1.5 Maintenance and inspection precautions 6

1.6 Labels 6

1.7 Operation principle of the STP pump 8

1.8 STP pump specification 10

2 TECHNICAL DATA 11

2.1 STP pump specifications 11

2.2 Maximum gas flow-rate 12

2.3 Water cooling use condition 13

2.4 Control unit 14

2.5 External appearance of the STP pump 16

2.6 Label affixing positions 17

3 INSTALLATION OF THE STP PUMP 19

3.1 Precautions before installation 19

3.1.1 Operating environment 19

3.1.2 Installation area 21

3.1.3 Bench 22

3.1.4 Insulation test 22

3.2 Unpacking and installation 23

3.3 Name and function of each part 27

3.3.1 Name and function of the pump 27

3.3.2 Name and function of the control unit 28

3.4 How to install the STP pump 31

3.4.1 Cleaning the seal 32

3.4.2 STP pump installation positions 33

3.4.3 Secure the STP pump 34

3.4.4 Legs for securing the base 38

3.4.5 Power cable 39

3.4.6 How to connect the power cable 41

3.5 Precautions of vacuum piping 43

3.5.1 Vacuum piping method 44

3.6 Introducing N2gas

(for the STP pump equipped with purge port) 44

3.7 Connecting the water cooling pipe 45

3.8 Attaching a baking heater 46

STP-iXR1606 Turbomolecular Pump

MT-79E-001-D

Page ii

PAGE

ii CONTENTS (CONTINUED)

Section Title Page

3.9 Connecting to semiconductor equipment 47

3.9.1 Connecting to power 47

3.9.2 Emergency off circuit (EMO circuit) 47

4 OPERATION 49

4.1 Gas pumping, cooling and baking the STP pump 49

4.1.1 Gas pumping 49

4.1.2 How to introduce a purge gas 50

4.2 Cooling the STP pump 50

4.2.1 Water-cooling method 50

4.3 Baking the STP pump 51

4.4 Before starting the STP pump 52

4.4.1 Confirmation before starting 52

4.4.2 Confirmation of vacuum system 52

4.5 Powering ON 53

4.6 Pump operation 53

4.6.1 Input operation port setting 53

4.6.2 Starting/stopping the STP pump 54

4.7 How to start/stop the STP pump 55

4.7.1 Starting the STP pump after stopping 55

4.7.2 Starting the STP pump after a safety function operates 55

4.7.3 Powering OFF 55

4.8 LED 56

4.9 Parallel port input/output signal 57

4.9.1 Input signal pins 57

4.9.2 Input operation port setting 61

4.9.3 Rotation INHIBIT signal 62

4.9.4 Second speed option 63

4.9.5 Output signal pins 64

5 SERIAL COMMUNICATION PROTOCOL 69

5.1 Introduction 69

5.2 Connection and setting up 70

5.2.1 Signal connection 70

5.2.2 Connecting the RS485 72

5.2.3 Communication parameter setting 73

5.2.4 Input operation port setting 74

5.2.5 Serial communication timeout setting 75

5.2.6 Recommended items about communication cable installation 76

5.3 Protocol specifications 79

5.3.1 General description 79

5.3.2 Standard transmission frame

(in the RS232/RS485 single point connection) 80

5.3.3 Control command

(in the RS232/RS485 single point connection) 81

5.3.4 Query command

(in the RS232/RS485 single point connection) 82

STP-iXR1606 Turbomolecular Pump

MT-79E-001-D

Page iii

PAGE

iii

CONTENTS (CONTINUED)

Section Title Page

5.3.5 Transmission data format 83

5.3.6 Frame control (checksum) 84

5.3.7 Error control 84

5.3.8 Transmission frame in the RS485 multi-point connection 84

5.3.9 Control command in the RS485 multi-point connection 86

5.3.10 Query command in the RS485 multi-point connection 87

5.3.11 Broadcasting command in the RS485 multi-point connection 88

5.3.12 Application note 89

5.4 Command specifications 93

5.4.1 Command list 93

5.4.2 ReadMeas 94

5.4.3 Command 94

5.4.4 ReadFailMess 95

5.4.5 ReadModFonct 99

5.4.6 ReadVersion 101

5.4.7 ReadCounters 102

5.4.8 ReadSetPoint 103

5.4.9 ReadMotorTemp 103

5.4.10 ReadStatus 104

5.4.11 ReadEvents 105

5.4.12 SetSpeedSetPoint 106

5.4.13 ReadSpeedSetPoint 107

5.4.14 ReadModFonctWithWarning 108

5.4.15 ReadMeasValue 111

5.4.16 ReadOptionFunc 113

5.4.17 SetOptionFunc 116

5.4.18 ReadCondition 118

5.4.19 ReadEventsWithTime 120

5.4.20 SetOptions 124

5.4.20.1 Second speed option setting 124

5.4.20.2 Second speed selection 125

5.4.21 ReadOptions 126

5.4.21.1 Second speed function setting 126

5.4.21.2 Second speed select 127

STP-iXR1606 Turbomolecular Pump

MT-79E-001-D

Page iv

PAGE

iv CONTENTS (CONTINUED)

Section Title Page

6 STP-LINK AND DISPLAY UNIT 129

6.1 STP-Link 129

6.2 Display unit 130

7 SAFETY FUNCTIONS 131

7.1 Safety functions 131

7.1.1 Power Failure 131

7.1.2 Operation after a power recovery 132

7.1.3 Abnormal state of magnetic bearing (Disturbance) 133

7.1.4 Excessive vibration (Disturbance) 133

7.1.5 Motor driver overload (DRV Overload) 133

7.1.6 Overheating inside the STP pump (MOTOR Overheat) 133

7.1.7 Overheating inside the control unit (CNT Overheat) 133

7.1.8 Overspeed 134

7.2 "WARNING" function 134

7.2.1 "WARNING" function 134

7.3 Contents of WARNING function 136

7.3.1 First Damage limit 136

7.3.2 Second Damage Limit 136

7.3.3 Pump run time over 136

7.3.4 Pump Overload 137

7.3.5 Imbalance 137

7.4 WARNING function setting 138

7.5 Troubleshooting immediately after failure occurs 139

7.5.1 After power failure 139

7.5.2 After other abnormality/error 139

7.6 Troubleshooting 140

7.6.1 Indication of "FAILURE" LED (red) 140

7.6.2 Indication of "FAILURE" LED (green) 147

7.6.3 No Indication of the "FAILURE" LED 147

8 MAINTENANCE AND INSPECTION 149

8.1 Maintenance and inspection 149

8.2 Cleaning 150

8.3 Inspecting the deposit 150

8.4 Maintenance 151

8.4.1 Recommended overhaul intervals 151

8.4.2 Standard replacement parts 151

8.4.3 Recommended maintenance intervals for main parts 152

8.5 Transporting for repair or overhaul 153

STP-iXR1606 Turbomolecular Pump

MT-79E-001-D

Page v

PAGE

CONTENTS (CONTINUED)

Section Title Page

9 STORAGE AND DISPOSAL 155

9.1 Storage of the STP pump 155

9.2 Disposal 156

10 SERVICE, SPARES AND ACCESSORIES 157

10.1 Introduction 157

10.2 Service 157

10.3 Spares 157

10.4 Accessories 158

STP-iXR1606 Turbomolecular Pump

MT-79E-001-D

Page vi

PAGE

vi ILLUSTRATIONS

Figure Title Page

1 STP pump installation warning label 6

2 Hot surface warning label 6

3 Heavy product caution label 7

4 High voltage device caution label 7

5 Rotation instruction label 8

6 Cross sectional view of the STP pump 8

7 External appearance of STP-iXR1606 16

8 Label affixing positions 17

9 Space around the STP pump 21

10 Example of lifting the STP pump 23

11 Example of lifting the STP pump (horizontal positioning) 24

12 Jack-up the STP pump 25

13 Control unit bottom face 25

14 STP pump with eyebolts 26

15 Configuration of the STP pump 27

16 Control unit (Front panel) 28

17 Installation of the STP pump to the vacuum equipment 31

18 STP pump installation positions 33

19 Positions of the outlet port on the horizontally

or slanted installed STP pump 33

20 Bolt position for securing the flange 37

21 Methods of securing the STP pump 37

22 Screw holes for securing the base 38

23 Power cable 39

24 Connecting method of the power cable 40

25 Height of purge port 44

26 Positions of the cooling water port 45

27 Baking heater installation position 46

28 Pump operation method 1 54

29 Pump operation method 2 54

30 "ROTATION" LED Indication 56

31 X2 REMOTE connector 57

32 X2 REMOTE input signal pins (contact input) 60

33 X2 REMOTE output signal pins 66

34 Serial port 69

35 X3/X4 connector (D-Sub9) 71

36 RS485 connections 72

37 Grounding example (Both ends grounding) 76

38 Grounding example (single point grounding) 76

39 Example of ring ferrite core installation 77

40 Example of cable installation in metallic duct 77

41 Example of differential signal waveform 78

42 PC to SIM communication 79

43 Block diagram of communication process example 89

44 Example of answer resending process 90

45 Example of response when the command is sent continuously 90

46 Example of command sending during answer data reply 90

47 Example of communication cycle process 91

48 Example of command sending process 92

49 Example of answer receiving process 92

STP-iXR1606 Turbomolecular Pump

MT-79E-001-D

Page vii

PAGE

vii

ILLUSTRATIONS (CONTINUED)

Figure Title Page

50 Display unit iDT-001 130

51 WARNING output 135

52 Failure output 140

STP-iXR1606 Turbomolecular Pump

MT-79E-001-D

Page viii

PAGE

viii TABLES

Table Title Page

1 Environmental requirements for installation 20

2 Eyebolt size 23

3 Pump functions 27

4 Control unit front panel functions 29

5 Control unit front panel functions (continued) 30

6 Tightening torque of bolt 34

7 Maximum torque predicted

and recommended securing bolt for inlet port flange 35

8 Power cable 39

9 Starting/stopping the STP pump (X2 REMOTE) 54

10 Reset Operation (X2 REMOTE) 55

11 LED Indications for each state 56

12 X2 REMOTE input signal pins 58

13 X2 REMOTE input signal pins (continued) 59

14 Input operation port setting 61

15 Rotation INHIBIT signal input 62

16 Second speed function 63

17 X2 REMOTE output signal pins 65

18 X2 REMOTE output signal pins (continued) 66

19 Rated contacts for relays CR1 to CR8 67

20 X3/X4 pin position 70

21 Communication parameters 73

22 Input operation port 74

23 Serial communication time out setting 75

24 Transmission control characters 80

25 Pump operation commands 88

26 Command list 93

27 Pump operation commands 95

28 Error message values 97

29 Error message values (continued) 98

30 Pump operation mode 100

31 Remote mode 105

32 Warning value bit assign 109

33 Parameter setting value 114

34 Option function number and parameter list 124

35 Option function number and parameter list 126

36 Functions of STP-Link 129

37 States of LEDs and X2 REMOTE output signals

at power failure 132

38 WARNING function 134

39 Default setting of WARNING function 138

40 Factory Setting and Variable Range 138

41 Priority of failure signal 140

42 Error List 141

43 Error List (continued) 142

44 Error List (continued) 143

45 Error List (continued) 144

46 Error List (continued) 145

47 Error List (continued) 146

48 Troubleshooting with no indication of the "FAILURE" LED 147

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